Resonant type high frequency power supply device and switching circuit for resonant type high frequency power supply device
First Claim
1. A resonant type high frequency power supply device comprising:
- a first power semiconductor element that performs a switching operation to convert a direct voltage to a high frequency alternating voltage;
a second power semiconductor element connected in parallel to said first power semiconductor element, said second power element having a parasitic capacitance; and
a high frequency pulse drive circuit that drives said first power semiconductor element and said second power semiconductor element by applying a pulse-shaped voltage,wherein a peak value of a resonant voltage at a drain terminal of said first power semiconductor element is 3 to 5 times a value of said direct voltage due to said parasitic capacitance of said second power semiconductor element.
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Accused Products
Abstract
A resonant type high frequency power supply device provided with a power semiconductor element that performs a switching operation, the power supply device including a second power semiconductor element at least one or more connected in parallel to the power semiconductor element to achieve optimization of parasitic capacitances of the power semiconductor element and the second power semiconductor element itself, and a high frequency pulse drive circuit that transmits a pulse-shaped voltage signal having a high frequency exceeding 2 MHz to the power semiconductor element and the second power semiconductor element to drive the power semiconductor element and the second power semiconductor element.
10 Citations
16 Claims
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1. A resonant type high frequency power supply device comprising:
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a first power semiconductor element that performs a switching operation to convert a direct voltage to a high frequency alternating voltage; a second power semiconductor element connected in parallel to said first power semiconductor element, said second power element having a parasitic capacitance; and a high frequency pulse drive circuit that drives said first power semiconductor element and said second power semiconductor element by applying a pulse-shaped voltage, wherein a peak value of a resonant voltage at a drain terminal of said first power semiconductor element is 3 to 5 times a value of said direct voltage due to said parasitic capacitance of said second power semiconductor element. - View Dependent Claims (2, 3, 4, 5, 14, 15, 16)
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6. A switching circuit for a resonant type high frequency power supply device, said switching circuit comprising:
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a first power semiconductor element that performs a switching operation to convert a direct voltage to a high frequency alternating voltage; a second power semiconductor element connected in parallel to said first power semiconductor element, said second power semiconductor element having a parasitic capacitance; and a high frequency pulse drive circuit that drives said first power semiconductor element and said second power semiconductor element by applying a pulse-shaped voltage, wherein a peak value of a resonant voltage at a drain terminal of said first power semiconductor element is 3 to 5 times a value of said direct voltage due to said parasitic capacitance of said second power semiconductor element. - View Dependent Claims (7, 8, 9)
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10. A resonant type high frequency power supply device comprising:
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a first power semiconductor element that performs a switching operation to convert a direct voltage to a high frequency alternating voltage; a second power semiconductor element connected in parallel to said first power semiconductor element, said second power semiconductor element having a parasitic capacitance; and a high frequency drive circuit that drives said first power semiconductor element and said second power semiconductor element by applying a voltage, wherein a peak value of a resonant voltage at a drain terminal of said first power semiconductor element is 3 to 5 times a value of said direct voltage due to said parasitic capacitance of said second power semiconductor element. - View Dependent Claims (11, 12, 13)
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Specification