Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel
First Claim
1. A strain sensing element provided on a film being deformable, the strain sensing element comprising:
- a non-magnetic layer;
a first magnetic layer;
a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride;
a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and
a spacer layer provided between the first magnetic layer and the second magnetic layer,at least a part of the second magnetic layer being amorphous and including boron.
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Accused Products
Abstract
According to one embodiment, a strain sensing element is provided on a film unit configured to be deformed. The strain sensing element includes a functional layer, a first magnetic layer, a second magnetic layer, and a spacer layer. The functional layer includes at least one of an oxide and a nitride. The second magnetic layer is provided between the functional layer and the first magnetic layer. A magnetization of the second magnetic layer is variable in accordance with a deformation of the film unit. The spacer layer is provided between the first magnetic layer and the second magnetic layer. At least a part of the second magnetic layer is amorphous and includes boron.
13 Citations
20 Claims
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1. A strain sensing element provided on a film being deformable, the strain sensing element comprising:
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a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A pressure sensor comprising:
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a film being deformable; and a strain sensing element provided on the film, the strain sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron. - View Dependent Claims (13, 14, 15, 16)
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17. A strain sensing element provided on a film being deformable, the strain sensing element comprising:
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a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one element selected from the group consisting of magnesium, silicon, and aluminum; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron.
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18. A microphone comprising:
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a pressure sensor, the pressure sensor including; a film being deformable; and a strain sensing element provided on the film, the strain sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron.
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19. A blood pressure sensor comprising:
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a pressure sensor, the pressure sensor including; a film being deformable; and a strain sensing element provided on the film, the strain sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron.
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20. A touch panel comprising:
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a pressure sensor, the pressure sensor including; a film being deformable; and a strain sensing element provided on the film, the strain sensing element including; a non-magnetic layer; a first magnetic layer; a functional layer provided between the non-magnetic layer and the first magnetic layer, the functional layer contacting the non-magnetic layer, the functional layer including at least one selected from the group consisting of an oxide and a nitride; a second magnetic layer provided between the functional layer and the first magnetic layer, a magnetization of the second magnetic layer being variable in accordance with a deformation of the film; and a spacer layer provided between the first magnetic layer and the second magnetic layer, at least a part of the second magnetic layer being amorphous and including boron.
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Specification