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MEMS device with improved spring system

  • US 9,891,053 B2
  • Filed: 07/15/2015
  • Issued: 02/13/2018
  • Est. Priority Date: 09/11/2009
  • Status: Active Grant
First Claim
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1. A microelectromechanical system (MEMS) device comprising:

  • a proof mass system that includes a proof mass, the proof mass moves in a first direction in a plane in response to a force, and wherein the proof mass moves in the plane; and

    a spring system comprising a first flexible element, a first rigid lever arm, a second rigid lever arm and a second flexible element, wherein the first flexible element, the first rigid lever arm, the second rigid lever arm and the second flexible element are disposed in the plane,the first rigid lever arm being connected to the first flexible element, the second rigid lever arm being connected to the second flexible element, and the first flexible element and the second flexible element being connected to one another via an intervening support anchor distinct from the proof mass, and wherein the first flexible element and the second flexible element each have a longitudinal axis parallel to the first direction of motion and wherein when the proof mass moves in the first direction, the first flexible element and the second flexible element bend in the plane, and the first and second rigid lever arms rotate in the plane.

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