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Physical quantity sensor, electronic device, and mobile body

  • US 9,857,390 B2
  • Filed: 08/06/2015
  • Issued: 01/02/2018
  • Est. Priority Date: 08/27/2014
  • Status: Active Grant
First Claim
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1. A physical quantity sensor comprising:

  • a substrate having a first concavity and a substrate ledge, the substrate ledge being provided at a periphery of the substrate;

    a lid having a second concavity facing the first concavity, the lid having a lid ledge at a periphery of the lid, the lid ledge being fixed to the substrate ledge;

    a cavity which is from configured by the first concavity and the second concavity;

    a functional element which is accommodated in the cavity;

    a communication through hole which is formed in the lid ledge, the communication through hole being spaced apart from the first and second concavities in a plan view; and

    a groove which is formed in the substrate ledge and communicates with the first concavity, the groove extending along a top substrate surface of the substrate ledge from the communication through hole to an edge of the first concavity,wherein the communication through hole spatially communicates with the cavity via the groove.

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