MEMS sensor with decoupled drive system

• US 9,863,769 B2
• Filed: 04/03/2015
• Issued: 01/09/2018
• Est. Priority Date: 09/16/2011
• Status: Active Grant

• Current Assignee: Invensense Incorporated (TDK Corporation)
• Original Assignee: Invensense Incorporated (TDK Corporation)
• Inventors: Anac, Ozan, Seeger, Joseph
• Primary Examiner(s): CAPUTO, LISA M
• Assistant Examiner(s): Williams, Jamel
• Application Number:
  US14/678,774
• Publication Number:
  US 20150211853A1
• Time in Patent Office: 1,012 Days
• Field of Search: 7350412
• CPC Class Codes: G01C 19/5712 the devices involving a micromechanical structure

Abstract

In a first aspect, the angular rate sensor comprises a substrate and a rotating structure anchored to the substrate. The angular rate sensor also includes a drive mass anchored to the substrate and an element coupling the drive mass and the rotating structure. The angular rate sensor further includes an actuator for driving the drive mass into oscillation along a first axis in plane to the substrate and for driving the rotating structure into rotational oscillation around a second axis normal to the substrate; a first transducer to sense the motion of the rotating structure in response to a Coriolis force in a sense mode; and a second transducer to sense the motion of the sensor during a drive mode. In a second aspect the angular rate sensor comprises a substrate and two shear masses which are parallel to the substrate and anchored to the substrate via flexible elements.

Claims

1. An angular rate sensor comprising:

a substrate;

first and second shear masses coupled to the substrate, the first and second shear masses flexibly coupled to each other;

a rotating structure coupled to the substrate;

a drive mass coupled to the substrate;

a flexible element coupling the drive mass and the rotating structure;

an actuator coupled to the rotating structure via the drive mass for driving the rotating structure into rotational oscillation around a first axis normal to the substrate, the actuator driving the drive mass moving in a direction parallel to the substrate in a first direction and driving the first and second shear masses in anti-phase in a second direction, wherein the second direction is not parallel to the first direction;

a first transducer responsive to the rotational oscillation of the rotating structure during a drive mode; and

a second transducer which is responsive to angular velocity of the angular rate sensor.

2. The angular rate sensor of claim 1, wherein the first transducer is coupled to the rotating structure.

3. The angular rate sensor of claim 1, wherein the rotating structure comprises at least one of a rectangular proof mass or a circular proof mass.

4. The angular rate sensor of claim 1, wherein the drive mass is configured to be driven in a translational mode.

5. The angular rate sensor of claim 1, wherein an amplitude of the rotating structure is dependent upon the drive mass motion and the coupling element stiffness.

6. The angular rate sensor of claim 5, wherein the drive mass and the rotating structure form a mechanical system of two degrees of freedom.

7. The angular rate sensor of claim 1, wherein at least one first proof mass is flexibly coupled to the rotating structure and the at least one first proof mass responds to a Coriolis force.

8. The angular rate sensor of claim 1, wherein the rotating structure responds to a Coriolis force.

9. The angular rate sensor of claim 1, wherein the rotating structure is flexibly coupled to an at least one first translational mass and wherein the first translational mass is flexibly coupled to the substrate and is configured to translate along a second axis that is parallel to the substrate.

10. The angular rate sensor of claim 9, wherein the first transducer is coupled to the first translational mass.

11. The angular rate sensor of claim 9, wherein the angular rate sensor comprises a second translational mass, wherein the second translational mass is flexibly coupled to the substrate and is configured to translate along a third axis that is parallel to the substrate and to the second axis and wherein the first translational mass and the second translational mass moves out of phase along the second axis and the third axis, respectively.

12. The angular rate sensor of claim 11, wherein the first translational mass and the and second translational masses are configured to move anti-phase in response to a Coriolis force acting in a direction that is normal to the substrate generated by an angular rate around a fourth axis that is in-plane and orthogonal to the second axis.

13. The angular rate sensor of claim 11, wherein a proof mass is flexibly connected to the first translational mass that is able to move in the same direction as the second translational mass.

14. The angular rate sensor of claim 13, wherein a second proof mass is flexibly connected to a second translational mass which is able to move in the same direction as the first translational mass.

15. The angular rate sensor of claim 13, wherein the proof masses is able to move in response to a Coriolis force acting in a direction that is parallel to the first axis generated by an angular rate around an axis that is orthogonal to the substrate.

16. The angular rate sensor of claim 9, wherein a proof mass is flexibly connected to the first translational mass via a first spring and flexibly connected to the second translational mass via a second spring and rotates around an axis orthogonal to the substrate while the drive mass is driven in a first direction.

17. The angular rate sensor of claim 16, wherein the proof mass responds to a Coriolis force generated by an angular rate around an axis parallel to the substrate and orthogonal to the first axis.

18. The angular rate sensor of claim 1, wherein motion of the drive mass is less than the motion of the rotating structure.

19. The angular rate sensor of claim 1, further comprising a suspension system coupling the drive mass to the substrate, wherein the suspension system is stiffer than the flexible element while rotating out of plane.

20. The angular rate sensor of claim 1, further comprising:

a second rotating structure coupled to the rotating structure.

21. An angular rate sensor comprising:

a substrate;

a sense system comprising;

a rotating structure coupled to the substrate;

a first transducer responsive to the rotational oscillation of the rotating structure during a drive mode; and

a second transducer which is responsive to angular velocity of the angular rate sensor; and

a drive system comprising;

a drive mass coupled to the substrate; and

an actuator coupled to the drive mass, the actuator driving the drive mass moving in a direction parallel to the substrate in a first direction; and

a flexible element coupling the drive system to the sense system, wherein the actuator in the drive system is coupled to the rotating structure in the sense system for driving the rotating structure into rotational oscillation around a first axis normal to the substrate.

22. The angular rate sensor of claim 21, wherein the first transducer is coupled to a shear mass.

23. The angular rate sensor of claim 21, wherein a first translational mass is flexibly coupled to the substrate and translates along a second axis that is parallel to the substrate.

24. The angular rate sensor of claim 23, wherein a first proof mass is flexibly connected to the first translational mass via a first spring and flexibly connected to a second translational mass via a second spring and rotates around an axis orthogonal to the substrate while the drive mass is driven in a first direction.

25. The angular rate sensor of claim 24, wherein a second proof mass is flexibly connected to the first translational mass that is able to move in the same direction as the second translational mass.