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Inertial angular sensor of balanced MEMS type and method for balancing such a sensor

  • US 9,869,551 B2
  • Filed: 12/03/2012
  • Issued: 01/16/2018
  • Est. Priority Date: 12/06/2011
  • Status: Active Grant
First Claim
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1. A vibrating inertial angular sensor of MEMS type comprising a support of at least two masses which are mounted movably with respect to the support, and at least one electrostatic actuator and at least one electrostatic detector which are designed to respectively produce and detect a vibration of the masses, wherein the sensor comprises a frame connected by first suspension means to the support and each mass is directly connected to the frame by second suspension means, so that each of the masses has only three degrees of freedom in a plane, and the frame has only three degrees of freedom in the plane.

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