Monolithically integrated multi-sensor device on a semiconductor substrate and method therefor
First Claim
1. A monolithically integrated multi-sensor (MIMs) comprising:
- a first integrated circuit comprising;
an inertial sensor; and
a first MEMs sensor wherein the first MEMs sensor is configured to measure a different parameter than the inertial sensor.
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Abstract
A monolithically integrated multi-sensor (MIMS) is disclosed. A MIMs integrated circuit comprises a plurality of sensors. For example, the integrated circuit can comprise three or more sensors where each sensor measures a different parameter. The three or more sensors can share one or more layers to form each sensor structure. In one embodiment, the three or more sensors can comprise MEMs sensor structures. Examples of the sensors that can be formed on a MIMs integrated circuit are an inertial sensor, a pressure sensor, a tactile sensor, a humidity sensor, a temperature sensor, a microphone, a force sensor, a load sensor, a magnetic sensor, a flow sensor, a light sensor, an electric field sensor, an electrical impedance sensor, a galvanic skin response sensor, a chemical sensor, a gas sensor, a liquid sensor, a solids sensor, and a biological sensor.
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Citations
76 Claims
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1. A monolithically integrated multi-sensor (MIMs) comprising:
a first integrated circuit comprising; an inertial sensor; and a first MEMs sensor wherein the first MEMs sensor is configured to measure a different parameter than the inertial sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A monolithically integrated multi-sensor (MIMs) comprising:
a first integrated circuit comprising; an inertial sensor; and a first MEMs sensor wherein the first MEMs sensor is configured to measure a different parameter than the inertial sensor; and a second MEMs sensor wherein the second MEMs sensor is configured to measure a different parameter than the inertial sensor and the first MEMs sensor. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 74, 75)
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48. A monolithically integrated multi-sensor (MIMs) comprising:
a first integrated circuit comprising; an inertial sensor; and at least two MEMs sensors wherein the at least two MEMs sensor measure different parameters, wherein the at least two MEMs sensors measure a different parameter than the inertial sensor, and wherein the inertial sensor and the at least two MEMs sensors share a deposited layer in common. - View Dependent Claims (49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 76)
Specification