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Pressure-sensing stages for lamination systems

  • US 9,868,273 B2
  • Filed: 09/20/2013
  • Issued: 01/16/2018
  • Est. Priority Date: 09/20/2013
  • Status: Active Grant
First Claim
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1. A lamination system for laminating a first structure to a second structure, the system comprising:

  • a mounting stage for mounting the first structure;

    a movable mounting stage for mounting the second structure, wherein the movable mounting stage includes at least one pressure sensor, the at least one pressure sensor monitoring an uniformity of pressure with which the first structure and the second structure are pressed together during lamination operations;

    a positioner configured to move the movable mounting stage at least laterally or vertically relative to the mounting stage so that the first structure and the second structure come in contact;

    actuators between the positioner and the movable mounting stage; and

    computing equipment coupled to the movable mounting stage and the at least one pressure sensor, wherein the computing equipment is configured to gather pressure data associated with pressures on the second structure using the at least one pressure sensor,wherein the computing equipment is configured to receive pressure signals from the at least one pressure sensor during lamination operations, compare the received pressure signals to target pressures, and responsive to the first structure and the second structure coming into contact operate the actuators based on the received pressure signals so that a uniform pressure is applied across the first structure and the second structure, andwherein operation of the actuators cause the movable mounting stage to move laterally or vertically, and rotate in a x-y plane or out of the x-y plane in order to adjust the position and orientation of the movable mounting stage.

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