Integrated device with external light source for probing detecting and analyzing molecules
First Claim
1. An integrated device comprising:
- a pixel region comprising;
a plurality of pixels, a pixel of the plurality of pixels having;
a sample well disposed on a substrate surface, wherein the sample well is configured to receive a sample;
at least one sensor configured to receive luminescence from the sample well; and
at least one waveguide for delivering excitation energy to a vicinity of the sample well; and
an excitation source coupling region comprising;
a coupling component including a grating coupler disposed beneath the substrate surface, wherein the grating coupler is configured to receive excitation energy incident on the substrate surface from an external excitation energy source and couple the excitation energy into the at least one waveguide; and
a reflector layer disposed proximate to a side of the grating coupler and positioned to reflect excitation energy passing through the grating coupler towards the grating coupler.
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Accused Products
Abstract
System and methods for analyzing single molecules and performing nucleic acid sequencing. An integrated device includes multiple pixels with sample wells configured to receive a sample, which when excited, emits radiation. The integrated device includes at least one waveguide configured to propagate excitation energy to the sample wells from a region of the integrated device configured to couple with an excitation energy source. A pixel may also include at least one element for directing the emission energy towards a sensor within the pixel. The system also includes an instrument that interfaces with the integrated device. The instrument may include an excitation energy source for providing excitation energy to the integrated device by coupling to an excitation energy coupling region of the integrated device. One of multiple markers distinguishable by temporal parameters of the emission energy may label the sample and configuration of the sensor within a pixel may allow for detection of a temporal parameter associated with the marker labeling the sample.
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Citations
20 Claims
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1. An integrated device comprising:
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a pixel region comprising; a plurality of pixels, a pixel of the plurality of pixels having; a sample well disposed on a substrate surface, wherein the sample well is configured to receive a sample; at least one sensor configured to receive luminescence from the sample well; and at least one waveguide for delivering excitation energy to a vicinity of the sample well; and an excitation source coupling region comprising; a coupling component including a grating coupler disposed beneath the substrate surface, wherein the grating coupler is configured to receive excitation energy incident on the substrate surface from an external excitation energy source and couple the excitation energy into the at least one waveguide; and a reflector layer disposed proximate to a side of the grating coupler and positioned to reflect excitation energy passing through the grating coupler towards the grating coupler. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of forming an integrated device comprising:
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forming a plurality of sensor regions, wherein a sensor region of the plurality of sensor regions includes at least one sensor; forming a plurality of sample wells on a substrate surface, wherein a sample well of the plurality of sample wells aligns with a corresponding one of the plurality of sensor regions; forming at least one waveguide configured to couple excitation energy separate from the plurality of sample wells and direct excitation energy to at least one sample well of the plurality of sample wells; forming, in a region separate from the plurality of sample wells, a grating coupler configured to receive excitation energy incident on the substrate surface from at least one excitation energy source external to the integrated device and couple the excitation energy to the at least one waveguide; and forming a reflector layer proximate to a side of the grating coupler and positioned to reflect excitation energy passing through the grating coupler towards the grating coupler. - View Dependent Claims (18, 19, 20)
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Specification