Multiple bonding in wafer level packaging

• US 9,873,610 B2
• Filed: 06/27/2013
• Issued: 01/23/2018
• Est. Priority Date: 09/28/2010
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Lin, Chung-Hsien, Chu, Chia-Hua, Chu, Li-Cheng, Hsieh, Yuan-Chih, Cheng, Chun-Wen
• Primary Examiner(s): Li, Meiya
• Application Number:
  US13/929,623
• Publication Number:
  US 20130285170A1
• Time in Patent Office: 1,671 Days
• Field of Search: 257414-416, 257704, 257773, 257E23124, 257E23125, 257E23128, 257E21499, 257E215, 438 48, 438 50- 53, 438105, 438118, 438455, 438456
• CPC Class Codes: B81B 2207/092 Buried interconnects in the substrate or in the lid
• CPC Class Codes: B81B 7/0032 Packages or encapsulation processes for packaging MEMS B81C1/00261; packaging of smart-MEMS B81C1/0023
• CPC Class Codes: B81C 1/00269 Bonding of solid lids or wafers to the substrate
• CPC Class Codes: B81C 1/00357 involving bonding one or several substrates on a non-temporary support, e.g. another substrate
• CPC Class Codes: B81C 2203/0109 Bonding an individual cap on the substrate
• CPC Class Codes: B81C 2203/0792 Forming interconnections between the electronic processing unit and the micromechanical structure
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

A MEMS device is described. The device includes a micro-electro-mechanical systems (MEMS) substrate including a first bonding layer, a semiconductor substrate including a second bonding layer, and a cap including a third bonding layer, the cap coupled to the semiconductor substrate by bonding the second bonding layer to the third bonding layer. The first bonding layer includes silicon, the semiconductor substrate is electrically coupled to the MEMS substrate by bonding the first bonding layer to the second bonding layer, and the MEMS substrate is hermetically sealed between the cap and the semiconductor substrate.

Claims

1. A device, comprising:

a micro-electro-mechanical systems (MEMS) substrate including a first bonding layer, wherein the first bonding layer includes a combination of amorphous silicon and polysilicon;

a semiconductor substrate including a second bonding layer, the semiconductor substrate electrically coupled to the MEMS substrate by bonding the first bonding layer to the second bonding layer, thereby forming a conductive path traversing at least the first bonding layer; and

a cap including a third bonding layer, the cap coupled to the semiconductor substrate by bonding the second bonding layer to the third bonding layer, wherein the third bonding layer includes germanium and the MEMS substrate is hermetically sealed between the cap and the semiconductor substrate, and wherein a bottom surface of the cap is coplanar with a bottom surface of the MEMS substrate.

2. The device of claim 1, wherein the second bonding layer includes at least one of aluminum, titanium, nickel, copper, gold, silver, indium, and tin.

3. The device of claim 1, wherein the second bonding layer is a part of a multilayer interconnect (MLI), and further wherein the MEMS substrate and the cap are bonded to a top layer of the MLI.

4. The device of claim 3, further comprising an interconnect to a bottom layer of the MLI through the semiconductor substrate.

5. The device of claim 1, wherein the MEMS substrate has a thickness greater than about 50 microns and the semiconductor substrate includes an integrated circuit having at least one complementary metal-oxide semiconductor (CMOS) feature.

6. The device of claim 1, wherein the MEMS structure includes a proof mass providing a reference mass for measuring a variable.

7. The device of claim 1, wherein a first portion of the first bonding layer is bonded to a first portion of the second bonding layer to form a first bonding region,

wherein a conductive feature is disposed at the first bonding region,

wherein a second portion of the first bonding layer is bonded to a second portion of the second bonding layer to form a second bonding region, and

wherein an insulating layer is disposed at the second bonding region.

8. A device, comprising:

a micro-electro-mechanical systems (MEMS) substrate including a first bonding layer, wherein the first bonding layer comprises amorphous silicon;

a complementary metal-oxide semiconductor (CMOS) device including a second bonding layer, the CMOS device electrically coupled to the MEMS substrate by bonding the first bonding layer to the second bonding layer, thereby forming a conductive path traversing at least the first bonding layer; and

a cap including a third bonding layer, the cap coupled to the CMOS device by bonding the second bonding layer to the third bonding layer, wherein the third bonding layer includes germanium and the MEMS substrate is hermetically sealed between the cap and the CMOS device, and wherein a bottom surface of the cap is coplanar with a bottom surface of the MEMS substrate.

9. The device of claim 8, wherein the first bonding layer is doped with one or more impurities.

10. The device of claim 8, wherein a material of the second bonding layer includes at least one of aluminum, titanium, nickel, copper, gold, silver, indium, and tin.

11. The device of claim 10, wherein the material of the second bonding layer includes one of an aluminum alloy with copper and an aluminum alloy with copper and silicon.

12. The device of claim 8, wherein a first portion of the first bonding layer is bonded to a first portion of the second bonding layer to form a first bonding region,

wherein a conductive feature is disposed at the first bonding region,

wherein a second portion of the first bonding layer is bonded to a second portion of the second bonding layer to form a second bonding region, and

wherein an insulating layer is disposed at the second bonding region.

13. A device, comprising:

a micro-electro-mechanical systems (MEMS) structure including a MEMS substrate and a first bonding layer interfacing with a bottom surface of the MEMS substrate, wherein the first bonding layer comprises silicon;

a semiconductor substrate including a second bonding layer, wherein the second bonding layer comprises aluminum and the semiconductor substrate is electrically coupled to the MEMS structure by bonding the first bonding layer to the second bonding layer; and

a cap structure including a cap feature and a third bonding layer interfacing with a bottom surface of the cap feature, wherein the third bonding layer comprises germanium and the cap structure is coupled to the semiconductor substrate by bonding the second bonding layer to the third bonding layer, wherein the MEMS structure is hermetically sealed between the cap structure and the semiconductor substrate, and wherein the bottom surface of the cap feature is coplanar with the bottom surface of the MEMS structure.

14. The device of claim 13, wherein the MEMS substrate has a thickness greater than about 50 microns.

15. The device of claim 13, wherein the semiconductor substrate includes an integrated circuit formed using a complementary metal-oxide semiconductor (CMOS) process.

16. The device of claim 13, wherein the second bonding layer is a part of a multilayer interconnect (MLI), and the MEMS structure and the cap structure are bonded to a top layer of the MLI.

17. The device of claim 13, wherein a first portion of the first bonding layer is bonded to a first portion of the second bonding layer to form a first bonding region,

wherein a conductive feature is disposed at the first bonding region,

wherein a second portion of the first bonding layer is bonded to a second portion of the second bonding layer to form a second bonding region, and

wherein an insulating layer is disposed at the second bonding region.