×

Metal oxide film and method for forming metal oxide film

  • US 9,881,939 B2
  • Filed: 11/05/2013
  • Issued: 01/30/2018
  • Est. Priority Date: 11/08/2012
  • Status: Active Grant
First Claim
Patent Images

1. A method for evaluating crystallinity of a semiconductor film containing a first metal, a second metal, and a third metal, the method comprising the steps of:

  • obtaining a nanobeam electron diffraction pattern of a cross-section of a film thinned from the semiconductor film, andobtaining a selected-area electron diffraction pattern of a plane of a film thinned from the semiconductor film,wherein the first metal is indium, the second metal is zinc, and the third metal is any one of Al, Ti, Ga, Y, Zr, La, Ce, Nd and Hf,wherein a measurement area to obtain the nanobeam electron diffraction pattern is greater than or equal to 5 nmφ and

    less than or equal to 10 nmφ

    , andwherein a measurement area to obtain the selected-area electron diffraction pattern is greater than or equal to an area of 300 nmφ

    .

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×