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Method for dividing a composite into semiconductor chips, and semiconductor chip

  • US 9,873,166 B2
  • Filed: 07/30/2014
  • Issued: 01/23/2018
  • Est. Priority Date: 08/08/2013
  • Status: Active Grant
First Claim
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1. Method for dividing a composite into a plurality of semiconductor chips along a dividing pattern, comprising the following steps:

  • a) providing a composite which has a carrier, a semiconductor layer sequence and a functional layer;

    b) forming separating trenches in the carrier along the dividing pattern, the separating trenches extending through the carrier and exposing the functional layer; and

    c) cutting through the functional layer by means of coherent radiation along the dividing pattern;

    wherein the divided semiconductor chips each have a part of the semiconductor layer sequence, of the carrier and of the functional layer.

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