Supervisory control of radio frequency (RF) impedance tuning operation

• US 9,876,476 B2
• Filed: 08/18/2015
• Issued: 01/23/2018
• Est. Priority Date: 08/18/2015
• Status: Active Grant

• Current Assignee: MKS Instruments Incorporated
• Original Assignee: MKS Instruments Incorporated
• Inventors: Coumou, David J., Reinhardt, Ross, Elner, Yuriy, Gill, Daniel M.
• Primary Examiner(s): Jones, Stephen E
• Assistant Examiner(s): OUTTEN, SAMUEL S
• Application Number:
  US14/828,597
• Publication Number:
  US 20170054418A1
• Time in Patent Office: 889 Days
• Field of Search: 333 173
• CPC Class Codes: H03F 1/56 Modifications of input or output impedances, not otherwise provided for
• CPC Class Codes: H03F 2200/378 A variable capacitor being added in the output circuit, e.g. collector, drain, of an amplifier stage
• CPC Class Codes: H03F 2200/387 A circuit being added at the output of an amplifier to adapt the output impedance of the amplifier
• CPC Class Codes: H03F 2200/451 the amplifier being a radio frequency amplifier
• CPC Class Codes: H03F 3/195 in integrated circuits
• CPC Class Codes: H03F 3/245 with semiconductor devices only

Abstract

A radio frequency (RF) control system including a RF generator having a power amplifier that outputs a RF signal and a controller. A matching network receives the RF signal and generates at least one RF output signal. In a first mode of operation, the controller enables adjustment of the frequency of the RF signal and a tune element of the matching network to achieve an impedance match and in a second mode of operation the controller enables adjustment of only the tune element of the matching network to achieve an impedance match while the frequency is adjusted to a target frequency. The RF controls system operates in a continuous and pulse mode of operation.

Claims

1. A radio frequency (RF) control system comprising:

a RF generator including a power amplifier that outputs a RF signal having an adjustable target frequency, the RF generator also including a controller, the controller varying the frequency of the RF signal; and

a matching network receiving the RF signal, the matching network including at least one impedance tuning element, the impedance tuning element being adjustable in accordance with commands communicated from the controller,

wherein in a first mode of operation when the RF signal is at a first target frequency, the controller enables adjustment of both the frequency of the RF signal about the target frequency and the tuning element to vary an impedance match and in a second mode of operation, when the RF signal is adjusting to a second target frequency, the controller inhibits adjustment of the frequency of the RF signal about the target frequency to vary an impedance match and enables adjustment of the impedance tuning element to vary an impedance match.

2. The RF control system of claim 1, wherein in the first mode of operation, the frequency is adjusted within a predetermined range about a target frequency.

3. The RF control system of claim 2, wherein in the second mode of operation, the controller otherwise adjusts the frequency.

4. The RF control system of claim 3, wherein in the second mode of operation, the controller adjusts the frequency without reference to an impedance match condition.

5. The RF control system of claim 3, wherein in the first mode of operation, the controller adjusts the frequency to vary an impedance match condition.

6. The RF control system of claim 2, wherein in the first mode of operation, the controller adjusts the frequency to vary an impedance match condition.

7. The RF control system of claim 1, wherein in the second mode of operation, the controller otherwise adjusts the frequency.

8. The RF control system of claim 7, wherein in the first mode of operation, the frequency is adjusted within a predetermined range about a target frequency.

9. The RF control system of claim 8, wherein in the first mode of operation, the controller adjusts the frequency to vary an impedance match condition.

10. The RF control system of claim 8, wherein in the second mode of operation, the controller adjusts the frequency without reference to an impedance match condition.

11. The RF control system of claim 7, wherein in the second mode of operation, the controller adjusts the frequency without reference to an impedance match condition.

12. The RF control system of claim 1 wherein the tuning element includes a load element and a tune element, and in the first and second modes of operation, the controller adjusts at least one of the load element and the tune element.

13. The RF control system of claim 12 wherein in the first mode of operation, the controller adjusts the frequency and at least one of the load element and the tune element to provide an impedance match between the RF generator and a load and in the second mode of operation, the controller adjusts at least one of the load element and the tune element to provide an impedance match between the RF generator and the load and otherwise adjusts the frequency.

14. The RF control system of claim 1 wherein in the first mode of operation, the controller enables the adjustment of the frequency and the tuning element to provide an impedance match between the RF generator and a load and in the second mode of operation, the controller enables adjustment of the impedance tuning element to provide an impedance match between the RF generator and the load and inhibits adjustment of the frequency of the RF signal to provide an impedance match while otherwise adjusting the frequency of the RF signal.

15. The RF control system of claim 1 wherein the matching network communicates a characteristic signal to the RF generator indicative of a characteristic of a respective RF output signal.

16. The RF control system of claim 1 wherein the RF generator operates in a continuous wave mode or a pulse mode.