Sub-pixel and sub-resolution localization of defects on patterned wafers
First Claim
1. A system configured to determine if a defect detected on a specimen is a defect of interest or a nuisance, comprising:
- an inspection subsystem comprising at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to a specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy; and
one or more computer subsystems configured for;
aligning the output of the inspection subsystem for an area on the specimen to simulated output of the inspection subsystem for the area on the specimen;
detecting a defect in the output for the area on the specimen;
determining a location of the defect in the output with respect to patterned features in the simulated output based on results of said detecting and said aligning;
determining a distance between the determined location of the defect and a known location of interest on the specimen; and
determining if the defect is a defect of interest or a nuisance based on the determined distance, wherein determining if the defect is the defect of interest or the nuisance comprises applying a threshold to the determined distance, determining that the defect is the defect of interest if the determined distance is below the threshold, and determining that the defect is the nuisance if the determined distance is greater than the threshold.
1 Assignment
0 Petitions
Accused Products
Abstract
Methods and systems for determining if a defect detected on a specimen is a DOI (Defect of Interest) or a nuisance are provided. One system includes computer subsystem(s) configured for aligning output of an inspection subsystem for an area on a specimen to simulated output of the inspection subsystem for the area on the specimen and detecting a defect in the output for the area on the specimen. The computer subsystem(s) are also configured for determining a location of the defect in the output with respect to patterned features in the simulated output based on results of the detecting and aligning, determining a distance between the determined location of the defect and a known location of interest on the specimen, and determining if the defect is a DOI or a nuisance based on the determined distance.
-
Citations
45 Claims
-
1. A system configured to determine if a defect detected on a specimen is a defect of interest or a nuisance, comprising:
-
an inspection subsystem comprising at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to a specimen, and wherein the detector is configured to detect energy from the specimen and to generate output responsive to the detected energy; and one or more computer subsystems configured for; aligning the output of the inspection subsystem for an area on the specimen to simulated output of the inspection subsystem for the area on the specimen; detecting a defect in the output for the area on the specimen; determining a location of the defect in the output with respect to patterned features in the simulated output based on results of said detecting and said aligning; determining a distance between the determined location of the defect and a known location of interest on the specimen; and determining if the defect is a defect of interest or a nuisance based on the determined distance, wherein determining if the defect is the defect of interest or the nuisance comprises applying a threshold to the determined distance, determining that the defect is the defect of interest if the determined distance is below the threshold, and determining that the defect is the nuisance if the determined distance is greater than the threshold. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
-
-
44. A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for determining if a defect detected on a specimen is a defect of interest or a nuisance, wherein the computer-implemented method comprises:
-
aligning output of an inspection subsystem for an area on a specimen to simulated output of the inspection subsystem for the area on the specimen, wherein the inspection subsystem comprises at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate the output responsive to the detected energy; detecting a defect in the output for the area on the specimen; determining a location of the defect in the output with respect to patterned features in the simulated output based on results of said detecting and said aligning; determining a distance between the determined location of the defect and a known location of interest on the specimen; and determining if the defect is a defect of interest or a nuisance based on the determined distance, wherein determining if the defect is the defect of interest or the nuisance comprises applying a threshold to the determined distance, determining that the defect is the defect of interest if the determined distance is below the threshold, and determining that the defect is the nuisance if the determined distance is greater than the threshold, and wherein aligning the output, detecting the defect, determining the location, determining the distance, and determining if the defect is a defect of interest or a nuisance are performed by one or more computer subsystems.
-
-
45. A computer-implemented method for determining if a defect detected on a specimen is a defect of interest or a nuisance, comprising:
-
aligning output of an inspection subsystem for an area on a specimen to simulated output of the inspection subsystem for the area on the specimen, wherein the inspection subsystem comprises at least an energy source and a detector, wherein the energy source is configured to generate energy that is directed to the specimen, and wherein the detector is configured to detect energy from the specimen and to generate the output responsive to the detected energy; detecting a defect in the output for the area on the specimen; determining a location of the defect in the output with respect to patterned features in the simulated output based on results of said detecting and said aligning; determining a distance between the determined location of the defect and a known location of interest on the specimen; and determining if the defect is a defect of interest or a nuisance based on the determined distance, wherein determining if the defect is the defect of interest or the nuisance comprises applying a threshold to the determined distance, determining that the defect is the defect of interest if the determined distance is below the threshold, and determining that the defect is the nuisance if the determined distance is greater than the threshold, and wherein aligning the output, detecting the defect, determining the location, determining the distance, and determining if the defect is a defect of interest or a nuisance are performed by one or more computer subsystems.
-
Specification