System and method of electrostatic carouseling for gyrocompassing

• US 9,879,996 B2
• Filed: 11/30/2015
• Issued: 01/30/2018
• Est. Priority Date: 11/30/2015
• Status: Active Grant

• Current Assignee: General Electric Company
• Original Assignee: General Electric Company
• Inventors: Lin, Yizhen, Miller, Todd Frederick, Zotov, Sergey Alexandrovich
• Primary Examiner(s): Laballe, Clayton E
• Assistant Examiner(s): Hancock, Dennis
• Application Number:
  US14/954,108
• Publication Number:
  US 20170153109A1
• Time in Patent Office: 792 Days
• CPC Class Codes: G01C 19/38 with north-seeking action by other than magnetic means, e.g. gyrocompasses using earth's rotation
• CPC Class Codes: G01C 19/56 Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces

Abstract

A system and method for electrostatic carouseling for inertial sensor gyrocompassing is disclosed. For performing such electrostatic carouseling for inertial sensor gyrocompassing, a three-rotational degree of freedom spring-mass system is provided that includes a proof mass suspended by a plurality of support springs and having three rotational degrees of freedom, a plurality of driving electrodes, and a controller operably connected to the plurality of driving electrodes. The control applies an excitation voltage to the driving electrodes to generate an electrostatic force, with the controller selectively applying the excitation voltage to the plurality of driving electrodes to generate an electrostatic force that varies an orientation of a gyroscope sensitivity axis for carouseling of the three-rotational degree of freedom spring-mass system.

Claims

1. A three-rotational degree of freedom spring-mass system comprising:

a proof mass suspended by a plurality of support springs and having three rotational degrees of freedom;

a plurality of driving electrodes; and

a controller operably connected to the plurality of driving electrodes to apply an excitation voltage thereto to generate an electrostatic force;

wherein the controller is configured to selectively apply the excitation voltage to the plurality of driving electrodes to generate an electrostatic force that varies an orientation of a gyroscope sensitivity axis for carouseling of the three-rotational degree of freedom spring-mass system.

2. The three-rotational degree of freedom spring-mass system of claim 1 wherein the plurality of driving electrodes comprises four driving electrodes, the four driving electrodes comprising a first pair of electrodes positioned at 0 degrees and 180 degrees and a second pair of electrodes positioned at 90 degrees and 270 degrees;

and

wherein the controller is configured to;

apply an excitation voltage to the first pair of electrodes of the plurality of driving electrodes at a first time; and

apply an excitation voltage to the second pair of electrodes of the plurality of driving electrodes different from the first pair and at a second time subsequent to the first time.

3. The three-rotational degree of freedom spring-mass system of claim 2 wherein:

application of the excitation voltage to the first pair of the four driving electrodes orients a gyroscope drive axis along an x-axis of a horizontal plane of the proof mass and orients the gyroscope sensitivity axis on a y-axis of the horizontal plane; and

application of the excitation voltage to the second pair of the four driving electrodes orients the gyroscope drive axis along the y-axis of the horizontal plane and orients the gyroscope sensitivity axis on the x-axis of the horizontal plane.

4. The three-rotational degree of freedom spring-mass system of claim 1 wherein the plurality of driving electrodes comprises four driving electrodes, the four driving electrodes comprising a first pair of electrodes positioned at 0 degrees and 180 degrees and a second pair of electrodes positioned at 90 degrees and 270 degrees;

and

wherein the controller is configured to apply excitation voltages simultaneously to the first and second pairs of electrodes with different amplitudes, so as to change an orientation of the gyroscope sensitivity axis to a desired orientation in the horizontal plane.

5. The three-rotational degree of freedom spring-mass system of claim 4 wherein the orientation of the gyroscope sensitivity axis is described by:

6. The three-rotational degree of freedom spring-mass system of claim 1 wherein the plurality of driving electrodes comprises eight driving electrodes, with the eight driving electrodes comprising a first pair of electrodes, a second pair of electrodes, a third pair of electrodes, and a fourth pair of electrodes;

and

wherein the controller is configured to;

apply an excitation voltage to the first pair of electrodes at a first time; and

apply an excitation voltage to the second pair of electrodes at a second time subsequent to the first time;

apply an excitation voltage to the third pair of electrodes at a third time subsequent to the second time; and

apply an excitation voltage to the fourth pair of electrodes at a fourth time subsequent to the third time.

7. The three-rotational degree of freedom spring-mass system of claim 6 wherein selective application of the excitation voltage to the first, second, third and fourth pairs of electrodes orients the gyroscope sensitivity axis in 45 degree increments on the horizontal plane, with a gyroscope drive axis being at 90 degrees from the gyroscope.

8. The three-rotational degree of freedom spring-mass system of claim 1 wherein selective application of the excitation voltage to the plurality of driving electrodes by the controller causes a continuous rotation of the gyroscope sensitivity axis around the center axis to enable carouseling.

9. The three-rotational degree of freedom spring-mass system of claim 1 further comprising a central anchor, with the plurality of support springs extending between the central anchor and the proof mass.

10. The three-rotational degree of freedom spring-mass system of claim 1 further comprising a plurality of sensing electrodes positioned about the proof mass and in-plane therewith, the plurality of sensing electrodes providing capacitive position sensing based on a positioning of the proof mass relative to the plurality of electrodes, with a capacitance varying based on movement of the proof mass responsive to an influence of external angular rate thereon.

11. The three-rotational degree of freedom spring-mass system of claim 10 further comprising an orientation sensor configured to:

determine the rotation of the proof mass and the input angular rate from the carouseling;

determine an orientation of the three-dimensional MEMS disk gyroscope based on the rotation of the proof mass and the input angular rate; and

determine Coriolis acceleration of the three-dimensional MEMS disk gyroscope based on the capacitive position sensing provided by the plurality of sensing electrodes.

12. The three-rotational degree of freedom spring-mass system of claim 11 wherein, in determining the orientation of the three-dimensional MEMS disk gyroscope, the orientation sensor is further configured to:

acquire an output of the MEMS disk gyroscope generated from varying the orientation of the gyroscope sensitivity axis on the horizontal plane, the output comprising a varying output resulting from a variation of angle between the Earth'"'"'s rotation axis and the gyroscope sensitivity axis;

perform a sinusoidal fit to the output of the MEMS disk gyroscope to extract a phase, which is a measure of heading; and

calculate an azimuth angle by subtracting the phase of the fit from an instantaneous orientation of the gyroscope sensitivity axis.

13. The three-rotational degree of freedom spring-mass system of claim 1 wherein the controller is configured to apply the excitation voltage to the plurality of driving electrodes at a resonant frequency of the MEMS disk gyroscope.

14. A method of carouseling a three-rotational degree of freedom spring-mass system for gyrocompassing, the method comprising:

providing a gyroscope comprising;

a gyroscope platform oriented in a horizontal plane; and

a plurality of driving electrodes positioned adjacent a top or bottom surface of the gyroscope platform;

causing a controller to modulate an excitation voltage provided to the plurality of driving electrodes to selectively generate an electrostatic force that changes an orientation of a single sensitivity axis on the horizontal plane;

wherein, in modulating the excitation voltage, the controller causes the orientation of the single sensitivity axis to rotate on the horizontal plane, so as to enable the determination of an azimuth angle.

15. The method of claim 14 further comprising:

acquiring an output of the gyroscope generated from changing the orientation of the single sensitivity axis, the output comprising a varying output resulting from a variation of angle between the Earth'"'"'s rotation axis and the single sensitivity axis;

performing a sinusoidal fit to the output of the gyroscope to extract a phase, which is a measure of heading; and

determining the azimuth angle by subtracting the phase of the fit from an instantaneous orientation of the single sensitivity axis.

16. The method of claim 14 wherein modulating the excitation voltage comprises:

applying an excitation voltage to a first pair of electrodes of the plurality of driving electrodes at a first time, the first pair of electrodes being at 0 degrees and 180 degrees on the horizontal plane; and

applying an excitation voltage to a second pair of electrodes of the plurality of driving electrodes subsequent to application of the excitation voltage to the first pair of electrodes, the second pair of electrodes being at 90 degrees and 270 degrees on the horizontal plane;

wherein applying the excitation voltage to the first pair of electrodes orients a gyroscope drive axis along an x-axis of the horizontal plane and orients the single sensitivity axis on a y-axis of the horizontal plane; and

wherein applying the excitation voltage to the second pair of electrodes orients the gyroscope drive axis along the y-axis of the horizontal plane and orients the single sensitivity axis on the x-axis of the horizontal plane.

17. The method of claim 14 wherein modulating the excitation voltage comprises:

applying an excitation voltage to a first pair of electrodes of the plurality of driving electrodes at a first time; and

applying an excitation voltage to a second pair of electrodes of the plurality of driving electrodes subsequent to application of the excitation voltage to the first pair of electrodes;

applying an excitation voltage to a third pair of electrodes of the plurality of driving electrodes subsequent to application of the excitation voltage to the second pair of electrodes; and

applying an excitation voltage to a fourth pair of electrodes of the plurality of driving electrodes subsequent to application of the excitation voltage to the third pair of electrodes;

the plurality of driving electrodes consisting of eight driving electrodes formed by the first, second, third and fourth pairs of electrodes;

wherein applying the excitation voltage to the first, second, third and fourth pairs of electrodes rotates the single sensitivity axis in 45 degree increments on the horizontal plane.

18. The method of claim 14 wherein modulating the excitation voltage comprises applying excitation voltages simultaneously to a first pair of electrodes and a second pair of electrodes of the plurality of driving electrodes at different amplitudes, so as to change an orientation of the single sensitivity axis to a desired orientation in the horizontal plane.

19. The method of claim 18 wherein the orientation of the single sensitivity axis is described by:

20. A microelectromechanical systems (MEMS) inertial measurement sensor comprising:

a MEMS gyroscope comprising;

a proof mass oriented in an x-y plane; and

a plurality of out-of-plane electrodes positioned adjacent the proof mass so as to be arranged about a center axis of the proof mass; and

a controller operably connected to the plurality of out-of-plane electrodes to supply an excitation voltage thereto to perform a virtual carouseling of the MEMS gyroscope in the x-y plane;

wherein, in performing the virtual carouseling of the MEMS gyroscope, the controller is programmed to modulate the excitation voltage supplied to selective electrodes of the plurality of out-of-plane electrodes to rotate a drive axis of the MEMS gyroscope into resonances, with the rotation of the drive axis causing an accompanying rotation of a sensitivity axis of the MEMS gyroscope to provide for determination of an azimuth angle of the MEMS gyroscope.

21. The MEMS inertial measurement sensor of claim 20 wherein, upon receipt of an excitation voltage from the controller, the selective electrodes of the plurality of out-of-plane electrodes generate an electrostatic force that rotates the drive axis and sensitivity axis.

22. The MEMS inertial measurement sensor of claim 20 wherein, in modulating the excitation voltage supplied to selective electrodes of the plurality of out-of-plane electrodes, the controller is programmed to:

apply the excitation voltage to a first pair of electrodes of the plurality of out-of-plane electrodes to rotate the drive axis to the x-axis of the x-y plane and rotate the gyroscope sensitivity axis to the y-axis of the x-y plane; and

apply the excitation voltage to a second pair of electrodes of the plurality of out-of-plane electrodes to rotate the drive axis to the y-axis of the x-y plane and rotate the sensitivity axis to the x-axis of the x-y plane.

23. The MEMS inertial measurement sensor of claim 20 wherein, in modulating the excitation voltage supplied to selective electrodes of the plurality of out-of-plane electrodes, the controller is programmed to apply excitation voltages simultaneously to a first pair of electrodes and a second pair of electrodes of the plurality of out-of-plane electrodes at different amplitudes, so as to change an orientation of the sensitivity axis to a desired orientation in the x-y plane.

24. The MEMS inertial measurement sensor of claim 20 further comprising:

a central anchor;

a plurality of support springs extending between the central anchor and the proof mass; and

a plurality of sensing electrodes positioned about the gyroscope platform and in-plane therewith, the plurality of sensing electrodes providing capacitive position sensing based on a positioning of the proof mass relative to the plurality of electrodes, with a capacitance varying based on movement of the proof mass responsive to an influence of external angular rate thereon.