Showerhead apparatus for a linear batch chemical vapor deposition system

• US 9,869,021 B2
• Filed: 05/22/2013
• Issued: 01/16/2018
• Est. Priority Date: 05/25/2010
• Status: Active Grant

• Current Assignee: Singulus MOCVD GmbH I.GR.
• Original Assignee: Aventa Technologies, Inc.
• Inventors: Sferlazzo, Piero, Stucky, Dennis R., Fabiano, Paul Thomas, Simonelli, Darren M., Farrell, Matthew C., Couilliard, Robert P.
• Primary Examiner(s): Baldwin, Gordon R
• Assistant Examiner(s): Bennett, Charlee
• Application Number:
  US13/900,028
• Publication Number:
  US 20130270362A1
• Time in Patent Office: 1,700 Days
• CPC Class Codes: C23C 16/45565 Shower nozzles
• CPC Class Codes: C23C 16/45578 Elongated nozzles, tubes with holes
• CPC Class Codes: C23C 16/45589 Movable means, e.g. fans
• CPC Class Codes: C23C 16/4584 the substrate being rotated
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: H01L 21/67109 mainly by convection
• CPC Class Codes: H01L 21/67784 using air tracks
• CPC Class Codes: H01L 21/68771 characterised by supporting more than one semiconductor substrate

Abstract

A showerhead apparatus for a linear batch CVD system includes a movable showerhead, one or more gas supply conduits, and a translation mechanism. Each gas supply conduit provides a precursor gas to the showerhead. The showerhead includes conduits and channels arranged along the length of the showerhead to distribute precursor gas to the surfaces of substrates. The small distance between the substrates and the showerhead limits precursor gas flows from the channels to a small portion of each substrate beneath the showerhead. During a deposition process run, the translation mechanism causes the showerhead to move back and forth over the substrates along a direction perpendicular to a linear arrangement of the substrates. Parasitic deposition within the deposition chamber is substantially reduced in comparison to conventional showerhead apparatus. The ability to accurately control the precursor gas flows and the motion of the showerhead allows for improved thickness uniformity and device yield.

Claims

1. An apparatus comprising:

a deposition chamber;

a stationary substrate carrier disposed in the deposition chamber and having a plurality of receptacles each configured to receive a planar disc substrate on an exposed surface of an intermediate substrate carrier disposed in each said receptacle, said plurality of receptacles arranged in a linear configuration;

a moveable showerhead, disposed in the deposition chamber and above said stationary substrate carrier, having a showerhead conduit to conduct a first precursor gas along a length of the showerhead, a channel along a surface of the showerhead and disposed parallel to the length, and at least one opening between the showerhead conduit and the channel to supply the first precursor gas from the showerhead conduit to the channel;

a gas supply conduit having an end in communication with the showerhead conduit and an opposite end configured to receive the first precursor gas;

a translation mechanism in communication with the showerhead and configured to translate the showerhead in a forward motion and a reverse motion in a direction of motion that is parallel to a width of the showerhead, said translation mechanism comprising a motor-driven lead screw mechanically coupled to a moveable mounting plate, the mounting plate coupled to a pair of parallel rigid arms at a first end of said rigid arms, the rigid arms further joined to said moveable showerhead at a second end of said rigid arms, the pair of rigid arms only passing through a first wall of said deposition chamber; and

a stationary showerhead, disposed in the deposition chamber and above said moveable showerhead, the stationary showerhead having a plurality of slots or holes from which a second precursor gas is directed downward toward the receptacles,

wherein the first precursor gas received at the gas supply conduit is provided along a length of the channel, the translation mechanism translating the showerhead according to a movement of said motor-driven lead screw.

2. The apparatus of claim 1 wherein the at least one opening comprises a slot having a length that is parallel to the length of the moveable showerhead.

3. The apparatus of claim 1 wherein the at least one opening comprises a plurality of holes configured in a substantially linear arrangement that is parallel to the length of the showerhead conduit.

4. The apparatus of claim 1 wherein the showerhead apparatus comprises a second gas supply conduit, the gas supply conduit in communication with one end of the showerhead conduit and the second gas supply conduit having an end in communication with an opposite end of the showerhead conduit.

5. The apparatus of claim 4 further comprising at least one adjustable flow controller in communication with one of the gas supply conduits that is configured to adjust a velocity of the first precursor gas to thereby enable control of a deposition thickness along a direction parallel to the length of the moveable showerhead.

6. The apparatus of claim 1 wherein the opposite end of the gas supply conduit is configured to receive the first precursor gas and a carrier gas.

7. The apparatus of claim 1 further comprising, for each rigid arm, a bellows surrounding a portion of a length of such rigid arm, the bellows coupled at one end to a surface of such rigid arm and coupled at an opposite end to a wall of the deposition chamber to thereby seal the deposition chamber and maintain a vacuum environment therein during translation of the moveable showerhead.

8. The apparatus of claim 1 wherein the moveable showerhead has a vacuum conduit, a vacuum channel along the surface of the showerhead and disposed parallel to the length of the showerhead, and at least one opening between the vacuum conduit and the vacuum channel, the vacuum conduit configured to exhaust at least a portion of the first precursor gas that is provided from the channel of the moveable showerhead that does not react within the deposition chamber.

9. The apparatus of claim 1 further comprising:

a control system in communication with the translation mechanism to control a translation rate of the moveable showerhead; and

a measurement device for determining a thickness of a deposited layer on a substrate and being in communication with the control system, wherein the translation rate of the moveable showerhead is controlled in response to a determination of the thickness of the deposited layer.

10. The apparatus of claim 1 wherein the gas supply conduit includes a flexible tube.

11. The apparatus of claim 1 further comprising a ferrofluidic rotary feedthrough disposed at a location where one of the rigid arms and the gas supply conduit movably pass through the wall of the deposition chamber.

12. The apparatus of claim 1, further comprising a pair of vertical brackets, disposed outside of said deposition chamber, and each having an upper end and a lower end, the upper ends of the vertical brackets connecting the respective pair of rigid arms to the respective vertical brackets and the lower ends of the vertical brackets connecting the vertical brackets to said mounting plate.

13. The apparatus of claim 1, wherein said mounting plate is attached to a set of moveable carriers that engage stationary rails, the rails being parallel to one another and parallel to said direction of movement, the carriers sliding on said rails, so that each of the moveable showerhead, rigid arms and mounting plate translate along said direction of movement according to an action of said motor.

14. The apparatus of claim 1, wherein all of the receptacles in the stationary substrate carrier have a diameter and are arranged in a single row that is parallel to a length of the deposition chamber to hold the planar disc substrates in a straight line and horizontal coplanar configuration.

15. The apparatus of claim 14, further comprising a second channel along the surface of the moveable showerhead, the second channel in fluid communication with a second showerhead conduit, wherein each channel has a shape of a linear slot having a length that is greater than the diameters of the receptacles, each of the linear slots being parallel to one another and parallel to the single row of receptacles, each of the conduits supplying a different gas through the respective one of the channels toward the stationary substrate carrier.

16. The apparatus of claim 15, wherein each linear slot has a V-shaped cross-section.

17. The apparatus of claim 1, wherein each receptacle has a plurality of air injector channels defined therein, the air injector channels configured to introduce a gas to flow upward to float and rotate the intermediate substrate carrier about a vertical axis that extends through a center of the exposed surface of the intermediate substrate carrier.