Method of fabricating piezoelectric energy harvesting device
First Claim
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1. A method of fabricating a flexible piezoelectric energy harvesting device, the method comprising:
- forming a piezoelectric layer, including forming a plurality of first piezoelectric lines spaced apart from each other in one direction and forming a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines;
thenplacing the piezoelectric layer on a first flexible electrode substrate to come in direct contact with the first flexible electrode substrate; and
forming a second flexible electrode substrate on the piezoelectric layer.
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Abstract
A method of fabricating a flexible piezoelectric energy harvesting device is provided. The method includes forming a piezoelectric layer to include a plurality of first piezoelectric lines spaced apart from each other in one direction and a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines, then placing the piezoelectric layer on a first flexible electrode substrate to come in direct contact with the first flexible electrode, and forming a second flexible electrode substrate on the piezoelectric layer.
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14 Claims
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1. A method of fabricating a flexible piezoelectric energy harvesting device, the method comprising:
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forming a piezoelectric layer, including forming a plurality of first piezoelectric lines spaced apart from each other in one direction and forming a plurality of second piezoelectric lines respectively filling spaces between the first piezoelectric lines;
thenplacing the piezoelectric layer on a first flexible electrode substrate to come in direct contact with the first flexible electrode substrate; and forming a second flexible electrode substrate on the piezoelectric layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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