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Differential pressure sensor with high pressure capabilities

  • US 9,857,259 B2
  • Filed: 09/30/2014
  • Issued: 01/02/2018
  • Est. Priority Date: 09/30/2014
  • Status: Active Grant
First Claim
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1. A capacitance-based differential pressure sensor for measuring a process variable, the pressure sensor comprising:

  • a first cell half comprising;

    a first metal body having a planar first exterior end wall, a first interior wall, and a cylindrical side wall perpendicular to the first exterior end wall;

    a first insulator that extends from a central portion of the first exterior end wall through the first metal body to a first surface at the first interior wall without extending to the cylindrical side wall; and

    a first capacitor plate positioned on the first insulator at the first surface;

    a second cell half comprising;

    a second metal body having a planar second exterior end wall, a second interior wall, and a cylindrical side wall perpendicular to the second exterior end wall;

    a second insulator that extends from a central portion of the second exterior end wall through the second metal body to a second surface at the second interior wall without extending to the cylindrical side wall; and

    a second capacitor plate positioned on the second insulator at the second surface;

    a diaphragm connected at a joint between the first interior surface of the first cell half and the second interior surface of the second cell half;

    a first isolation tube with a first end in fluid communication with a first interior cavity and extending through the first insulator to exit the first cell half at the first exterior end wall;

    a second isolation tube with a first end in fluid communication with a second interior cavity and extending through the second insulator to exit the second cell half at the second exterior end wall;

    a first electrical lead wire with a first end in contact with the first capacitor plate and extending through the first insulator parallel to the first isolation tube to exit the first cell half parallel to the first isolation tube at the first exterior end wall;

    a second electrical lead wire with a first end in contact with the second capacitor plate and extending through the second insulator parallel to the second isolation tube to exit the second cell half parallel to the second isolation tube at the second exterior end wall;

    a third electrical lead wire with a first end in contact with the first cell half or the second cell half;

    a first fill fluid within the first isolation tube and the first interior cavity; and

    a second fill fluid within the second isolation tube and the second interior cavity,wherein at a point where the first isolation tube and the first electrical lead wire exit the first cell half they are substantially perpendicular to the first exterior end wall, and at a point where the second isolation tube and the second electrical lead wire exit the second cell half they are substantially perpendicular to the second exterior end wall.

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