Piezoelectric sensor and pressure detection apparatus

• US 9,864,450 B2
• Filed: 05/21/2014
• Issued: 01/09/2018
• Est. Priority Date: 06/04/2013
• Status: Active Grant

• Current Assignee: Nissha Co., Ltd.
• Original Assignee: Nissha Co., Ltd.
• Inventors: Watazu, Yuji, Suetomi, Yoshiko, Kakutani, Eiji, Ozaki, Keisuke, Shibata, Junichi, Tokuno, Katsumi, Okumura, Shuzo, Omote, Ryomei
• Primary Examiner(s): Sim, Matthew
• Application Number:
  US14/895,872
• Publication Number:
  US 20160124560A1
• Time in Patent Office: 1,329 Days
• CPC Class Codes: G01L 1/16 using properties of piezoelectric devices
• CPC Class Codes: G06F 3/0412 Digitisers structurally integrated in a display
• CPC Class Codes: G06F 3/04144 using an array of force sensing means position sensing using the local deformation of sensor cells G06F3/0447
• CPC Class Codes: G06F 3/047 using sets of wires, e.g. crossed wires
• CPC Class Codes: H10N 30/302 Sensors
• CPC Class Codes: H10N 30/857 Macromolecular compositions
• CPC Class Codes: H10N 30/878 the principal material being non-metallic, e.g. oxide or carbon based

Abstract

A piezoelectric sensor in which position detection and load detection can be achieved. The piezoelectric sensor includes a piezoelectric layer interposed between the upper electrode and the lower electrode. In the piezoelectric sensor, at least one of the upper electrode and the lower electrode includes a plurality of electrodes patterns.

Claims

1. A piezoelectric sensor comprising:

an upper electrode;

a lower electrode; and

a piezoelectric layer interposed between the upper electrode and the lower electrode;

at least one of the upper electrode and the lower electrode including a plurality of electrode patterns;

the upper electrode including a plurality of first pattern electrodes extending in a first direction;

the lower electrode including a plurality of second pattern electrodes extending in the same direction as that of the first pattern electrodes; and

at least one of the following;

a width of the first pattern electrodes becomes larger as the first pattern electrodes approach a peripheral portion of the piezoelectric layer; and

a width of the second pattern electrodes becomes larger as the second pattern electrodes approach the peripheral portion of the piezoelectric layer.

2. The piezoelectric sensor according to claim 1, wherein

the first pattern electrode includes:

a plurality of first electrodes laminated on the piezoelectric layer with a gap between each other; and

first connecting portions formed between the adjacent first electrodes, and electrically connecting the first electrodes with each other; and

the second pattern electrode includes;

a plurality of second electrodes laminated below the piezoelectric layer, and overlapping the first electrodes; and

second connecting portions electrically connecting the second electrodes with each other.

3. The piezoelectric sensor according to claim 2, wherein the first electrodes are arranged such that the first electrodes overlap the second electrode via the piezoelectric layer.

4. The piezoelectric sensor according to claim 1, wherein the first pattern electrodes have a strip-shape.

5. The piezoelectric sensor according to claim 1, wherein the second pattern electrodes have a strip-shape.

6. The piezoelectric sensor according to claim 1, wherein the width of the first pattern electrodes becomes larger as the first pattern electrodes approach the peripheral portion of the piezoelectric layer.

7. The piezoelectric sensor according to claim 1, wherein the width of the second pattern electrodes becomes larger as the second pattern electrodes approach the peripheral portion of the piezoelectric layer.

8. The piezoelectric sensor according to claim 1, wherein pitch intervals of the first pattern electrodes are constant.

9. The piezoelectric sensor according to claim 1, wherein pitch intervals of the second pattern electrodes are constant.

10. The piezoelectric sensor according to claim 1, wherein the piezoelectric layer includes active piezoelectric portions and inactive piezoelectric portions, and the first pattern electrodes are laminated on the active piezoelectric portions.

11. The piezoelectric sensor according to claim 1, wherein the piezoelectric layer includes active piezoelectric portions and inactive piezoelectric portions, and the second pattern electrodes are laminated on the active piezoelectric portions.

12. The pressure detection apparatus according to claim 11, wherein the touch panel is a capacitance type touch panel.

13. The pressure detection apparatus further comprising a touch panel provided on the piezoelectric sensor according to claim 1.

14. A piezoelectric sensor comprising:

an upper electrode;

a lower electrode; and

a piezoelectric layer interposed between the upper electrode and the lower electrode, the piezoelectric layer including;

a first piezoelectric layer in contact with the upper electrode;

a second piezoelectric layer in contact with the lower electrode; and

a reference electrode arranged between the first piezoelectric layer and the second piezoelectric layer;

at least one of the upper electrode and the lower electrode including a plurality of electrode patterns;

the upper electrode including a plurality of first pattern electrodes extending in a first direction; and

the lower electrode including a plurality of second pattern electrodes extending in the same direction as that of the first pattern electrodes.

15. A piezoelectric sensor comprising:

an upper electrode;

a lower electrode; and

a piezoelectric layer interposed between the upper electrode and the lower electrode;

at least one of the upper electrode and the lower electrode including a plurality of electrode patterns;

the upper electrode including a plurality of first pattern electrodes extending in a first direction;

the lower electrode including a plurality of second pattern electrodes extending in the same direction as that of the first pattern electrodes; and

at least one of the following;

the first pattern electrodes have a concave-convex shape, and the first pattern electrodes are arranged such that convex portions and concave portions of the concave-convex shape engage with each other between the first pattern electrodes, and a pitch interval of the first pattern electrodes is shorter than a length of a shorter diameter of a contact surface formed when an input makes contact with the piezoelectric sensor; and

the second pattern electrodes have a concave-convex shape, and the second pattern electrodes are arranged such that convex portions and concave portions of the concave-convex shape engage with each other between the second pattern electrodes, and a pitch interval of the second pattern electrodes is shorter than the length of the shorter diameter of the contact surface formed when the input makes contact with the piezoelectric sensor.

16. The piezoelectric sensor according to claim 15, wherein the first pattern electrodes have the concave-convex shape, and the first pattern electrodes are arranged such that convex portions and concave portions of the concave-convex shape engage with each other between the first pattern electrodes, and the pitch interval of the first pattern electrodes is shorter than the length of the shorter diameter of the contact surface formed when the input makes contact with the piezoelectric sensor.

17. The piezoelectric sensor according to claim 15, wherein the second pattern electrode has the concave-convex shape, and the second pattern electrode is arranged such that convex portions and concave portions of the concave-convex shape engage with each other between the second pattern electrodes, and the pitch interval of the second pattern electrodes is shorter than the length of the shorter diameter of the contact surface formed when the input makes contact with the piezoelectric sensor.