Self-correcting chemical sensor

• US 9,857,243 B2
• Filed: 03/17/2015
• Issued: 01/02/2018
• Est. Priority Date: 03/18/2014
• Status: Active Grant

• Current Assignee: Matrix Sensors, Inc.
• Original Assignee: Matrix Sensors, Inc.
• Inventors: Wilkinson, Paul R., Yamamoto, Steven
• Primary Examiner(s): Williams, Hezron E
• Assistant Examiner(s): Huang, David Z
• Application Number:
  US14/660,870
• Publication Number:
  US 20170023511A1
• Time in Patent Office: 1,022 Days
• CPC Class Codes: G01L 1/10 by measuring variations of frequency of stressed vibrating elements, e.g. of stressed strings using resistance strain gauges G01L1/22
• CPC Class Codes: G01N 2291/0255 (Bio)chemical reactions, e.g. on biosensors
• CPC Class Codes: G01N 2291/0256 Adsorption, desorption, surface mass change, e.g. on biosensors
• CPC Class Codes: G01N 2291/0427 Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
• CPC Class Codes: G01N 2291/106 one or more transducer arrays
• CPC Class Codes: G01N 27/221 by investigating the dielectric properties using microwaves G01N22/00; measuring loss factors or dielectric constants per se G01R27/26
• CPC Class Codes: G01N 27/4163 checking the operation of, or calibrating, the measuring apparatus G01N27/3274, G01N27/4175 and G01N33/0006 take precedence
• CPC Class Codes: G01N 29/022 Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices microdevices per se B81B
• CPC Class Codes: G01N 29/036 by measuring frequency or resonance of acoustic waves
• CPC Class Codes: G01N 29/2406 Electrostatic or capacitive probes, e.g. electret or cMUT-probes
• CPC Class Codes: G01N 29/4427 with stored values, e.g. threshold values
• CPC Class Codes: G01N 33/0006 Calibrating gas analysers

Abstract

An array of resonant sensors self-corrects measured values for the effects of environmental conditions, such as operating temperature, pressure or humidity. The resonant sensors have varied frequency responses to N environmental parameters and M chemical parameters. Each of the sensors has a different, non-zero frequency response to at least two of the parameters. The device also comprises at least one detector for detecting frequency responses of the resonant sensors. Individual parameter values are determined for each of the N environmental parameters and M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the frequency responses to the individual parameter values.

Claims

1. A device comprising:

a) an array of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, wherein N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, and at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters;

b) at least one detector for detecting frequency responses of the resonant sensors; and

c) at least one processor in communication with the detector for receiving signals or data representative of the frequency responses, wherein the processor is programmed to determine individual parameter values for each of the chemical parameters according to the detected frequency responses and a system of equations using at least one matrix of calibration terms that relate the detected frequency responses to the individual parameter values, wherein each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors, and the matrix has at least (N+M) rows, at least (N+M) columns, and off-diagonal elements with non-zero values.

2. The device of claim 1, wherein at least one of the resonant sensors has a resonating member coated with at least one metal-organic framework.

3. The device of claim 1, wherein the calibration terms comprise functions.

4. The device of claim 1, wherein the processor is further programmed to determine individual parameter values for each of the N environmental parameters according to the detected frequency responses and the equations, and each of the individual parameter values of the N environmental parameters is calculated using the frequency responses of at least two of the resonant sensors.

5. A device comprising:

a) an array of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, wherein N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters, and at least one of the sensors has a resonating member coated with a metal film that reflects light;

b) at least one detector for detecting frequency responses of the resonant sensors; and

c) at least one processor in communication with the detector for receiving signals or data representative of the frequency responses, wherein the processor is programmed to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the detected frequency responses to the individual parameter values, and each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors.

6. The device of claim 5, wherein at least one of the resonant sensors has a resonating member coated with at least one metal-organic framework.

7. A device comprising:

a) an array of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, wherein N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, at least (N+M) of the resonant sensors have different, non-zero frequency responses to at least two of the parameters, each of the resonant sensors has at least one resonating member, and the resonating member of at least one of the sensors has a hydrophobic coating relative to a hydrophilic coating on the resonating member of another one of the sensors;

b) at least one detector for detecting frequency responses of the resonant sensors; and

c) at least one processor in communication with the detector for receiving signals or data representative of the frequency responses, wherein the processor is programmed to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the detected frequency responses to the individual parameter values, and each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors.

8. The device of claim 7, wherein at least one of the resonant sensors has a resonating member that is coated with at least one metal-organic framework.

9. The device of claim 7, wherein the resonating member of at least one of the sensors in the array has a thickness that is at least twice the thickness of the resonating member of another one of the sensors in the array.

10. The device of claim 7, wherein at least one of the sensors has a resonating member with a hole or perforation.

11. The device of claim 7, wherein the processor is further programmed to determine individual parameter values for each of the N environmental parameters according to the detected frequency responses and the equations, and each of the individual parameter values of the N environmental parameters is calculated using the frequency responses of at least two of the resonant sensors.

12. A device comprising:

a) an array of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, wherein N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters, and at least one of the sensors has a resonating member composed of at least two materials having different coefficients of thermal expansion;

b) at least one detector for detecting frequency responses of the resonant sensors; and

c) at least one processor in communication with the detector for receiving signals or data representative of the frequency responses, wherein the processor is programmed to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the detected frequency responses to the individual parameter values, and each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors.

13. The device of claim 12, wherein at least one of the resonant sensors in the array has a resonating member coated with at least one metal-organic framework.

14. A method comprising:

a) exposing a sensor array to a sample, wherein the sensor array comprises a plurality of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, and at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters;

b) detecting frequency responses of the sensors; and

c) employing at least one processor to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using at least one matrix of calibration terms that relate the detected frequency responses to the individual parameter values, wherein each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors, and the matrix has at least (N+M) rows, at least (N+M) columns, and off-diagonal elements with non-zero values.

15. The method of claim 14, wherein at least one of the resonant sensors has a resonating member that is coated with at least one metal-organic framework.

16. The method of claim 14, wherein the calibration terms comprise functions.

17. The method of claim 14, further comprising the step of employing the processor to determine individual parameter values for each of the N environmental parameters according to the detected frequency responses and the calibration terms in the matrix, wherein each of the individual parameter values of the N environmental parameters is calculated using the frequency responses of at least two of the resonant sensors.

18. A method comprising:

a) exposing a sensor array to a sample, wherein the sensor array comprises a plurality of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters, and at least one of the sensors has a resonating member coated with a metal film that reflects light;

b) detecting frequency responses of the sensors; and

c) employing at least one processor to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the detected frequency responses to the individual parameter values, wherein each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors and the corresponding calibration terms.

19. The method of claim 18, wherein at least one of the resonant sensors has a resonating member that is coated with at least one metal-organic framework.

20. A method comprising:

a) exposing a sensor array to a sample, wherein the sensor array comprises a plurality of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters, each of the sensors comprises at least one resonating member, and the resonating member of at least one of the sensors has a hydrophobic coating relative to a hydrophilic coating on the resonating member of another one of the sensors in the array;

b) detecting frequency responses of the sensors; and

c) employing at least one processor to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the detected frequency responses to the individual parameter values, wherein each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors and the corresponding calibration terms.

21. The method of claim 20, wherein at least one of the resonant sensors has a resonating member that is coated with at least one metal-organic framework.

22. The method of claim 20, wherein the processor is further programmed to determine individual parameter values for each of the N environmental parameters according to the detected frequency responses and the equations, and each of the individual parameter values of the N environmental parameters is calculated using the frequency responses of at least two of the resonant sensors and the corresponding calibration terms.

23. A method comprising:

a) exposing a sensor array to a sample, wherein the sensor array comprises a plurality of resonant sensors having varied frequency responses to N environmental parameters and M chemical parameters, N is an integer greater than or equal to 2, M is an integer greater than or equal to 1, at least (N+M) of the sensors have different, non-zero frequency responses to at least two of the parameters, and at least one of the sensors comprises a resonating member composed of at least two materials having different coefficients of thermal expansion;

b) detecting frequency responses of the sensors; and

c) employing at least one processor to determine individual parameter values for each of the M chemical parameters according to the detected frequency responses and a system of equations using calibration terms that relate the detected frequency responses to the individual parameter values, wherein each of the individual parameter values is calculated using the frequency responses of at least two of the resonant sensors and the corresponding calibration terms.

24. The method of claim 23, wherein at least one of the resonant sensors has a resonating member that is coated with at least one metal-organic framework.