Gyro sensor and electronic apparatus
First Claim
Patent Images
1. A gyro sensor comprising:
- a substrate; and
a first function element, a second function element and a third function element which are arranged above the substrate;
wherein the first function element includesa first vibrating body which vibrates in a direction of a first axis, anda first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis,the second function element includesa second vibrating body which vibrates in the direction of the second axis, anda second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis,the third function element includesa third vibrating body which vibrates in the direction of the first axis or in the direction of the second axis, anda third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and,wherein the first, second, and third function elements are arranged linearly,with respect to function elements next to each other of the first function element, the second function element and the third function element,the direction of vibration of the vibrating body of one function element is different from the direction of displacement of the movable body of the other function element,the direction of displacement of the movable body of the one function element is different from the direction of vibration of the vibrating body of the other function element, andwherein a groove portion is provided on the substrate on the same side of the substrate as the one function element and the other function element and extends only partially through the substrate, and the groove portion is a rectangular groove provided between the one function element and the other function element and separates the one function element from the other function element, as viewed in a plan view, and extends parallel to a side of the one function element and the other function element in a width direction across the substrate.
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Abstract
A gyro sensor includes a substrate, and a first function element, a second function element and a third function element which are arranged above the substrate. With respect to function elements next to each other of the first function element, the second function element and the third function element, the direction of vibration of a vibrating body of one function element is different from the direction of displacement of a movable body of the other function element, and the direction of displacement of a movable body of the one function element is different from the direction of vibration of a vibrating body of the other function element.
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Citations
22 Claims
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1. A gyro sensor comprising:
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a substrate; and a first function element, a second function element and a third function element which are arranged above the substrate; wherein the first function element includes a first vibrating body which vibrates in a direction of a first axis, and a first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis, the second function element includes a second vibrating body which vibrates in the direction of the second axis, and a second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis, the third function element includes a third vibrating body which vibrates in the direction of the first axis or in the direction of the second axis, and a third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and, wherein the first, second, and third function elements are arranged linearly, with respect to function elements next to each other of the first function element, the second function element and the third function element, the direction of vibration of the vibrating body of one function element is different from the direction of displacement of the movable body of the other function element, the direction of displacement of the movable body of the one function element is different from the direction of vibration of the vibrating body of the other function element, and wherein a groove portion is provided on the substrate on the same side of the substrate as the one function element and the other function element and extends only partially through the substrate, and the groove portion is a rectangular groove provided between the one function element and the other function element and separates the one function element from the other function element, as viewed in a plan view, and extends parallel to a side of the one function element and the other function element in a width direction across the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A gyro sensor comprising:
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a substrate; and a first function element, a second function element, and a third function element which are arranged above the substrate, the first function element being provided between the second function element and the third function element; wherein the first function element includes a first vibrating body which vibrates in a direction of a first axis, and a first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis, the second function element includes a second vibrating body which vibrates in the direction of the second axis, and a second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis, the third function element includes a third vibrating body which vibrates in the direction of the first axis, and a third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and wherein the first, second, and third function elements are arranged along the first axis, a direction of vibration of the first vibrating body of the first function element is orthogonal to a direction of displacement of the second movable body of the second function element and is orthogonal to a direction of displacement of the third movable body of the third function element, the direction of vibration of the vibrating body of one function element is different from the direction of displacement of the movable body of the other function element, the direction of displacement of the movable body of the one function element is different from the direction of vibration of the vibrating body of the other function element, and wherein a groove portion is provided on the substrate on the same side of the substrate as the one function element and the other function element and extends only partially through the substrate, and the groove portion is a rectangular groove provided between the one function element and the other function element and separates the one function element from the other function element, as viewed in a plan view, and extends parallel to a side of the one function element and the other function element in a width direction across the substrate.
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22. A gyro sensor comprising:
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a substrate; a first function element, a second function element, and a third function element which are arranged above the substrate, the first function element being provided between the second function element and the third function element; and a groove provided on the substrate on the same side of the substrate as the first function element, the second function element, and the third function element, the groove extending only partially through the substrate and separating the first function element from the second function element, wherein the first function element includes a first vibrating body which vibrates in a direction of a first axis, and a first movable body which is supported on the first vibrating body and is displaced in accordance with an angular velocity about a second axis orthogonal to the first axis, into a direction of a third axis orthogonal to the first axis and the second axis, the second function element includes a second vibrating body which vibrates in the direction of the second axis, and a second movable body which is supported on the second vibrating body and is displaced in the direction of the third axis in accordance with an angular velocity about the first axis, the third function element includes a third vibrating body which vibrates in the direction of the first axis, and a third movable body which is supported on the third vibrating body and is displaced in a direction orthogonal to the direction of vibration of the third vibrating body and the direction of the third axis in accordance with an angular velocity about the third axis, and wherein the first, second, and third function elements are arranged along the first axis, and a direction of vibration of the first vibrating body of the first function element is orthogonal to a direction of displacement of the second movable body of the second function element and is orthogonal to a direction of displacement of the third movable body of the third function element.
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Specification