Scanner system and method for high-resolution spatial scanning of an electromagnetic field radiated by an electronic device under test

• US 9,880,210 B2
• Filed: 01/29/2015
• Issued: 01/30/2018
• Est. Priority Date: 01/30/2014
• Status: Active Grant

• Current Assignee: Ether Capital Corporation
• Original Assignee: EMSCAN Corporation
• Inventors: Patton, Ruska, Zhou, Yiping, Montag, Gil, Xue, Robert
• Primary Examiner(s): Koval, Melissa
• Assistant Examiner(s): Nguyen, Trung
• Application Number:
  US15/111,229
• Publication Number:
  US 20160334450A1
• Time in Patent Office: 1,097 Days
• Field of Search: 324300, 324310, 324500, 324559, 324 7611, 324 7626, 324 7711, 324600, 324612, 32475012, 324144, 342 22, 342 78, 342 96, 342158, 342185, 342371, 342375
• CPC Class Codes: G01R 1/07 Non contact-making probes
• CPC Class Codes: G01R 1/073 Multiple probes
• CPC Class Codes: G01R 23/16 Spectrum analysis; Fourier analysis
• CPC Class Codes: G01R 29/08 Measuring electromagnetic field characteristics
• CPC Class Codes: G01R 29/0814 Field measurements related to measuring influence on or from apparatus, components or humans EMC, EMI and similar testing in general G01R31/001, e.g. in ESD, EMI, EMC, EMP testing, measuring radiation leakage; detecting presence of micro- or radiowave emitters; dosimetry; testing shielding; measurements related to lightning
• CPC Class Codes: G01R 29/0878 Sensors; antennas; probes; detectors wave guide measuring sections G01R1/24
• CPC Class Codes: G01R 31/00 Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere measuring superconductive properties G01R33/1238; testing or measuring semiconductors or solid state devices during manufacture H01L22/00; testing line transmission systems H04B3/46
• CPC Class Codes: G01R 31/001 Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing measuring electromagnetic fields G01R29/08; circuits for generating HV pulses in dielectric strength testing G01R31/14

Abstract

A scanner system and method operable for high-resolution spatial scanning of an electromagnetic field radiated by an electronic device under test (DUT) are provided. The electromagnetic field level radiated by the DUT is measured with a probe array comprising a plurality of spatially separated switched probes, an analyzer, and a computer. An actuator changes the relative position of the probe array to the DUT by a distance less than or equal to the separation distance between the probes, and the electromagnetic field level is measured and stored again.

Claims

1. A scanner system operable for high-resolution spatial scanning of an electromagnetic field radiated by an electronic device under test (DUT), the scanner system comprising:

(a) a probe array comprising a plurality of switched probes, wherein adjacent probes are spaced apart at a predetermined separation distance;

(b) an analyzer connected to the probe array for determining the electromagnetic field level at each probe location based on a signal induced in each probe by the radiated electromagnetic field;

(c) an actuator for changing the relative position of the probe array to the DUT, from a first array position to a second array position;

(d) a computer comprising a processor and a memory, wherein the processor is operatively connected to the analyzer and the actuator, and wherein the memory component stores a set of instructions executable by the processor to implement a method comprising the steps of;

(i) measuring the electromagnetic field level at each probe when the probe array is in the first array position to create a first dataset of electromagnetic field levels at the position of each probe in the probe array when in the first array position;

(ii) controlling the actuator to change the relative position of the probe array to the DUT from the first array position to the second array position; and

(iii) measuring the electromagnetic field level at each probe when the probe array is in the second array position to create a second dataset of electromagnetic field levels at the position of each probe in the probe array when in the second array position.

2. The scanner system of claim 1 further comprising a planar scan surface for placement of the DUT thereon.

3. The scanner system of claim 2 wherein the scan surface forms the top surface of a case containing the probe array and the actuator.

4. The scanner system of claim 1 wherein the probe array is formed as part of a printed circuit board.

5. The scanner system of claim 1 wherein the probes are arranged in a substantially planar array of rows and columns.

6. The scanner system of claim 1 wherein the probes comprise a first probe and a second probe having a different polarization than the first probe.

7. The scanner system of claim 6 wherein the position of the second probe relative to the DUT when the probe array in the second array position is substantially the same as the position of the first probe relative to the DUT when the probe array is in the first array position.

8. The scanner system of claim 1 wherein the distance between the first array position and the second array position is less than the predetermined separation distance of the adjacent probes.

9. The scanner system of claim 8 wherein the distance between the first array position and the second array position is less than one half the predetermined separation distance of adjacent probes.

10. The scanner system of claim 9 wherein the distance between the first array position and the second array position is less than or equal to 1.5 mm, or less than or equal to ⅕

^th the predetermined separation distance of adjacent probes.

11. The scanner system of claim 1 wherein the analyzer is a spectrum analyzer.

12. The scanner system of claim 1 wherein the actuator comprises:

(a) an elongate first track;

(b) a first sliding member movable along the first track and attached to the probe array; and

(c) a first motor in driving engagement with the first sliding member for moving the first sliding member along the first track.

13. The scanner system of claim 12 wherein the actuator further comprises:

(a) an elongate second track disposed at an angle to the first track;

(b) a second sliding member movable along the second track and attached to the elongate first track; and

(c) a second motor in driving engagement with the second sliding member for moving the second sliding member along the second track.

14. The scanner system of claim 1 further comprising a signal conditioner operatively connected to the probe array and the analyzer for amplifying or attenuating the signal induced in each probe before being transmitted by the analyzer.

15. A method for high-resolution spatial scanning of an electromagnetic field radiated by an electronic device under test (DUT), the method comprising the steps of:

(a) providing a probe array comprising a plurality of switched probes, wherein adjacent probes are spaced apart at a predetermined separation distance;

(b) positioning the probe array relative to the DUT in a first array position;

(c) measuring the electromagnetic field level at each probe when the probe array is in the first array position to create a first dataset of electromagnetic field levels at the position of each probe in the probe array when in the first array position;

(d) changing the relative position of the probe array to the DUT to a second array position; and

(e) measuring the electromagnetic field level at each probe when the probe array is in the second array position to create a second dataset of electromagnetic field levels at the position of each probe in the probe array when in the second array position.

16. The method of claim 15 wherein the DUT rests on a scan surface while the probe array is moved from the first array position to the second array position.

17. The method of claim 15 wherein the probes comprise a first probe and a second probe having a different polarization than the first probe, and the position of the second probe relative to the DUT when the probe array is in the second array position is substantially the same as the position of the first probe relative to the DUT when the probe array is in the first array position.

18. The method of claim 15 wherein the distance between the first array position and the second array position is less than the predetermined separation distance of the adjacent probes.

19. The method of claim 18 wherein the distance between the first array position and the second array position is less than or equal to 1.5 mm, or less than or equal to ⅕

^th the predetermined separation distance of adjacent probes.

20. The method of claim 15 wherein the step of measuring the electromagnetic field level in either one or both of the first array position and the second array position is performed over a range of frequencies.