Scalable multi-role surface-wave plasma generator

• US 9,867,269 B2
• Filed: 03/17/2014
• Issued: 01/09/2018
• Est. Priority Date: 03/15/2013
• Status: Active Grant

• Current Assignee: Starfire Industries LLC
• Original Assignee: Starfire Industries LLC
• Inventors: Ruzic, David N., Stubbers, Robert A., Jurczyk, Brian E.
• Primary Examiner(s): Vu, Vu A
• Application Number:
  US14/217,342
• Publication Number:
  US 20140315347A1
• Time in Patent Office: 1,394 Days
• Field of Search: 438 94
• CPC Class Codes: H01L 21/67017 Apparatus for fluid treatment H01L21/67126, H01L21/6715 take precedence
• CPC Class Codes: H01L 21/67155 Apparatus for manufacturing or treating in a plurality of work-stations
• CPC Class Codes: H01L 31/18 Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
• CPC Class Codes: H05H 1/46 using applied electromagnetic fields, e.g. high frequency or microwave energy H05H1/26 takes precedence
• CPC Class Codes: H05H 1/4615 using surface waves
• CPC Class Codes: H05H 1/463 using antennas or applicators

Abstract

Systems and methods are described herein for generating surface-wave plasmas capable of simultaneously achieving high density with low temperature and planar scalability. A key feature of the invention is reduced damage to objects in contact with the plasma due to the lack of an RF bias; allowing for damage free processing. The preferred embodiment is an all-in-one processing reactor suitable for photovoltaic cell manufacturing, performing saw-damage removal, oxide stripping, deposition, doping and formation of heterostructures. The invention is scalable for atomic-layer deposition, etching, and other surface interaction processes.

Claims

1. A surface-wave plasma source for generating a surface wave plasma, the surface-wave plasma source comprising:

a microwave launch structure comprising;

a dielectric insulator layer,

a patch antenna adjacent the dielectric insulator layer,

a conducting baseplate,

a microwave signal generator providing a microwave frequency output signal, and

an impedance matching feedthrough signally coupling the microwave frequency output signal to the patch antenna,

wherein the patch antenna and conducting baseplate are arranged to provide radiating slots in a space comprising a dielectric material between the patch antenna and the conducting baseplate,

wherein the microwave signal generator is configured to operate, in accordance with a control loop, to vary a frequency of the microwave frequency output signal, and

wherein the microwave signal generator is configured to operate, in accordance with the control loop, to provide a plasma turn-on and an impedance matching in a response time in an order of 1 microsecond to 10 microseconds.

2. The surface-wave plasma source of claim 1, wherein the patch antenna and dielectric insulator layer are in a physical configuration taken from the group of geometries consisting of:

planar, coaxial, and ring shape.

3. The surface-wave plasma source of claim 1 further comprising a plurality of the microwave launch structure, the plurality of the microwave launch structure being arranged in one of the group of periodic arrangements consisting of a periodic structure to generate overlapping plasma zones to approximate a uniform plasma sheet.

4. The surface-wave plasma source of claim 3 wherein the microwave signal generator is configured to tailor plasma properties of the surface wave plasma over a process substrate, the tailoring being affected by adjusting one of the group consisting of:

power, frequency and phase of the microwave frequency output signal.

5. The surface-wave plasma source of claim 1, wherein the frequency of the microwave frequency output signal is adjusted to change overall circuit impedance arising from a changed plasma load condition.

6. The surface-wave plasma source of claim 1 wherein the control loop is configured to sense a change in system impedance.

7. The surface-wave plasma source of claim 6 wherein the frequency is varied, in accordance with the change in system impedance, to affect impedance matching between the first microwave launch structure and the surface wave plasma.

8. The surface-wave plasma source of claim 1 wherein the control loop is configured to sense changes in a plasma load of the surface wave plasma.

9. The surface-wave plasma source of claim 1 wherein the microwave launch structure further comprises a dielectric channel, fanned on an adjacent surface of the patch antenna opposite the dielectric insulator layer, the dielectric channel providing a spacing between the patch antenna and the conducting baseplate.

10. The surface-wave plasma source of claim 1, wherein the patch antenna and dielectric insulator layer are formed as a ring shape physical configuration.

11. A surface-wave plasma source for generating a surface wave plasma, the surface-wave plasma source comprising:

a microwave launch structure comprising;

a dielectric insulator layer,

a patch antenna adjacent the dielectric insulator layer,

a conducting baseplate,

a dielectric channel, formed on an adjacent surface of the patch antenna opposite the dielectric insulator layer, the dielectric channel providing a spacing between the patch antenna and the conducting baseplate,

a microwave signal generator providing a microwave frequency output signal, and

an impedance matching feedthrough signally coupling the microwave frequency output signal to the patch antenna,

wherein the patch antenna and conducting baseplate are arranged to provide radiating slots in a space between the patch antenna and the conducting baseplate, and

wherein the dielectric insulator layer is functionally graded in a varying thickness over a surface of the patch antenna.

12. The surface-wave plasma source of claim 11 wherein the dielectric insulator layer is functionally graded to have a greater thickness at an edge of the patch antenna, which forms the radiating slots, in relation to a thickness of the dielectric insulator layer at an inner area of the of the patch antenna.

13. The surface-wave plasma source of claim 11 wherein the dielectric insulator layer is functionally graded in a varying thickness over a surface of the conducting baseplate.

14. The surface-wave plasma source of claim 11, wherein the patch antenna and dielectric insulator layer are in a physical configuration taken from the group of geometries consisting of:

planar, coaxial, and ring shape.

15. The surface-wave plasma source of claim 11, wherein the patch antenna and dielectric insulator layer are formed as a ring shape physical configuration.

16. A surface-wave plasma source for generating a surface wave plasma, the surface-wave plasma source comprising:

a microwave launch structure comprising;

a dielectric insulator layer,

a patch antenna adjacent the dielectric insulator layer,

a conducting baseplate,

a microwave signal generator providing a microwave frequency output signal, and

an impedance matching feedthrough signally coupling the microwave frequency output signal to the patch antenna,

wherein the patch antenna and conducting baseplate are arranged to provide radiating slots in a space comprising a dielectric material between the patch antenna and the conducting baseplate, and

wherein the dielectric insulator layer is functionally graded in a varying thickness over a surface of the patch antenna.

17. The surface-wave plasma source of claim 16, wherein the patch antenna and dielectric insulator layer are in a physical configuration taken from the group of geometries consisting of:

planar, coaxial, and ring shape.

18. The surface-wave plasma source of claim 16, wherein the patch antenna and dielectric insulator layer are formed as a ring shape physical configuration.

19. A surface-wave plasma source for generating a surface wave plasma, the surface-wave plasma source comprising:

a microwave launch structure comprising;

a dielectric insulator layer,

a patch antenna adjacent the dielectric insulator layer,

a conducting baseplate,

a microwave signal generator providing a microwave frequency output signal, and

an impedance matching feedthrough signally coupling the microwave frequency output signal to the patch antenna,

wherein the patch antenna and conducting baseplate are arranged to provide radiating slots in a space comprising a dielectric material between the patch antenna and the conducting baseplate, and

wherein the surface-wave plasma source utilizes a structure, for gas injection or gas removal under a formation zone of the surface wave plasma, the structure taken from the group consisting of;

a porous dielectric material and a porous metal material.

20. The surface-wave plasma source of claim 19, wherein the patch antenna and dielectric insulator layer are in a physical configuration taken from the group of geometries consisting of:

planar, coaxial, and ring shape.

21. The surface-wave plasma source of claim 19, wherein the patch antenna and dielectric insulator layer are formed as a ring shape physical configuration.

22. The surface-wave plasma source of claim 19, wherein the structure is a porous injector co-located with a gas manifold or distributor to direct flow in a particular distribution relative to the microwave launch structure.

23. The surface-wave plasma source of claim 19, wherein the structure has holes less than or equal to 0.020 inches in diameter.

24. An integrated photovoltaic module processing station comprising:

a surface-wave plasma source comprising a plurality of a microwave launch structure, each one of the plurality of the microwave launch structure comprising;

a dielectric insulator layer,

a patch antenna adjacent the dielectric insulator layer,

a conducting baseplate,

a dielectric channel, formed on an adjacent surface of the patch antenna opposite the dielectric insulator layer, the dielectric channel providing a spacing between the patch antenna and the conducting baseplate,

a microwave signal generator providing a microwave frequency output signal, and

an impedance matching feedthrough signally coupling the microwave frequency output signal to the patch antenna,

wherein the patch antenna and conducting baseplate are arranged to provide radiating slots in a space comprising a dielectric material between the patch antenna and the conducting baseplate,

wherein the microwave signal generator is configured to operate, in accordance with a control loop, to vary a frequency of the microwave frequency output signal;

a wafer carrier; and

a gaseous precursor and carrier gas injection and pumping subsystem.

25. The station of claim 24, wherein the surface-wave plasma source and the wafer carrier are configured to simultaneously process an M×

N array of wafers.

26. The station according to claim 25 wherein the wafer carrier is an integral component of the station.

27. The surface-wave plasma source of claim 24, wherein the patch antenna and dielectric insulator layer are in a physical configuration taken from the group of geometries consisting of:

planar, coaxial, and ring shape.

28. The surface-wave plasma source of claim 24, wherein the patch antenna and dielectric insulator layer are formed as a ring shape physical configuration.