Three dimensional nanometer filters and methods of use
First Claim
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1. A filter substrate, comprising:
- a base material;
deposited alternating layers of sacrificial material between layers of structural material disposed onto the base material creating a layered base material; and
filter sidewalls etched into the deposited alternating layers of the layered base material, where at least a portion of the layers of sacrificial material between the layers of structural material have been removed to form filter slots in the filter sidewalls, and channels extend between the filter sidewalls, wherein a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized.
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Abstract
Three dimensional nanoparticle filters are provided herein. In one embodiment a filter device includes a base material, alternating layers of sacrificial material between layers of structural material being deposited onto the base material to create a layered base material, and filter sidewalls etched into the deposited alternating layers of the layered base material to remove the layers of sacrificial material between the layers of structural material to form filter slots in the filter sidewalls as well as create channels between the filter sidewalls, where a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized.
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15 Claims
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1. A filter substrate, comprising:
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a base material; deposited alternating layers of sacrificial material between layers of structural material disposed onto the base material creating a layered base material; and filter sidewalls etched into the deposited alternating layers of the layered base material, where at least a portion of the layers of sacrificial material between the layers of structural material have been removed to form filter slots in the filter sidewalls, and channels extend between the filter sidewalls, wherein a size of the filter slots is selectable based on a thickness of the layers of sacrificial material utilized. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A filter substrate, comprising:
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a base material; and a continuous filter sidewall disposed on the base material, the continuous filter sidewall comprising layers of porous material and layers of sacrificial material and spaces and including an input and an output and outlet sections, the continuous filter sidewall being fabricated so as to comprise filtering elements, wherein fluid entering inlet sections passes through the continuous filter sidewall to remove particulates by the filtering elements and a filtered fluid exits the outlet sections. - View Dependent Claims (15)
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Specification