Inertial angular sensor of balanced MEMS type and method for balancing such a sensor
First Claim
1. A vibrating inertial angular sensor of MEMS type comprising a support of at least two masses which are mounted movably with respect to the support, and at least one electrostatic actuator and at least one electrostatic detector which are designed to respectively produce and detect a vibration of the masses, wherein the sensor comprises a frame connected by first suspension means to the support and each mass is directly connected to the frame by second suspension means, so that each of the masses has only three degrees of freedom in a plane, and the frame has only three degrees of freedom in the plane.
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Abstract
An inertial angular sensor of MEMS type has a support of at least two masses which are mounted movably with respect to the support, at least one electrostatic actuator and at least one electrostatic detector. The masses are suspended in a frame itself connected by suspension means to the support. The actuator and the detector are designed to respectively produce and detect a vibration of the masses, and a method for balancing such a sensor provided with at least one load detector mounted between the frame and the support and with at least one electrostatic spring placed between the frame and one of the masses and slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the load sensor.
16 Citations
11 Claims
- 1. A vibrating inertial angular sensor of MEMS type comprising a support of at least two masses which are mounted movably with respect to the support, and at least one electrostatic actuator and at least one electrostatic detector which are designed to respectively produce and detect a vibration of the masses, wherein the sensor comprises a frame connected by first suspension means to the support and each mass is directly connected to the frame by second suspension means, so that each of the masses has only three degrees of freedom in a plane, and the frame has only three degrees of freedom in the plane.
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7. A method for balancing a sensor, the sensor comprising a support of at least two masses which are mounted movably with respect to the support, and at least one electrostatic actuator and at least one electrostatic detector which are designed to respectively produce and detect a vibration of the masses, wherein the sensor comprises a frame connected by first suspension means to the support and each mass is directly connected to the frame by second suspension means, so that each of the masses has only three degrees of freedom in a plane and the frame has only three degrees of freedom in the plane, and in which at least one unbalance effect detector is mounted between the frame and the support and at least one electrostatic spring is placed between the frame and one of the masses and is slaved so as to ensure dynamic balancing of the sensor as a function of a measurement signal of the unbalance effect detector, the method comprising:
- the steps of measuring and of correcting an anisotropy in frequency between the masses due to production defects, the measurement step being carried out by measuring an effect produced by an unbalance of the sensor resulting from the frequency anisotropy and the correction step being carried out by slaving the control of the electrostatic spring so as to reduce this effect.
- View Dependent Claims (8, 9, 10, 11)
Specification