Selective etch using material modification and RF pulsing

• US 9,865,484 B1
• Filed: 06/29/2016
• Issued: 01/09/2018
• Est. Priority Date: 06/29/2016
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Citla, Bhargav, Ying, Chentsau, Nemani, Srinivas, Babayan, Viachslav, Stowell, Michael
• Primary Examiner(s): OLSEN, ALLAN W
• Application Number:
  US15/197,060
• Publication Number:
  US 20180005850A1
• Time in Patent Office: 559 Days
• Field of Search: None
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32146 Amplitude modulation, includes pulsing
• CPC Class Codes: H01J 37/32706 Polarising the substrate
• CPC Class Codes: H01L 21/3105 After-treatment
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/3115 Doping the insulating layers
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/6831 using electrostatic chucks
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: H01L 21/68735 characterised by edge profile or support profile

Abstract

Semiconductor systems and methods may include methods of performing selective etches that include modifying a material on a semiconductor substrate. The substrate may have at least two exposed materials on a surface of the semiconductor substrate. The methods may include forming a low-power plasma within a processing chamber housing the semiconductor substrate. The low-power plasma may be a radio-frequency (“RF”) plasma, which may be at least partially formed by an RF bias power operating between about 10 W and about 100 W in embodiments. The RF bias power may also be pulsed at a frequency below about 5,000 Hz. The methods may also include etching one of the at least two exposed materials on the surface of the semiconductor substrate at a higher etch rate than a second of the at least two exposed materials on the surface of the semiconductor substrate.

Claims

1. A method of performing a selective etch, the method comprising:

modifying a material on a semiconductor substrate having at least two exposed materials on a surface of the semiconductor substrate;

forming a low-power plasma within a processing chamber housing the semiconductor substrate, wherein the low-power plasma is a radio-frequency (RF) plasma, and wherein the low-power plasma is at least partially formed by an RF bias power operating at between about 10 W and 100 W and at a pulsing frequency below about 5,000 Hz; and

etching one of the at least two exposed materials on the surface of the semiconductor substrate at a higher rate than a second of the at least two exposed materials on the surface of the semiconductor substrate.

2. The method of claim 1, wherein the modifying comprises forming a plasma from a precursor within the processing chamber with the RF bias power.

3. The method of claim 2, wherein the precursor is selected from the group consisting of oxygen, hydrogen, or helium.

4. The method of claim 1, wherein each of the at least two exposed materials on the surface of the semiconductor substrate are selected from the group consisting of silicon oxide, silicon nitride, silicon carbide, and silicon oxycarbide.

5. The method of claim 1, wherein the RF bias power at least partially forming the low-power plasma operates at a duty cycle below about 50%.

6. The method of claim 1, wherein forming the low-power plasma further comprises utilizing an RF source power below about 100 W.

7. The method of claim 1, wherein forming the low-power plasma further comprises utilizing a pulsed DC power.

8. The method of claim 7, wherein the pulsed DC power is applied to a bipolar electrostatic chuck supporting the semiconductor substrate.

9. The method of claim 7, wherein the pulsed DC power is applied to a conductive ring embedded in a shield ring of a pedestal supporting the semiconductor substrate or embedded in a showerhead within the processing chamber.

10. A method of removing material from a semiconductor substrate, the method comprising:

modifying a material on a semiconductor substrate having at least two exposed materials on a surface of the semiconductor substrate, wherein the modifying comprises forming a plasma from a precursor with an RF bias power to generate plasma effluents that modify the material;

forming a low-power plasma within a processing chamber housing the semiconductor substrate, wherein the low-power plasma is a radio-frequency (RF) plasma, and wherein the low-power plasma is formed by a pulsed RF bias power operating at between about 20 W and 50 W at a pulsing frequency between about 500 Hz and about 2,000 Hz at a duty cycle of between about 20% and 50%;

operating a DC pulsed power on an alternating frequency with the RF bias power pulsing; and

etching one of the at least two exposed materials on the surface of the semiconductor substrate at a selectivity of at least about 20;

1 with respect to a second of the at least two exposed materials on the surface of the semiconductor substrate.

11. The method of claim 10, wherein the modifying comprises a chemical modification causing a chemical change to the material on the semiconductor substrate.

12. The method of claim 10, wherein the modifying comprises a physical modification utilizing an inert precursor.

13. The method of claim 12, wherein the physical modification comprises damaging bonds of the material on the semiconductor substrate with ions of the inert precursor.

14. The method of claim 10, wherein forming the low-power plasma further comprises utilizing an RF source power operating up to about 100 W.