×

Micromechanical gyroscope structure

  • US 9,891,052 B2
  • Filed: 11/17/2015
  • Issued: 02/13/2018
  • Est. Priority Date: 12/29/2014
  • Status: Active Grant
First Claim
Patent Images

1. A microelectromechanical gyroscope structure, comprising:

  • a seismic mass; and

    a primary spring structure suspending the seismic mass to a body element with a suspension structure, the primary spring structure allowing a primary oscillation motion where at least part of the seismic mass rotary oscillates in a first direction about a primary axis that is aligned with the plane of the seismic mass and a secondary oscillation where at least part of the seismic mass moves in a second direction that is perpendicular to the first direction,wherein the primary spring structure has two ends attached to the seismic mass on the opposite sides of the suspension structure and said primary spring structure is configured for torsional motion about the primary axis that is common with the primary oscillation motion, andwherein a quadrature error of the seismic mass is mechanically compensated with at least one compensation groove disposed on the face of the seismic mass, which face is away from the body element, wherein the at least one compensation groove is positioned at a predefined distance from either end of the primary spring structure.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×