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Brazed diamond tools and methods for making the same

  • US 9,868,100 B2
  • Filed: 06/03/2011
  • Issued: 01/16/2018
  • Est. Priority Date: 04/04/1997
  • Status: Expired due to Term
First Claim
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1. A method for making a CMP pad dresser, comprising:

  • arranging a plurality of superabrasive particles on a 4 inch diameter flat disk in a metal matrix comprising a brazing alloy sheet at specific positions such that the plurality of superabrasive particles are held in the brazing alloy sheet according to a predetermined pattern, wherein tips of each of the plurality of the superabrasive particles protrude from the brazing alloy sheet to a uniform height having a variance that is less than or equal to 50 μ

    m, said superabrasive particles being disposed in different sizes and/or different concentrations at different parts of the brazing alloy sheet, and wherein the plurality of superabrasive particles is positioned in the predetermined pattern at a first location and the predetermined pattern of the plurality of superabrasive particles is transferred to a second location on the brazing alloy sheet in order to be held in the brazing alloy sheet.

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