Front opening ring pod

• US 9,881,820 B2
• Filed: 04/25/2016
• Issued: 01/30/2018
• Est. Priority Date: 10/22/2015
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Wong, Scott, Genetti, Damon Tyrone, Witkowicki, Derek John, Paterson, Alex, Gould, Richard H., Ngo, Austin, Estoque, Marc
• Primary Examiner(s): GEHMAN, BRYON P
• Application Number:
  US15/138,097
• Publication Number:
  US 20170117170A1
• Time in Patent Office: 645 Days
• Field of Search: 206454, 206710, 206711, 206723
• CPC Class Codes: H01L 21/67167 surrounding a central transfer chamber
• CPC Class Codes: H01L 21/6719 characterized by the construction of the processing chambers, e.g. modular processing chambers
• CPC Class Codes: H01L 21/67196 characterized by the construction of the transfer chamber
• CPC Class Codes: H01L 21/67201 characterized by the construction of the load-lock chamber
• CPC Class Codes: H01L 21/67303 Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
• CPC Class Codes: H01L 21/6732 Vertical carrier comprising wall type elements whereby the substrates are horizontally supported, e.g. comprising sidewalls
• CPC Class Codes: H01L 21/67369 characterised by shock absorbing elements, e.g. retainers or cushions
• CPC Class Codes: H01L 21/67379 characterised by coupling elements, kinematic members, handles or elements to be externally gripped
• CPC Class Codes: H01L 21/67383 characterised by substrate supports
• CPC Class Codes: H01L 21/67386 characterised by the construction of the closed carrier
• CPC Class Codes: H01L 21/67389 characterised by atmosphere control
• CPC Class Codes: H01L 21/67742 Mechanical parts of transfer devices robots in general in B25J
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance

Abstract

A pod for exchanging consumable parts with a process module includes a base plate having a front side, a back side, and first and second lateral sides. A first support column is disposed on the first lateral side proximal to the front side. A second support column is disposed on the second lateral side proximal to the front side. A third support column is disposed on the first lateral side proximal to back side and a fourth support column is disposed on the second lateral side proximal to the back side. Each of the support columns includes a plurality of support fingers distributed lengthwise and directed inward. A first hard stop column is disposed parallel to the third support column and a second hard stop column is disposed parallel to the fourth support column. A shell structure connected to the base plate is configured to enclose the first, second third and fourth support columns, top plate and first and second hard stop columns and includes a front opening disposed on the front side of the base plate. A door is mated to the front opening and includes retention assembly for securing consumable parts in the pod, when received in the pod.

Claims

1. A pod for exchanging consumable parts of a process module, comprising:

a base plate having an outer perimeter defined by a front side, a back side and two lateral sides that extend between the front side and the back side;

a top plate oriented vertically opposite to the base plate, the top plate being substantially parallel to the base plate;

a first pair of support columns, each one of the first pair of support columns is oriented along each of the two lateral sides and disposed proximal to the front side of the base plate, and each one of the first pair of support columns extends between the top plate and the base plate, each one of the first pair of support columns includes a plurality of support fingers distributed lengthwise along the respective support column of the first pair of support columns and faces inward relative to the outer perimeter;

a second pair of support columns, each one of the second pair of support columns is oriented along each of the two lateral sides and disposed proximal to the back side of the base plate, and each one of the second pair of support columns extends between the top plate and the base plate, each one of the second pair of support columns includes a plurality of support fingers distributed lengthwise along the respective support column of the second pair of support columns and faces inward relative to the outer perimeter;

a first hard stop column disposed proximate to a first one of the second pair of support columns;

a second hard stop column disposed proximate to a second one of the second pair of support columns, wherein each of the first and the second hard stop columns extends a length of the second pair of support columns, such that an edge surface of each of the first and the second hard stop columns faces inward relative to the outer perimeter;

a shell structure of the pod is configured to attach to the base plate and enclose the first pair of support columns, the second pair of support columns, the top plate and the first and second hard stop columns, the shell structure having a front opening that is disposed along the front side of the base plate; and

a door is configured to mate with the front opening of the shell structure and the front side of the base plate, the door is configured with a retention assembly that is disposed on an inside surface of the door and extends between the base plate and the top plate, such that consumable parts when disposed in the pod are configured to rest upon the support fingers of the first and second pairs of support columns and the retention assembly secures the consumable parts against the first and second hard stop columns when the door is closed.

2. The pod of claim 1, wherein each one of the plurality of support fingers includes a support pad defined on a top surface, the support pad providing a distinct contact surface for a consumable part, when received on respective one of the plurality of support fingers.

3. The pod of claim 2, wherein each one of the plurality of support fingers includes a groove defined on the top surface, the support pad is formed in the groove and extends above the top surface.

4. The pod of claim 2, wherein the support pad is made of carbon filled Polyetheretherketone (PEEK) material, and wherein the plurality of support fingers is made of aluminum.

5. The pod of claim 1, wherein the plurality of support fingers are made of carbon filled Polyetheretherketone (PEEK) material.

6. The pod of claim 1, wherein the first and the second hard stop columns are made of carbon filled Polyetheretherketone (PEEK) material, and wherein the first pair and the second pair of support columns are made of aluminum.

7. The pod of claim 1, wherein the top plate is affixed to an underside of a top surface of the shell structure, the top plate providing support to the first pair and the second pair of support columns.

8. The pod of claim 1, wherein the retention assembly includes a spring mechanism that is activated to secure the consumable parts, when the door is closed.

9. The pod of claim 1, wherein the retention assembly includes a plurality of fingers, wherein each one of the plurality of fingers in the retention assembly is configured to provide support for the consumable parts when disposed in the pod, the plurality of fingers is made of carbon filled Polyetheretherketone (PEEK) material.

10. The pod of claim 1, further includes a window defined lengthwise along a portion of a backside of the pod to provide a view of an inside of the pod.

11. The pod of claim 1, further includes a pair of handles, wherein a first handle in the pair is defined on a first lateral side of the pod and is attached to a first support column from the first pair of support columns and a first support column from the second pair of support columns that are disposed on the first lateral side, through the shell structure, and wherein a second handle in the pair is defined on a second lateral side of the pod and is attached to a second support column from the first pair of support columns and a second support column from the second pair of support columns that are disposed on the second lateral side, through the shell structure.

12. The pod of claim 1, further includes a plurality of carrier supports distributed on a receiving plane defined inside the pod, each of the plurality of carrier supports includes a base support structure and a top hat disposed over the base support structure, the base support structure, the top hat and the retention assembly on the door provide support surface for resting a ring carrier, when received in the pod.

13. The pod of claim 12, wherein the receiving plane with the plurality of carrier supports is defined on the base plate.

14. The pod of claim 12, wherein the receiving plane with the plurality of carrier supports is defined on a separator plate that is disposed between the top plate and the base plate, the separator plate defining distinct areas to separately store used consumable parts and new consumable parts.

15. The pod of claim 12, wherein the receiving plane with the plurality of carrier supports is defined on an underside surface of the top plate in the pod.

16. The pod of claim 1, wherein portions of the first pair of support columns, second pair of support columns, base plate and the top plate are made of aluminum and wherein the portions of the first pair of support columns, the second pair of support columns, base plate and the top plate that are exposed to ambient environment within the pod, are treated with a corrosion resistant coating.

17. The pod of claim 1, wherein the pod is a front opening ring pod and the consumable parts are edge rings to be used in the process module.

18. A pod for holding consumable parts to be supplied or returned from a process module, the process module is configured to process semiconductor substrates and processing of the semiconductor substrates causes a wear upon the consumable parts, the pod comprising,

a base plate having a front side, a back side, a first lateral side and a second lateral side, the first and second lateral sides being oriented opposite one another;

a first support column disposed proximal to the front side and on the first lateral side;

a second support column disposed proximal to the front side and on the second lateral side;

a third support column disposed proximal to the back side and on the first lateral side;

a fourth support column disposed proximal to the back side and on the second lateral side;

a top plate disposed above the base plate and connected to each of the first, second, third and fourth support columns, and each of the first, second, third and fourth support columns including support fingers that are distributed between the base plate and the top plate and oriented toward an inner region of the pod;

a first hard stop column disposed parallel to the third support column and a second hard stop column disposed parallel to the fourth support column, such that the first and second hard stop columns are oriented toward the inner region of the pod and extend between the base plate and the top plate;

a shell structure configured to enclose the first, second, third and fourth support columns, the top plate and the first and second hard stop columns and connect to the base plate, the shell structure having a front opening disposed proximate to the front side of the base plate; and

a door for mating with the front opening of the shell structure, the door having a retention assembly for securing consumable parts in the pod when disposed over select ones of the support fingers, the retention assembly is disposed on an inside surface of the door and extends between the base plate and the top plate.

19. The pod of claim 18, wherein the first hard stop column is spaced apart from the third support column and the second hard stop column is spaced apart from the fourth support column.

20. The pod of claim 18, wherein the first hard stop column is attached to the third support column and the second hard stop column is attached to the fourth support column.

21. The pod of claim 18, wherein each one of the support fingers in each of the first, second, third and fourth support columns includes a groove defined on a top surface, a support pad is formed on the top surface, such that the support pad fills the groove and extends above the top surface to form a distinct support surface for receiving the consumable parts, when disposed in the pod.

22. The pod of claim 18, wherein each one of the support fingers in each of the first, second, third and fourth support columns includes a support pad disposed on a top surface, the support pad providing a distinct support surface for the consumable parts in the pod when disposed over select ones of the support fingers.

23. The pod of claim 18, further includes a window defined lengthwise along a portion of a backside of the pod to provide a view of an inside of the pod.

24. The pod of claim 18, further includes a first handle disposed on a first lateral side of the pod and attached to the first and third support columns through the shell structure, and a second handle disposed on a second lateral side of the pod and attached to the second support column and the fourth support column through the shell structure.

25. The pod of claim 18, further includes a plurality of carrier supports distributed on a receiving plane defined inside the pod, each one of the plurality of carrier supports includes a base support structure and a top hat disposed over the base support structure, wherein the base support structure, the top hat and the retention assembly on the door provide support surface for resting a ring carrier, when received in the pod.

26. The pod of claim 25, wherein the receiving plane with the plurality of carrier supports is defined on the base plate.

27. The pod of claim 25, wherein the receiving plane with the plurality of carrier supports is defined on a separator plate that is disposed between the top plate and the base plate, the separator plate defining distinct areas to separately store used consumable parts and new consumable parts.

28. The pod of claim 18, wherein the retention assembly includes fingers distributed lengthwise and oriented toward the inner region of the pod, the fingers providing support for the consumable parts when disposed in the pod.

29. The pod of claim 18, wherein the top plate is attached to an underside of a top surface of the shell structure.