Surface-enhanced Raman scattering element including a conductor layer having a base part and a plurality of protusions

• US 9,874,523 B2
• Filed: 08/09/2013
• Issued: 01/23/2018
• Est. Priority Date: 08/10/2012
• Status: Active Grant

• Current Assignee: Hamamatsu Photonics KK
• Original Assignee: Hamamatsu Photonics KK
• Inventors: Maruyama, Yoshihiro, Shibayama, Katsumi, Ito, Masashi, Hirohata, Toru, Kamei, Hiroki
• Primary Examiner(s): Lyons, Michael A
• Assistant Examiner(s): Prieto, Violeta A
• Application Number:
  US14/420,422
• Publication Number:
  US 20150212000A1
• Time in Patent Office: 1,628 Days
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G01N 21/03 Cuvette constructions
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons
• CPC Class Codes: G01N 2201/068 Optics, miscellaneous

Abstract

A SERS element comprises a substrate; a fine structure part formed on a front face of the substrate and having a plurality of pillars; and a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering. The conductor layer has a base part formed along the front face of the substrate and a plurality of protrusions protruding from the base part at respective positions corresponding to the pillars. The base part and the protrusions form a plurality of gaps in the conductor layer, each of the gaps having an interstice gradually decreasing in a direction perpendicular to the projecting direction of the pillar.

Claims

1. A surface-enhanced Raman scattering element comprising:

a substrate having a principal surface;

a fine structure part formed on the principal surface and having a plurality of projections; and

a conductor layer formed on the fine structure part and constituting an optical function part for generating surface-enhanced Raman scattering;

wherein the conductor layer has a base part formed along the principal surface and a plurality of protrusions protruding from the base part at respective positions corresponding to the projections; and

wherein the base part and the protrusions form a plurality of gaps in the conductor layer, each of the gaps having an interstice gradually decreasing in a direction perpendicular to the projecting direction of a projection of said plurality of projections,

wherein each of the gaps has a depth in the projecting direction of the projection equal to or smaller than a thickness of the base part, and

wherein an end part of a protrusion on the substrate side of the protrusion is located closer to the substrate than is an upper face of the base part, the end part being an outer circumferential portion at the substrate side of the protrusion, the end part being formed along a circumferential direction of the projection.

2. A surface-enhanced Raman scattering element according to claim 1, wherein the projections are arranged periodically along the principal surface.

3. A surface-enhanced Raman scattering element according to claim 1, wherein the gaps are formed so as to surround the respective projections when seen in the projecting direction of the projections and each of the gaps have the interstice gradually decreasing at an end part on the substrate side.

4. A surface-enhanced Raman scattering element according to claim 1, wherein the interstice of the gap gradually decreases continuously.

5. A surface-enhanced Raman scattering element according to claim 1, wherein the protrusion has a form constricted at an end part on the substrate side.

6. A surface-enhanced Raman scattering element according to claim 1, wherein the base part has a thickness smaller than a height of the projections.

7. A surface-enhanced Raman scattering element according to claim 1, wherein the base part has a thickness greater than a height of the projections.

8. A surface-enhanced Raman scattering element according to claim 1, wherein the base part and the protrusion are connected to each other at the deepest part of the gap.

9. A surface-enhanced Raman scattering element according to claim 1, wherein the base part and the protrusion are separated from each other at the deepest part of the gap.