Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists

• US 9,881,823 B2
• Filed: 06/30/2015
• Issued: 01/30/2018
• Est. Priority Date: 06/19/2002
• Status: Active Grant

• Current Assignee: Murata Machinery Limited (Muratec)
• Original Assignee: Murata Machinery Limited (Muratec)
• Inventors: Doherty, Brian J., Mariano, Thomas R., Sullivan, Robert P.
• Primary Examiner(s): MYERS, GLENN F
• Application Number:
  US14/788,464
• Publication Number:
  US 20150303089A1
• Time in Patent Office: 945 Days
• CPC Class Codes: B65G 1/0457 with suspended load carriers
• CPC Class Codes: H01L 21/67733 Overhead conveying
• CPC Class Codes: H01L 21/67736 Loading to or unloading from a conveyor
• CPC Class Codes: H01L 21/67769 Storage means

Abstract

A highly efficient Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load and unload Work-In-Process (WIP) parts directly to/from one or more WIP storage units included in the system. The overhead hoist transport subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route.

Claims

1. An overhead hoist transport vehicle, comprising:

a moveable platform configured to extend from a retracted position in the vehicle to an unretracted position outside the vehicle, the unretracted position being a distance greater than the width of a material unit laterally from a retracted position along a single axis to a first side of the hoist transport vehicle and to extend a distance greater than the width of the material unit laterally from the retracted position along the single axis to a second side of the hoist transport vehicle;

a hoist mounted to the moveable platform, with the hoist being configured to retract with the moveable platform into the vehicle; and

a gripper coupled to the hoist and configured to grip the material unit;

wherein extension from the retracted position to the unretracted position of the moveable platform causes the gripper to move horizontally along the single axis;

wherein the hoist is configured to move the gripper vertically along a vertical axis to a position directly below the moveable platform in the unretracted position; and

wherein the overhead hoist transport vehicle is configured in the retracted position of the moveable platform to carry a material unit beneath an overhead rail in a semiconductor fabrication plant.

2. The overhead hoist transport vehicle of claim 1, wherein the gripper is further configured to move in a downwards vertical direction towards a process tool load port of a process tool on an integrated circuit chip manufacturing floor and to place the material unit on the process tool load port.

3. The overhead hoist transport vehicle of claim 2, wherein the gripper is further configured to retract to a starting position after placing the material unit on the process tool load port.

4. The overhead hoist transport vehicle of claim 3, wherein the process tool load port is an interface where a material unit is exchanged between an automated material handling system and the process tool.

5. The overhead hoist transport vehicle of claim 1, wherein the wherein the movable stage and the gripper are configured to work in concert to move the gripper to a storage location directly below the overhead hoist transport vehicle.

6. The overhead hoist transport vehicle of claim 1, wherein the hoist is configured to move the gripper vertically when the moveable platform is in the retracted position.

7. The overhead hoist transport vehicle of claim 1, wherein the moveable stage is configured to move the gripper without rotation or angular displacement.

8. The overhead hoist transport vehicle of claim 1, wherein the material unit is a front opening unified pod.

9. The overhead hoist transport vehicle of claim 1, wherein the moveable stage and the hoist are configured to work in concert to move the gripper gripping the material unit from a first position proximate to the overhead hoist transport vehicle to at least one of a second position proximate to a process tool load port and a third position proximate to a storage location, the movement of the moveable stage and the hoist allowing the overhead hoist transport vehicle to load the material unit on at least one of the process tool load port and the storage location.

10. The overhead hoist transport vehicle of claim 1, wherein the overhead hoist transport vehicle is configured to couple to an overhead rail in a semiconductor fabrication plant.

11. An overhead hoist transport (OHT) vehicle comprising:

a gripper configured to hold a material unit;

a moveable stage coupled to the gripper, wherein the moveable stage is configured to extend from a retracted position in the vehicle to an unretracted position outside the vehicle, and thereby move the gripper along a horizontal axis from a first position beneath an overhead rail to a second position adjacent to a side of the OHT vehicle; and

a hoist coupled to the movable stage and to the gripper, with the hoist being configured to retract with the moveable stage into the vehicle, wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage in the unretracted position;

wherein the OHT vehicle is configured in the retracted position of the moveable stage to carry the material unit beneath the overhead rail in a semiconductor fabrication plant;

wherein the moveable stage is further configured to extend a distance greater than the width of the material unit laterally from a retracted position along a single axis to a first side of the OHT and to extend a distance greater than the width of a material unit laterally from the retracted position along the single axis to a second side of the OHT vehicle.

12. The OHT vehicle of claim 11, wherein the moveable stage is configured to move without rotating the gripper and the material unit.

13. The OHT vehicle of claim 11, wherein the moveable stage is further configured to move the gripper along the horizontal axis to a third position on the opposite side of the OHT vehicle.

14. The OHT vehicle of claim 11, wherein the hoist is configured to vertically move the gripper from the first position to a work station.

15. The OHT vehicle of claim 14, wherein the workstation comprises a 300 mm process tool load port.

16. The OHT vehicle of claim 11, wherein the movable stage and the gripper are configured to work in concert to move the gripper to a storage location.

17. The OHT vehicle of claim 11, wherein the material unit comprises a 300 mm front-opening unified pod.

18. The OHT vehicle of claim 11, wherein the hoist is configured to move the gripper from the second position vertically to a storage location.

19. The OHT vehicle of claim 18, wherein the storage location comprises a suspended shelf.

20. An Overhead Transport Vehicle (OHT) vehicle comprising:

a gripper configured to hold a material unit;

a moveable stage coupled to the gripper, wherein the moveable stage is configured to extend from a retracted position in the vehicle to an unretracted position outside the vehicle, and thereby move the gripper along a horizontal axis from a first position beneath an overhead rail to a second position to a side of the OHT vehicle; and

a hoist coupled to the movable stage and to the gripper, with the hoist being configured to retract with the moveable stage into the vehicle, wherein the hoist is configured to move the gripper along a vertical axis to a position that is directly below the moveable stage;

wherein the OHT vehicle is configured to move the material unit from a starting position to an ending position, wherein the starting position comprises a horizontal starting position and a vertical starting position, and the ending position comprises a horizontal ending position and a vertical ending position;

wherein the OHT vehicle is configured to couple to the overhead rail in a semiconductor fabrication plant;

wherein the OHT vehicle is configured in the retracted position of the moveable stage to carry the material unit beneath the overhead rail; and

wherein the moveable stage is further configured to extend a distance greater than the width of the material unit laterally from a retracted position along a single axis to a first side of the OHT and to extend a distance greater than the width of the material unit laterally from the retracted position along the single axis to a second side of the OHT vehicle.

21. The OHT vehicle of claim 20, wherein the moveable stage is configured to move without rotating the gripper and the material unit.

22. The OHT vehicle of claim 20, wherein the moveable stage is further configured to move the gripper along the horizontal axis to a third position on the opposite side of the OHT vehicle.

23. The OHT vehicle of claim 20, wherein the moveable stage is configured to move a material unit held by the gripper from the horizontal starting position to the horizontal ending position, and the hoist is configured to move a material unit from the vertical starting position to the vertical ending position.

24. The OHT vehicle of claim 23, wherein the gripper is configured to release the material unit at the ending position.

25. The OHT vehicle of claim 24, wherein the starting position is the first position at the OHT vehicle and the second position is at a 300 mm process tool load port.

26. The OHT vehicle of claim 24, wherein the gripper is configured to release the material unit at a 300 mm process tool load port.

27. The OHT vehicle of claim 24, wherein the starting position is at a storage location and the ending position is the first position.