Brazed diamond tools and methods for making the same

• US 9,868,100 B2
• Filed: 06/03/2011
• Issued: 01/16/2018
• Est. Priority Date: 04/04/1997
• Status: Expired due to Term

• Current Assignee: Chien-Min Sung
• Original Assignee: Kinik Company
• Inventors: Sung, Chien-Min
• Primary Examiner(s): Eley, Timothy V
• Application Number:
  US13/153,176
• Publication Number:
  US 20110296766A1
• Time in Patent Office: 2,419 Days
• Field of Search: 51297, 125 1602, 125 12, 125 21, 125 22, 451527, 451529, 451533, 451544
• CPC Class Codes: B01J 2203/061 Graphite
• CPC Class Codes: B01J 2203/062 Diamond
• CPC Class Codes: B01J 2203/0645 Boronitrides
• CPC Class Codes: B01J 2203/0655 Diamond
• CPC Class Codes: B01J 2203/066 Boronitrides
• CPC Class Codes: B01J 2203/068 Crystal growth
• CPC Class Codes: B01J 3/062 characterised by the composition of the materials to be processed
• CPC Class Codes: B24B 53/017 Devices or means for dressing, cleaning or otherwise conditioning lapping tools
• CPC Class Codes: B24D 11/001 Manufacture of flexible abrasive materials
• CPC Class Codes: B24D 3/24 for close-grained structure B24D3/002 takes precedence

Abstract

Superabrasive tools and methods for the making thereof are disclosed and described. In one aspect, superabrasive particles are chemically bonded to a matrix support material according to a predetermined pattern by a braze alloy. The brazing alloy may be provided as a powder, thin sheet, or sheet of amorphous alloy. A template having a plurality of apertures arranged in a predetermined pattern may be used to place the superabrasive particles on a given substrate or matrix support material.

Claims

1. A method for making a CMP pad dresser, comprising:

arranging a plurality of superabrasive particles on a 4 inch diameter flat disk in a metal matrix comprising a brazing alloy sheet at specific positions such that the plurality of superabrasive particles are held in the brazing alloy sheet according to a predetermined pattern, wherein tips of each of the plurality of the superabrasive particles protrude from the brazing alloy sheet to a uniform height having a variance that is less than or equal to 50 μ

m, said superabrasive particles being disposed in different sizes and/or different concentrations at different parts of the brazing alloy sheet, and wherein the plurality of superabrasive particles is positioned in the predetermined pattern at a first location and the predetermined pattern of the plurality of superabrasive particles is transferred to a second location on the brazing alloy sheet in order to be held in the brazing alloy sheet.

2. The method of claim 1, wherein arranging the plurality of superabrasive particles includes:

placing a template having a plurality of apertures corresponding to the predetermined pattern at a first location upon a transfer plate;

filling the apertures with superabrasive particles;

removing the template from the transfer plate; and

transferring the superabrasive particles to the brazing alloy sheet at the second location using the transfer plate such that the superabrasive particles are arranged in the predetermined pattern.

3. The method of claim 2, wherein the template is configured to hold only one superabrasive particle in each aperture.

4. The method of claim 2, further comprising affixing the superabrasive particles to the transfer plate with an adhesive.

5. The method of claim 1, wherein the uniform height is an equal height.

6. The method of claim 1, wherein the predetermined pattern is a uniform pattern.

7. The method of claim 1, wherein the plurality of superabrasive particles is diamond or cBN.

8. The method of claim 1, wherein the plurality of superabrasive particles is diamond.

9. A method for making a CMP pad dresser, comprising:

forming a metal matrix comprising a brazing alloy sheet on a 4 inch diameter flat disk to hold a plurality of superabrasive particles therein;

placing a template having a plurality of apertures corresponding to a predetermined pattern upon a transfer plate at a first location;

filling the apertures with superabrasive particles;

removing the template from the transfer plate; and

transferring the superabrasive particles to a second location, said second location being on the brazing alloy sheet, using the transfer plate such that the superabrasive particles are arranged in the predetermined pattern in the brazing alloy sheet, wherein tips of each of the plurality of the superabrasive particles protrude from the brazing alloy sheet to a uniform height having a variance that is less than or equal to 50 μ

m, and wherein the plurality of superabrasive particles are disposed in different sizes and/or different concentrations at different parts of the brazing alloy sheet.

10. The method of claim 9, wherein the uniform height is an equal height.

11. The method of claim 9, wherein the template is configured to hold only one superabrasive particle in each aperture.

12. The method of claim 9, wherein the predetermined pattern is a uniform pattern.

13. The method of claim 9, wherein the plurality of superabrasive particles is diamond or cBN.

14. The method of claim 9, wherein the plurality of superabrasive particles is diamond.

15. The method of claim 9, further comprising affixing the superabrasive particles to the transfer plate with an adhesive.

16. The method of claim 15, further comprising applying a secondary adhesive at the second location, wherein the secondary adhesive bonds to the superabrasive particles more strongly than the adhesive.

17. The method of claim 9, wherein the transfer plate is transparent.

18. A CMP pad dresser made according to the method of claim 9.