In-situ bias correction for MEMS accelerometers

• US 9,874,581 B2
• Filed: 11/24/2015
• Issued: 01/23/2018
• Est. Priority Date: 05/15/2015
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Tin, Steven, Fertig, Chad
• Primary Examiner(s): Rogers, David A
• Application Number:
  US14/951,132
• Publication Number:
  US 20160334441A1
• Time in Patent Office: 791 Days
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 21/00 Testing or calibrating of apparatus or devices covered by the preceding groups

Abstract

In some examples, an accelerometer may self-calibrate while in use by setting a scale factor of the accelerometer to a first value; while the scale factor of the accelerometer is set to the first value, obtaining a first acceleration value; setting the scale factor of the accelerometer to a second value; while the scale factor of the accelerometer is set to the second value, obtaining a second acceleration value; based on the first acceleration value and the second acceleration value, determining a bias correction value; obtaining a third acceleration value; and correcting the third acceleration value based on the bias correction value.

Claims

1. A method of calibrating an accelerometer, the method comprising:

setting a scale factor of the accelerometer to a first value, wherein setting the scale factor of the accelerometer to the first value comprises modifying one or more parameters of a laser source;

while the scale factor of the accelerometer is set to the first value, obtaining a first acceleration value;

setting the scale factor of the accelerometer to a second value, wherein setting the scale factor of the accelerometer to the second value comprises further modifying the one or more parameters of the laser source;

while the scale factor of the accelerometer is set to the second value, obtaining a second acceleration value;

based on the first acceleration value and the second acceleration value, determining a bias correction value;

obtaining a third acceleration value; and

correcting the third acceleration value based on the bias correction value.

2. The method of claim 1, wherein the first value is greater than zero and the second value is greater than zero, and wherein determining the bias correction value comprises, based on the first reading of the acceleration value and the second reading of the acceleration value, linearly extrapolating an acceleration value for a scale factor of zero.

3. The method of claim 1, wherein correcting the third reading of the acceleration value based on the bias correction value comprises subtracting the bias correction value from the third reading of the acceleration value.

4. The method of claim 1, wherein setting the scale factor of the accelerometer to the first value and setting the scale factor of the accelerometer to the second value further comprises modifying a number of photons circulating within an optical resonator of an anchor element of the accelerometer.

5. The method of claim 1, wherein modifying the one or more parameters of the laser source comprises adjusting a laser field in a cavity of an anchor element of the accelerometer to modify restoring forces of one or more beams of the cavity.

6. The method of claim 5, wherein adjusting the laser field comprises changing an intensity of the laser field.

7. The method of claim 5, wherein adjusting the laser field comprises detuning the laser field relative to a resonance of the cavity.

8. The method of claim 5, wherein adjusting the laser field comprises modifying a geometry by which the laser is coupled to the cavity.

9. The method of claim 1, wherein the one or more parameters of the laser source comprise at least one of a power of the laser source or a wavelength of the laser source.

10. An accelerometer device comprising:

a proof mass;

one or more anchor elements connected to the proof mass;

a scale factor control module configured to;

set a scale factor of the one or more anchor elements of the proof mass to a first value, wherein the scale factor control module is configured to set the scale factor of the one or more anchor elements of the proof mass to the first value by modifying one or more parameters of a laser source;

set the scale factor of the one or more anchor elements of the proof mass to a second value, wherein the scale factor control module is further configured to set the scale factor of the one or more anchor elements of the proof mass to the second value by further modifying one or more parameters of the laser source;

a sensing module configured to;

while the scale factor of the one or more anchor elements of the proof mass is set to the first value, obtain a first acceleration value;

while the scale factor of the one or more anchor elements of the proof mass is set to the second value, obtain a second acceleration value;

obtain a third acceleration value;

a controller configured to;

determine a bias correction value based on the first acceleration value and the second acceleration value; and

correct the third acceleration value based on the bias correction value.

11. The accelerometer device of claim 10, wherein the first value is greater than zero and the second value is greater than zero, and wherein the controller is further configured to determine the bias correction value, based on the first acceleration value and the second acceleration value, by linearly extrapolating an acceleration value for a scale factor of zero.

12. The accelerometer device of claim 10, wherein the controller is further configured to correct the third acceleration value based on the bias correction value by subtracting the bias correction value from the third acceleration value.

13. The accelerometer device of claim 10, wherein the scale factor control module is further configured to set the scale factor of the one or more anchor elements of the proof mass to the first value and set the scale factor of the one or more anchor elements of the proof mass to the second value by modifying a number of photons circulating within an optical resonator of the one or more anchor elements.

14. The accelerometer device of claim 10, wherein the scale factor control module is further configured to modify the one or more parameters of the laser source by adjusting a laser field in a cavity of the one or more anchor elements to modify restoring forces of one or more beams of the cavity.

15. The accelerometer device of claim 14, wherein the scale factor control module is further configured to adjust the laser field by causing a change in an intensity of the laser field.

16. The accelerometer device of claim 14, wherein the scale factor control module is further configured to adjust the laser field by causing a detuning of the laser field relative to a resonance of the cavity.

17. The accelerometer device of claim 14, wherein the scale factor control module is further configured to adjust the laser field by causing a modification of a geometry by which the laser is coupled to the cavity.

18. The accelerometer device of claim 10, wherein the one or more parameters of the laser source comprise at least one of a power of the laser source or a wavelength of the laser source.

19. An accelerometer device comprising:

a proof mass;

one or more anchor elements connected to the proof mass;

a scale factor control module configured to;

set a scale factor of the one or more anchor elements of the proof mass to a first value, wherein the scale factor control module is configured to set the scale factor of the one or more anchor elements of the proof mass to the first value by electrostatically stiffening the one or more anchor elements of the accelerometer;

set the scale factor of the one or more anchor elements of the proof mass to a second value, wherein the scale factor control module is further configured to set the scale factor of the one or more anchor elements of the proof mass to the second value by electrostatically stiffening the one or more anchor elements of the accelerometer;

a sensing module configured to;

while the scale factor of the one or more anchor elements of the proof mass is set to the first value, obtain a first acceleration value;

while the scale factor of the one or more anchor elements of the proof mass is set to the second value, obtain a second acceleration value;

obtain a third acceleration value;

a controller configured to;

determine a bias correction value based on the first acceleration value and the second acceleration value; and

correct the third acceleration value based on the bias correction value.