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Multiple coil spring MEMS resonator

  • US 9,866,200 B2
  • Filed: 10/14/2015
  • Issued: 01/09/2018
  • Est. Priority Date: 10/22/2014
  • Status: Active Grant
First Claim
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1. A MEMS (microelectromechanical systems) resonator comprising:

  • a center anchor connected to a substrate;

    a resonator body comprising one or more pairs of coil springs and an outer closed ring suspended above the substrate, the coil springs extending in a spiral pattern from the center anchor to the outer closed ring, the center anchor is at a nodal point of the resonator body;

    one or more transducers formed on the outer closed ring, each transducer being formed perpendicular to and extending outward from the outer closed ring;

    a set of drive electrodes and a set of sense electrodes formed attached to the substrate, each transducer being capacitively coupled to one drive electrode and one sense electrode, a pair of the drive and sense electrodes being coupled to drive a respective transducer using electrostatic parallel plate drive, the drive and sense electrodes and the respective transducer being capacitivly coupled in a parallel plate configuration and each of the drive and sense electrodes being separated from the respective transducer by a narrow gap in the parallel plate configuration.

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