System and method for managing semiconductor manufacturing defects
First Claim
1. A method of managing semiconductor manufacturing defects, the method comprising:
- determining a cumulative aging parameter for each of a plurality of first IC products produced with a manufacturing line and included within a shared system, wherein each of the plurality of first IC products are communicatively connected to a reliability model for the manufacturing line, and wherein the cumulative aging parameter is dependent on a product operating condition;
calculating an observed defect rate for the plurality of first IC products based on the cumulative aging parameter for each of the plurality of first IC products;
adjusting the reliability model for the manufacturing line in response to the observed defect rate being different from an initial predicted defect rate for the plurality of first IC products, wherein the adjusting of the reliability model includes;
adjusting a variable related to a root failure cause of a selected first IC product from the plurality of first IC products to yield a new predicted defect rate, wherein the variable includes an aging parameter defined as electromigration degradation of circuitry in the selected first IC product;
calculating a manufacturing defect density based on the observed defect rate; and
assigning a relative probability to each of a plurality of potential semiconductor manufacturing defects based on the manufacturing defect density; and
redistributing an operating load on the plurality of first IC products within the shared system based on the adjusted reliability model.
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Abstract
A method of managing semiconductor manufacturing defects, the method including: determining a cumulative aging parameter for each of a plurality of first IC products produced with a particular manufacturing line, the cumulative aging parameter being dependent on a product operating condition; calculating an observed defect rate for the plurality of first IC products based on a difference between a predicted value of a aging parameter and the cumulative aging parameter for each of the plurality of first IC products; and adjusting a manufacturing reliability model for the particular manufacturing line in response to the observed defect rate being different from an initial predicted defect rate for the plurality of first IC products wherein the manufacturing reliability model reestablishes the initial predicted defect rate.
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Citations
17 Claims
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1. A method of managing semiconductor manufacturing defects, the method comprising:
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determining a cumulative aging parameter for each of a plurality of first IC products produced with a manufacturing line and included within a shared system, wherein each of the plurality of first IC products are communicatively connected to a reliability model for the manufacturing line, and wherein the cumulative aging parameter is dependent on a product operating condition; calculating an observed defect rate for the plurality of first IC products based on the cumulative aging parameter for each of the plurality of first IC products; adjusting the reliability model for the manufacturing line in response to the observed defect rate being different from an initial predicted defect rate for the plurality of first IC products, wherein the adjusting of the reliability model includes; adjusting a variable related to a root failure cause of a selected first IC product from the plurality of first IC products to yield a new predicted defect rate, wherein the variable includes an aging parameter defined as electromigration degradation of circuitry in the selected first IC product; calculating a manufacturing defect density based on the observed defect rate; and assigning a relative probability to each of a plurality of potential semiconductor manufacturing defects based on the manufacturing defect density; and redistributing an operating load on the plurality of first IC products within the shared system based on the adjusted reliability model. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A system for managing semiconductor manufacturing defects, the system comprising:
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a determining component which determines a cumulative aging parameter for each of a plurality of IC products produced with a manufacturing line and included within a shared system, wherein each of the plurality of IC products are communicatively connected to a reliability model for the manufacturing line, and wherein the cumulative aging parameter is dependent on a product operating condition; a calculating component which calculates an observed defect rate for the plurality of IC products based on the cumulative aging parameter for each of the plurality of IC products; a modeling component which adjusts the reliability model for the manufacturing line in response to the observed defect rate being different from an initial predicted defect rate for the plurality of IC products, wherein the adjusting of the reliability model includes; adjusting a variable related to a root failure cause of a selected first IC product from the plurality of first IC products to yield a new predicted defect rate, wherein the variable includes an aging parameter defined as electromigration degradation of circuitry in the selected first IC products; and calculating a manufacturing defect density based on the observed defect rate; and a prioritization component which assigns a relative probability to each of a plurality of potential semiconductor manufacturing defects based on the manufacturing defect density, and redistributes an operating load on the plurality of first IC products within the shared system based on the adjusted reliability model. - View Dependent Claims (12, 13, 14, 15, 16)
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17. A program product stored on a non-transitory computer readable storage medium, the program product operative to manage semiconductor manufacturing defects when executed, the non-transitory computer readable storage medium comprising program code for:
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determining a cumulative aging parameter for each of a plurality of first IC products produced with a manufacturing line and included within a shared system, wherein each of the plurality of IC products are communicatively connected to a reliability model for the manufacturing line, and wherein the cumulative aging parameter is dependent on a product operating condition; calculating an observed defect rate for the plurality of IC products based on the cumulative aging parameter for each of the plurality of IC products; adjusting the reliability model for the manufacturing line in response to the observed defect rate being different from an initial predicted defect rate for the plurality of first IC products, wherein the adjusting of the reliability model includes; adjusting a variable related to a root failure cause of a selected first IC product from the plurality of first IC products to yield a new predicted defect rate, wherein the variable includes an aging parameter defined as electromigration degradation of circuitry in the selected first IC product; calculating a manufacturing defect density based on the observed defect rate; and assigning a relative probability to each of a plurality of potential semiconductor manufacturing defects based on the manufacturing defect density; and redistributing an operating load on the plurality of first IC products within the shared system based on the adjusted reliability model.
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Specification