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High-temperature pressure sensing

  • US 9,869,599 B2
  • Filed: 09/30/2014
  • Issued: 01/16/2018
  • Est. Priority Date: 09/30/2014
  • Status: Active Grant
First Claim
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1. A pressure sensing system comprising:

  • a hot zone electronics module having a capacitive pressure sensor which comprises a variable capacitor having a capacitance which changes as a function of applied pressure and a reference capacitor, and an oscillator that provides an oscillating signal to the capacitive pressure sensor, the hot zone electronics module providing at least a first DC sensor signal related to capacitance of the variable capacitor and a second DC sensor signal related to capacitance of the reference capacitor;

    a cool zone electronics module that converts the DC sensor signals into a pressure value and that provides a DC power signal; and

    a plurality of conductors that connect the hot zone electronics module to the cool zone electronics module and that convey the DC power signal to the hot zone electronics module, the plurality of electrical conductors including a first conductor that carries the first DC sensor signal and a second conductor that carries the second DC sensor signal, wherein the plurality of conductors comprise elongate conductors and the hot zone electronics module is located at a remote location relative to the cool zone electronics module, the hot zone electronics module comprises first and second voltage conductors which power the oscillator, a first DC conductor which carries current to the variable capacitor having a capacitance which changes as a function of applied pressure, a second DC conductor which carries current to the reference capacitor, and a difference current conductor which carries a current related to a difference in current flowing through the variable capacitor and the reference capacitor.

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