Magnetic field sensor circuit in package with means to add a signal from a coil

• US 9,869,729 B1
• Filed: 08/30/2016
• Issued: 01/16/2018
• Est. Priority Date: 08/30/2016
• Status: Active Grant

• Current Assignee: Infineon Technologies AG
• Original Assignee: Infineon Technologies AG
• Inventors: Ausserlechner, Udo
• Primary Examiner(s): Astacio-Oquendo, Giovanni
• Assistant Examiner(s): Fortich, Alvaro
• Application Number:
  US15/251,811
• Time in Patent Office: 504 Days
• CPC Class Codes: G01R 33/0029 Treating the measured signals, e.g. removing offset or noise
• CPC Class Codes: G01R 33/0094 Sensor arrays
• CPC Class Codes: G01R 33/07 Hall effect devices

Abstract

Sensor devices, systems and methods are provided, including a sensor package, a first magnetic sensor, disposed within the sensor package, and configured to measure a first magnetic field in a first frequency range and output a first sensor signal based on the measured first magnetic field, a second magnetic sensor, disposed external to the sensor package, and configured to measure a second magnetic field in a second frequency range comprising frequencies higher than frequencies of the first frequency range and output a second sensor signal based on the measured second magnetic field, and a sensor circuit, disposed within the sensor package, and configured to receive the first and the second sensor signals, combine the first and the second sensor signals, and output a combined sensor signal. The first magnetic sensor and the second magnetic sensor are configured to share a cross-over frequency.

Claims

1. A magnetic field sensor system comprising:

a sensor package;

a first magnetic sensor disposed within the sensor package, the first magnetic sensor configured to measure a first magnetic field in a first frequency range and output a first sensor signal based on the measured first magnetic field;

a second magnetic sensor disposed external to the sensor package and electrically coupled to the sensor package, the second magnetic sensor configured to measure a second magnetic field in a second frequency range comprising frequencies higher than frequencies of the first frequency range and output a second sensor signal based on the measured second magnetic field, wherein the first magnetic sensor and the second magnetic sensor share a cross-over frequency; and

a sensor circuit disposed within the sensor package and electrically coupled to the first magnetic sensor and to the second magnetic sensor, the sensor circuit configured to receive the first sensor signal and the second sensor signal, and output a combined sensor signal derived from the first sensor signal and the second sensor signal.

2. The magnetic field sensor system of claim 1, wherein the first magnetic field and the second magnetic field are generated by a same magnetic field source.

3. The magnetic field sensor system of claim 2, wherein the magnetic field source is a conductor, and the first and the second magnetic fields are generated by a current passing through the conductor.

4. The magnetic field sensor system of claim 1, wherein the sensor package includes a semiconductor die and the first magnetic sensor and the sensor circuit are integrated on the semiconductor die.

5. The magnetic field sensor system of claim 1, wherein the sensor package includes a first semiconductor die having the first magnetic sensor integrated thereon and a second semiconductor die having the sensor circuit integrated thereon.

6. The magnetic field sensor system of claim 1, wherein the second magnetic sensor is an inductance coil including at least one terminal connected to the sensor package for transmitting the second sensor signal to the sensor circuit.

7. The magnetic field sensor system of claim 6, wherein the inductance coil is a differential inductance coil having a first winding and a second winding arranged in a subtracting configuration, wherein the first winding is configured to generate a first component of the second sensor signal and includes a first terminal electrically coupled to the sensor package, and the second winding is configured to generate a second component of the second sensor signal and includes a second terminal electrically coupled to the sensor package.

8. The magnetic field sensor system of claim 7, wherein the first winding and the second winding are symmetrically arranged about a center longitudinal axis of a magnetic field source that generates the second magnetic field.

9. The magnetic field sensor system of claim 7, wherein the sensor circuit is configured to receive the first and the second components of the second sensor signal, and derive the second sensor signal from the first and the second components of the second sensor signal.

10. The magnetic field sensor system of claim 1, wherein the first magnetic sensor includes a first set of sensor elements and a second set of set of sensor elements, the first set of sensor elements is configured to generate a first component of the first sensor signal, and the second set of sensor elements is configured to generate a second component of the first sensor signal.

11. The magnetic field sensor system of claim 10, wherein the first set of sensor elements and the second set of sensor elements are electrically connected to the sensor circuit in a subtracting configuration.

12. The magnetic field sensor system of claim 10, wherein the first set of sensor elements and the second set of sensor elements are symmetrically arranged about a center longitudinal axis of a magnetic field source that generates the first magnetic field.

13. The magnetic field sensor system of claim 10, wherein each sensor element of the first and the second set of sensor elements is a spinning current Hall plate configured to operate in a spinning current mode.

14. The magnetic field sensor system of claim 1, wherein the first magnetic sensor is a Hall sensor.

15. The magnetic field sensor system of claim 1, wherein the cross-over frequency is about 10 kHz.

16. The magnetic field sensor system of claim 1, wherein the cross-over frequency is about 1 kHz.

17. The magnetic field sensor system of claim 1, wherein the cross-over frequency is a frequency greater than 0 Hz and less than 10 kHz.

18. The magnetic field sensor system of claim 1, wherein the first frequency range includes a frequency of 0 Hz, and the second frequency range includes a frequency of at least 1 MHz.

19. The magnetic field sensor system of claim 1, further comprising:

a substrate on which the sensor package and the second magnetic sensor are disposed; and

an electric shield disposed in the substrate, between the second magnetic sensor and a magnetic field source, for shielding the second magnetic sensor from an electric field generated by the magnetic field source.

20. The magnetic field sensor system of claim 1, wherein frequencies detected by the first magnetic sensor that are above the cross-over frequency are attenuated in a first signal path of the first magnetic sensor, and frequencies detected by the second magnetic sensor that are below the cross-over frequency are attenuated in a second signal path of the second magnetic sensor.

21. The magnetic field sensor system of claim 1, wherein the sensor circuit is configured to combine the first sensor signal and the second sensor signal, and output the combined sensor signal derived from combining the first sensor signal and the second sensor signal.

22. A method of measuring magnetic fields using a first magnetic sensor disposed within a sensor package and a second magnetic sensor disposed external to the sensor package, the method comprising:

measuring, by the first magnetic sensor, a first magnetic field in a first frequency range;

outputting, by the first magnetic sensor, a first sensor signal based on the measured first magnetic field;

measuring, by the second magnetic sensor, a second magnetic field in a second frequency range comprising frequencies higher than frequencies of the first frequency range, wherein the first magnetic sensor and the second magnetic sensor share a cross-over frequency;

outputting, by the second magnetic sensor, a second sensor signal based on the measured second magnetic field;

receiving, by a sensor circuit disposed within the sensor package, the first sensor signal and the second sensor signal; and

outputting, by the sensor circuit, a combined sensor signal derived from the first sensor signal and the second sensor signal.

23. The method of claim 22, further comprising:

generating, by a magnetic field source, the first magnetic field and the second magnetic field.

24. The method of claim 22, wherein the cross-over frequency is a frequency greater than 0 Hz and less than 20 kHz.

25. The method of claim 24, wherein the first frequency range includes a frequency of 0 Hz, and the second frequency range includes a frequency of at least 1 MHz.

26. The method of claim 22, further comprising:

combining, by the sensor circuit, the first sensor signal and the second sensor signal; and

outputting, by the sensor circuit, the combined sensor signal derived from combining the first sensor signal and the second sensor signal.