Method and system for in situ formation of gas-phase compounds

• US 9,890,456 B2
• Filed: 08/21/2014
• Issued: 02/13/2018
• Est. Priority Date: 08/21/2014
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM IP Holding B.V. (ASM International NV)
• Inventors: Tolle, John, Hill, Eric, Winkler, Jereld Lee
• Primary Examiner(s): MILLER, JR, JOSEPH ALBERT
• Application Number:
  US14/465,252
• Publication Number:
  US 20160051964A1
• Time in Patent Office: 1,272 Days
• Field of Search: None
• CPC Class Codes: C23C 16/452 by activating reactive gas streams before their introduction into the reaction chamber, e.g. by ionisation or addition of reactive species
• CPC Class Codes: C23C 16/46 characterised by the method used for heating the substrate C23C16/48, C23C16/50 take precedence
• CPC Class Codes: C23C 16/50 using electric discharges generation and control of plasma in discharge tubes for surface treatment H01J37/32, H01J37/34
• CPC Class Codes: C23C 16/52 Controlling or regulating the coating process C23C16/45557, C23C16/279 take precedence
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream
• CPC Class Codes: H01J 37/32422 Arrangement for selecting ions or species in the plasma
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32816 Pressure

Abstract

A system and method for providing intermediate reactive species to a reaction chamber are disclosed. The system includes an intermediate reactive species formation chamber fluidly coupled to the reaction chamber to provide intermediate reactive species to the reaction chamber. A pressure control device can be used to control an operating pressure of the intermediate reactive species formation chamber, and a heater can be used to heat the intermediate reactive species formation chamber to a desired temperature.

Claims

1. A gas-phase reactor system comprising:

a reactor comprising a reaction chamber;

an intermediate reactive species formation chamber fluidly coupled to the reaction chamber, the intermediate reactive species formation chamber comprising a tapered inlet to facilitate mixing of reactants;

a pressure sensor to measure an operating pressure within the intermediate reactive species formation chamber;

a first gas source and one or more of a second gas source and an excitation source fluidly coupled to the tapered inlet of the intermediate reactive species formation chamber, wherein the first gas source comprises a precursor for intermediate reactive species; and

a pressure control device in fluid communication with the intermediate reactive species formation chamber and interposed between the intermediate reactive species formation chamber and the reaction chamber, wherein the pressure control device and the pressure sensor are coupled to a controller to provide closed-loop control of the operating pressure of the intermediate reactive species formation chamber independently from the pressure within the reaction chamber.

2. The gas-phase reactor system of claim 1, comprising a remote plasma unit coupled to the intermediate reactive species formation chamber.

3. The gas-phase reactor system of claim 1, wherein the pressure control device is used to pulse the intermediate reactive species to the reaction chamber.

4. The gas-phase reactor system of claim 1, further comprising a flow control unit coupled to the first gas source to control a flow rate of the precursor to the intermediate reactive species formation chamber.

5. The gas-phase reactor system of claim 1, wherein the reactor is selected from the group consisting of a chemical vapor deposition reactor, an atomic layer deposition reactor, an etch reactor, a clean reactor, and a treatment reactor.

6. The gas-phase reactor system of claim 1, wherein the intermediate reactive species are introduced into the reaction chamber in a steady-state manner.

7. The gas-phase reactor system of claim 1, further comprising an integrated inlet manifold block.

8. The gas-phase reactor system of claim 1, wherein the intermediate reactive species formation chamber comprises a catalyst.

9. The gas-phase reactor system of claim 1, further comprising a heater capable of heating the intermediate reactive species formation chamber to a temperature between about 50°

C. and about 200°

C.

10. The gas-phase reactor system of claim 1, wherein the first gas source comprises one or more or NH₃, NF₃, H₂O, H₂O₂, MMH (mono methyl hydrazine), UDMH (unsymmetrical dimethyl hydrazine), 0₂/H₂, N₂/H₂, and H₂S.

14. The gas-phase reactor system of claim 7, wherein one or more reactants are introduced at the integrated inlet manifold block.

11. A gas-phase reactor system comprising:

a reactor comprising a reaction chamber;

an intermediate reactive species formation chamber fluidly coupled to the reaction chamber;

a first reactant source and one or more of a second gas source and an excitation source coupled to a tapered inlet of the intermediate reactive species formation chamber, wherein the first reactant source is a precursor for intermediate reactive species;

a pressure sensor to measure a pressure within intermediate reactive species formation chamber;

a controller connected to the pressure sensor;

a pressure control device connected to the controller and in fluid communication with and interposed between the intermediate reactive species formation chamber and the reaction chamber, wherein the pressure control device and the pressure sensor provide closed-loop control of an operating pressure of the intermediate reactive species formation chamber independently from the pressure within the reaction chamber; and

a heater to heat the intermediate reactive species formation chamber to a temperature of about 50°

C. to about 200°

C.

12. The gas-phase reactor system of claim 11, wherein intermediate reactive species are introduced from the intermediate reactive species formation chamber into the reaction chamber in a steady-state manner.

13. The gas-phase reactor system of claim 11, wherein the intermediate reactive species formation chamber comprises a catalyst.