Reducing resonance peaks and drive tones from a micro-electro-mechanical system gyroscope response
First Claim
1. A micro-electro-mechanical system (MEMS) gyroscope, comprising:
- a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency;
a sense circuit configured to;
detect a deflection of the sensor mass; and
generate, based on the deflection and the drive resonance frequency, a demodulated output; and
a signal processing component configured to;
receive a set of frequencies comprising a first value representing the drive resonance frequency, a second value corresponding to a sense resonance frequency associated with the sense circuit, and tone values representing tones of the drive resonance frequency, andapply, based on the first value the second value, and the tone values, a notch filter to the demodulated output to obtain a filtered output.
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Accused Products
Abstract
Reducing noise from drive tone and sense resonance peaks of a micro-electro-mechanical system (MEMS) gyroscope output using a notch filter is presented herein. The MEMS gyroscope can include a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to detect a deflection of the sensor mass, and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component configured to receive a set of frequencies comprising a first value representing the drive resonance frequency and a second value corresponding to a sense resonance frequency associated with the sense circuit, and apply, based on the first value and the second value, a notch filter to the demodulated output to obtain a filtered output.
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Citations
22 Claims
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1. A micro-electro-mechanical system (MEMS) gyroscope, comprising:
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a drive oscillation component configured to vibrate a sensor mass at a drive resonance frequency; a sense circuit configured to; detect a deflection of the sensor mass; and generate, based on the deflection and the drive resonance frequency, a demodulated output; and a signal processing component configured to; receive a set of frequencies comprising a first value representing the drive resonance frequency, a second value corresponding to a sense resonance frequency associated with the sense circuit, and tone values representing tones of the drive resonance frequency, and apply, based on the first value the second value, and the tone values, a notch filter to the demodulated output to obtain a filtered output. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method, comprising:
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vibrating, by a drive oscillation component of a micro-electro-mechanical system (MEMS) gyroscope, a sensor mass of the MEMS gyroscope at a drive resonance frequency; detecting, by a sense circuit of the MEMS gyroscope, a deflection of the sensor mass; generating, by the sense circuit based on the deflection and the drive resonance frequency, a demodulated output; and in response to receiving, by a signal processing component of the MEMS gyroscope, a set of frequencies from a system, the set of frequencies comprising a first value representing the drive resonance frequency a second value corresponding to a sense resonance frequency associated with the sense circuit, and a group of values representing integer multiples of the drive resonance frequency, applying, by the signal processing component based on the first value, the second value, and the group of values, a notch filter to the demodulated output to obtain a filtered output. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. A system, comprising:
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a frequency identification component configured to; determine a drive resonance frequency corresponding to a vibration of a sensor mass of a MEMS gyroscope; and determine a sense resonance frequency of a sense circuit of the MEMS gyroscope; and a programming component configured to; store the drive resonance frequency a value corresponding to the sense resonance frequency, and tones of the drive resonance frequency in a memory to facilitate an application, by the MEMS gyroscope using the drive resonance frequency, the value corresponding to the sense resonance frequency, and the tones of the drive resonance frequency, of a notch filter to a demodulated output corresponding to a coriolis force associated with a deflection of the sensor mass of the MEMS gyroscope. - View Dependent Claims (20, 21, 22)
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Specification