Switching matrix and testing system for semiconductor characteristic measurement using the same
First Claim
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1. A switching matrix for semiconductor charscteristic measurement, comprising:
- a switching array, including;
at least one input port;
at least one output port to electrically connect with a device under test;
at least one switching device electrically connecting between the at least one input port and the at least one output port, wherein an electrical connection between one of the at least one input port and one of the at least one output port is closed when one of the at least one switching device electrically connecting there between is turned on, and the electrical connection between said input and output ports is open when said switching device is turned off;
at least one electrical sensor electrically connecting with the at least one switching device, and, during a testing operation for testing an electrical property of the device under test, generating a signal in response to measuring a predetermined electrical property of the electrical connection between the one of the at least one input port and the one of the at least one output port; and
a controller configured to, during the testing operation for testing the electrical property of the device under test, not change a conduction state of the at least one switching device when the measurement from the at least one electrical sensor indicates that the predetermined electrical property is greater than a reference electrical property, and change a conduction state of the at least one switching device when the measurement from the at least one electrical sensor indicates that the predetermined electrical property is less than the reference electrical property.
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Abstract
A switching matrix includes a plurality of input ports, a plurality of output ports, a plurality of switching devices configured to open and close, an electrical connection between the input ports and the output ports, and an electrical sensor configured to generate a signal by measuring a predetermined electrical property of the electrical connection, the open and close of switching devices is pre-determined by status read from the electrical sensor.
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Citations
23 Claims
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1. A switching matrix for semiconductor charscteristic measurement, comprising:
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a switching array, including; at least one input port; at least one output port to electrically connect with a device under test; at least one switching device electrically connecting between the at least one input port and the at least one output port, wherein an electrical connection between one of the at least one input port and one of the at least one output port is closed when one of the at least one switching device electrically connecting there between is turned on, and the electrical connection between said input and output ports is open when said switching device is turned off; at least one electrical sensor electrically connecting with the at least one switching device, and, during a testing operation for testing an electrical property of the device under test, generating a signal in response to measuring a predetermined electrical property of the electrical connection between the one of the at least one input port and the one of the at least one output port; and a controller configured to, during the testing operation for testing the electrical property of the device under test, not change a conduction state of the at least one switching device when the measurement from the at least one electrical sensor indicates that the predetermined electrical property is greater than a reference electrical property, and change a conduction state of the at least one switching device when the measurement from the at least one electrical sensor indicates that the predetermined electrical property is less than the reference electrical property. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A testing system for semiconductor characteristic measurement, comprising:
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a switching matrix comprising; a plurality of input ports coupled with a measurement instrument; a plurality of output ports electrically connected with a device under test and coupled with a probing device to measure a semiconductor; a plurality of switching devices electrically connecting between the plurality of input ports and the plurality of output ports, wherein an electrical connection between one of the plurality of input ports and one of the plurality of output ports is closed when one of the plurality of switching devices electrically connecting therebetween is turned on, and the electrical connection between said input and output ports is open when said one of the plurality of switching devices is turned off; and an electrical sensor electrically connecting with the plurality of switching devices, and generating a signal in response to measuring a predetermined electrical property applied on of the electrical connection between the one of the plurality of input ports and the one of the plurality of output ports; and a controller configured to, during a testing operation for testing electrical properties of the device under test, not change a conduction state of the one of the plurality of switching devices in response to the measurement from the at least one electrical sensor indicating that the predetermined electrical property is greater than a reference electrical property, and to change a conduction state of the one of the plurality of switching devices in response to the measurement from the at least one electrical sensor indicating that the predetermined electrical property is less than the reference electrical property. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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Specification