Micromechanical gyroscope structure
First Claim
1. A microelectromechanical gyroscope structure, comprising:
- a seismic mass; and
a primary spring structure suspending the seismic mass to a body element with a suspension structure, the primary spring structure allowing a primary oscillation motion where at least part of the seismic mass rotary oscillates in a first direction about a primary axis that is aligned with the plane of the seismic mass and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction,wherein the primary spring structure has two ends attached to the seismic mass on the opposite sides of the suspension structure and said primary spring structure is configured for torsional motion about the primary axis that is common with the primary oscillation motion, andwherein a quadrature error of the seismic mass is mechanically compensated with at least one compensation groove disposed on the face of the seismic mass, which face is away from the body element, wherein the at least one compensation groove is positioned at a predefined distance from either end of the primary spring structure.
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Accused Products
Abstract
A microelectromechanical gyroscope structure, and a method for manufacturing a microelectromechanical gyroscope structure, comprising a seismic mass and a spring structure suspending the seismic mass to a body element with a suspension structure. The spring structure allows a primary oscillation motion about a primary axis that is aligned with the plane of the seismic mass, and a secondary oscillation motion where at least part of the seismic mass moves in a second direction, perpendicular to the direction of the primary oscillation motion. The spring structure is attached to the seismic mass at both sides of the suspension structure and said spring structure is in torsional motion about the primary axis that is common with the primary oscillation motion. The structure of the gyroscope enables mechanical compensation of a quadrature error of the seismic mass by etching a compensation groove on the top face of the seismic mass.
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Citations
18 Claims
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1. A microelectromechanical gyroscope structure, comprising:
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a seismic mass; and a primary spring structure suspending the seismic mass to a body element with a suspension structure, the primary spring structure allowing a primary oscillation motion where at least part of the seismic mass rotary oscillates in a first direction about a primary axis that is aligned with the plane of the seismic mass and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction, wherein the primary spring structure has two ends attached to the seismic mass on the opposite sides of the suspension structure and said primary spring structure is configured for torsional motion about the primary axis that is common with the primary oscillation motion, and wherein a quadrature error of the seismic mass is mechanically compensated with at least one compensation groove disposed on the face of the seismic mass, which face is away from the body element, wherein the at least one compensation groove is positioned at a predefined distance from either end of the primary spring structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of manufacturing a microelectromechanical gyroscope structure, the structure comprising a seismic mass and a primary spring structure suspending the seismic mass to a body element with a suspension structure to allow a primary oscillation motion where at least part of the seismic mass rotary oscillates in a first direction about a primary axis that is aligned with the plane of the seismic mass and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction, the manufacturing method comprising:
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forming by at least one of etching and surface micromachining the primary spring structure that is attached to the seismic mass on the opposite sides of the suspension structure, wherein said primary spring structure is configured for torsional motion about the primary axis that is common with the primary oscillation motion; and forming by at least one of etching and surface micromachining at least one compensation groove for mechanically compensating a quadrature error of the seismic mass, wherein the compensation groove is on the face of the seismic mass that is exposed to the main processing steps and away from the body element, wherein the at least one compensation groove is positioned at a predefined distance from either end of the primary spring structure. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification