Apparatus and method for optical metrology with optimized system parameters

• US 9,879,977 B2
• Filed: 11/06/2013
• Issued: 01/30/2018
• Est. Priority Date: 11/09/2012
• Status: Active Grant

• Current Assignee: KLA-Tencor Corporation (KLA Corporation)
• Original Assignee: KLA-Tencor Corporation (KLA Corporation)
• Inventors: Shchegrov, Andrei V.
• Primary Examiner(s): BOLOGNA, DOMINIC JOSEPH
• Application Number:
  US14/073,538
• Publication Number:
  US 20140132948A1
• Time in Patent Office: 1,546 Days
• CPC Class Codes: G01B 11/02 for measuring length, width or thickness G01B11/08 takes precedence
• CPC Class Codes: G01B 11/0641 with measurement of polarization
• CPC Class Codes: G01B 11/065 using one or more discrete wavelengths

Abstract

Methods and systems for achieving a small measurement box size specification across a set of metrology system parameters are presented. The small measurement box size specification is achieved by selectively constraining one or more of the sets of system parameters during measurement. A subset of measurement system parameters such as illumination wavelength, polarization state, polar angle of incidence, and azimuth angle of incidence is selected for measurement to maintain a smaller measurement box size than would otherwise be achievable if the full, available range of measurement system parameters were utilized in the measurement. In this manner, control of one or more factors that affect measurement box size is realized by constraining the measurement system parameter space. In addition, a subset of measurement signals may be selected to maintain a smaller measurement box size than would otherwise be achievable if all available measurement signals were utilized in the measurement.

Claims

1. A method comprising:

illuminating a specimen with an illumination light from an illumination subsystem operable to generate an available illumination light having any two or more of a range of polar angles of incidence, a range of azimuth angles of incidence, a range of polarization states, and a range of illumination wavelengths;

constraining the available illumination light to a subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths to minimize a measurement box size and achieve a smaller measurement box size than would otherwise be achievable from the available illumination light, wherein the constraining the illumination light involves determining a subset of illumination wavelengths associated with each of a plurality of angles of incidence that minimizes the measurement box size;

generating a plurality of output signals indicative of a response of the specimen to the illumination light, wherein each output signal is indicative of an amount of light diffracted from the specimen at a different angle of incidence; and

determining an estimate of a structural parameter based at least in part on the plurality of output signals.

2. The method of claim 1, further comprising:

constraining a set of available measurement signals associated with different measurement technologies.

3. The method of claim 1, wherein the different angles of incidence range between 55 and 75 degrees, and wherein the range of illumination wavelengths is between 100 nanometers and 2000 nanometers.

4. The method of claim 3, wherein the subset of illumination wavelengths associated with an angle of incidence greater than 70 degrees is between 190 nanometers and 650 nanometers, and wherein the subset of illumination wavelengths associated with an angle of incidence less than 70 degrees is between 190 nanometers and 800 nanometers.

5. The method of claim 1, wherein the constraining of the illumination light involves any of physically limiting the illumination light delivered to the specimen to the subset, limiting collection of scattered light to scattered light associated with the subset, and selecting only a portion of the output signals associated with the subset for measurement analysis.

6. The method of claim 1, wherein the smaller measurement box size is less than 30 micrometers in any direction.

7. The method of claim 1, wherein the smaller measurement box size is less than 10 micrometers in any direction.

8. The method of claim 1, wherein the constraining the available illumination light is based at least in part on an analysis of an impact on measurement box size due to any of geometric effects, light diffraction effects, aberration effects, and interactions between the illumination light and the specimen.

9. A method comprising:

illuminating a specimen with an illumination light from an illumination subsystem operable to generate an available illumination light having any two or more of a range of polar angles of incidence, a range of azimuth angles of incidence, a range of polarization states, and a range of illumination wavelengths;

constraining the available illumination light to a subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths to minimize a measurement box size and achieve a smaller measurement box size than would otherwise be achievable from the available illumination light, wherein the constraining the available illumination light to minimize the measurement box size involves;

determining an electromagnetic model of an interaction between the illumination light and the specimen; and

selecting the subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths that minimizes the enlargement of the measurement box size predicted by the electromagnetic model due to the interaction between the illumination light and the target structure;

generating a plurality of output signals indicative of a response of the specimen to the illumination light; and

determining an estimate of a structural parameter based at least in part on the plurality of output signals.

10. A method comprising:

illuminating a specimen with an illumination light from an illumination subsystem operable to generate an available illumination light having any two or more of a range of polar angles of incidence, a range of azimuth angles of incidence, a range of polarization states, and a range of illumination wavelengths;

constraining the available illumination light to a subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths to minimize a measurement box size and achieve a smaller measurement box size than would otherwise be achievable from the available illumination light, wherein the constraining the available illumination light to minimize the measurement box size involves;

performing a plurality of measurements of the specimen with the available illumination light;

determining a plurality of measurement box sizes each associated with each of the plurality of measurements; and

selecting the subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths that minimizes the enlargement of the measurement box size based on the determined measurement box sizes;

generating a plurality of output signals indicative of a response of the specimen to the illumination light; and

determining an estimate of a structural parameter based at least in part on the plurality of output signals.

11. A method comprising:

identifying a multi-dimensional space of available metrology system parameters including any two or more of a range of polar angles of incidence, a range of azimuth angles of incidence, a range of polarization states, and a range of illumination wavelengths;

determining a constrained set of metrology system parameters that includes a subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths to minimize a measurement box size and achieve a smaller measurement box size than would otherwise be achievable from the available multi-dimensional space of metrology system parameters, wherein the determining a constrained set of metrology system parameters is based at least in part on an analysis of an impact on measurement box size due to any of geometric effects, light diffraction effects, aberration effects, and interactions between the illumination light and the specimen;

illuminating a specimen;

receiving a plurality of output signals indicative of a response of the specimen to measurements performed in accordance with the constrained set of metrology system parameters; and

determining an estimate of a structural parameter based at least in part on the plurality of output signals.

12. The method of claim 11, wherein the determining of the constrained set of metrology system parameters involves any of an experimental analysis and a model-based analysis.

13. The method of claim 11, wherein the smaller measurement box size is less than 30 micrometers in any direction.

14. The method of claim 11, wherein the smaller measurement box size is less than 10 micrometers in any direction.

15. An apparatus comprising:

an illumination subsystem operable to generate an available illumination light having any two or more of a range of polar angles of incidence, a range of azimuth angles of incidence, a range of polarization states, and a range of illumination wavelengths and illuminate a specimen with an illumination light;

a computer subsystem configured to;

constrain the available illumination light to a subset of any of the two or more of the range of polar angles of incidence, the range of azimuth angles of incidence, the range of polarization states, and the range of illumination wavelengths to minimize a measurement box size and achieve a smaller measurement box size than would otherwise be achievable from the available illumination light, wherein the constraining of the available illumination light is based at least in part on an analysis of an impact on measurement box size due to any of geometric effects, light diffraction effects, aberration effects, and interactions between the illumination light and the specimen, and

determine an estimate of a structural parameter of the specimen based at least in part on a plurality of output signals; and

a detector operable to generate the plurality of output signals indicative of a response of the specimen to the subset of the available illumination light.

16. The apparatus of claim 15, wherein the computer subsystem is further configured to constrain a set of available measurement signals associated with different measurement technologies.

17. The apparatus of claim 15, wherein the constraining of the illumination light involves any of physically limiting the illumination light delivered to the specimen to the subset, limiting collection of scattered light to scattered light associated with the subset, and selecting only a portion of the output signals associated with the subset for measurement analysis.

18. The apparatus of claim 15, wherein the smaller measurement box size is less than 30 micrometers in any direction.

19. The apparatus of claim 15, wherein the smaller measurement box size is less than 10 micrometers in any direction.