Integrated electro-optic modulator

• US 9,891,450 B2
• Filed: 03/30/2016
• Issued: 02/13/2018
• Est. Priority Date: 09/16/2015
• Status: Active Grant

• Current Assignee: STMicroelectronics SAS (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SAS (STMicroelectronics NV)
• Inventors: Baudot, Charles, Douix, Maurin, Boeuf, Frdric, Cremer, Sbastien
• Primary Examiner(s): KIM, ELLEN E
• Application Number:
  US15/084,645
• Publication Number:
  US 20170075148A1
• Time in Patent Office: 685 Days
• Field of Search: 385 2, 385 3, 257 51, 357245
• CPC Class Codes: G02F 1/0151 modulating the refractive index
• CPC Class Codes: G02F 1/025 in an optical waveguide structure G02F1/017, G02F1/2257 take precedence

Abstract

An E/O phase modulator may include a waveguide having an insulating substrate, a single-crystal silicon strip and a polysilicon strip of a same thickness and doped with opposite conductivity types above the insulating substrate, and an insulating interface layer between the single-crystal silicon strip and polysilicon strip. Each of the single-crystal silicon strip and polysilicon strip may be laterally continued by a respective extension, and a respective electrical contact coupled to each extension.

Claims

1. A capacitive modulator comprising:

a waveguide comprising

an insulating substrate,

a single-crystal silicon strip disposed above the insulating substrate, the single-crystal silicon strip being doped with a first conductivity type,

a polysilicon strip disposed above the insulating substrate, the polysilicon strip being doped with a second conductivity type opposite the first conductivity type,

an interface layer comprising an insulating layer between the single-crystal silicon strip and the polysilicon strip, wherein the single-crystal silicon strip and the polysilicon strip each comprise

a first portion directly contacting the interface layer,

a second portion thinner than the first portion, and

a third portion, wherein the second portion is disposed between the first portion and the third portion, and

an electrical contact coupled to the third portion of the single-crystal silicon strip, wherein the first portion and the second portion of the single-crystal silicon strip are doped to a first doping concentration, the third portion of the single-crystal silicon strip is doped to a second doping concentration greater than the first doping concentration, and wherein the first portion of the single-crystal silicon strip and the first portion of the polysilicon strip are of a same first thickness.

2. The capacitive modulator of claim 1, wherein adjacent surfaces of the single-crystal silicon strip and polysilicon strip are corrugated.

3. The capacitive modulator of claim 1, wherein the second portion of the single-crystal silicon strip and the second portion of the polysilicon strip have a substantially same second thickness.

4. The capacitive modulator of claim 1, wherein the third portion of the single-crystal silicon strip and the third portion of the polysilicon strip each have the same first thickness, and wherein the electrical contact is vertically aligned with the third portion of the single-crystal silicon strip.

5. The capacitive modulator of claim 1, wherein the interface layer further comprises a silicon-germanium layer between the insulating layer and the single-crystal silicon strip.

6. The capacitive modulator of claim 1, wherein the insulating layer comprises silicon oxide.

7. The capacitive modulator of claim 1, wherein the insulating layer has a thickness less than 10 nm.

8. The capacitive modulator of claim 1, further comprising an insulator coating the single-crystal silicon strip and the polysilicon strip, wherein an optical index of the insulator and an optical index of the insulating substrate are smaller than an optical index of the single-crystal silicon strip and the polysilicon strip.

9. A capacitive modulator comprising:

a first waveguide coupled to a second waveguide and a third waveguide at a first region of the first waveguide, the second and third waveguides coupled to each other and a fourth waveguide at a second region of the fourth waveguide, the second waveguide comprising

an insulating substrate,

a single-crystal silicon strip disposed above the insulating substrate, the single-crystal silicon strip being doped with a first conductivity type,

a polysilicon strip disposed above the insulating substrate, the polysilicon strip being doped with a second conductivity type opposite the first conductivity type,

an interface layer comprising an insulating layer between the single-crystal silicon strip and polysilicon strip, wherein the single-crystal silicon strip and the polysilicon strip each comprise

a first portion directly contacting the interface layer,

a second portion thinner than the first portion, and

a third portion, wherein the second portion is disposed between the first portion and the third portion, and

an electrical contact coupled to the third portion of the single-crystal silicon strip, wherein the first portion and the second portion of the single-crystal silicon strip are doped to a first doping concentration, the third portion of the single-crystal silicon strip is doped to a second doping concentration greater than the first doping concentration, wherein the first portion of the single-crystal silicon strip and the first portion of the polysilicon strip are of a same first thickness.

10. The capacitive modulator of claim 9, wherein adjacent surfaces of the single-crystal silicon strip and polysilicon strip are corrugated.

11. The capacitive modulator of claim 9, wherein the second portion of the single-crystal silicon strip and the second portion of the polysilicon strip have a substantially same second thickness.

12. The capacitive modulator of claim 9, wherein the third portion of the single-crystal silicon strip and the third portion of the polysilicon strip each have the same first thickness, and wherein the electrical contact is vertically aligned with the third portion of the single-crystal silicon strip.

13. The capacitive modulator of claim 9, wherein the interface layer further comprises a silicon-germanium layer between the insulating layer and the single-crystal silicon strip.

14. A capacitive modulator comprising:

a first waveguide comprising

an insulating substrate,

a single-crystal silicon region disposed above the insulating substrate, the single-crystal silicon region being doped with a first conductivity type,

a polysilicon region disposed above the insulating substrate, the polysilicon region being doped with a second conductivity type opposite the first conductivity type,

an interface layer comprising an insulating layer between the single-crystal silicon region and the polysilicon region, wherein the single-crystal silicon region and the polysilicon region each comprise

a strip having an upper surface at a first height,

a lateral extension comprising a first portion and a second portion, the first portion having an upper surface at the first height, wherein the second portion extends from the strip to the first portion, and wherein the second portion of the lateral extension of the strip has an upper surface at a second height less than the first height, and

a contact over the first portion, wherein the strip and the second portion of the lateral extension of the single-crystal silicon region are doped to a first doping concentration, and wherein the first portion of the lateral extension of the single-crystal silicon region is doped to a second doping concentration greater than the first doping concentration.

15. The capacitive modulator of claim 14, wherein the lateral extension of the single-crystal silicon region extends on a first side of the interface layer;

and wherein the lateral extension of the polysilicon region extends on a second side of the interface layer, the second side being opposite to the first side.

16. The capacitive modulator of claim 14, wherein the single-crystal silicon region is laterally continued, on a side of the interface layer opposite to the lateral extension of the single-crystal silicon region, by an additional extension having a thickness less than that of the strip of the single-crystal silicon region.

17. The capacitive modulator of claim 16, wherein the additional extension has a same thickness as the second portion of the lateral extension of the single-crystal silicon region.

18. The capacitive modulator of claim 14, wherein the second portion of the lateral extension of the polysilicon region has a thickness less than that of the strip of the polysilicon region.

19. The capacitive modulator of claim 14, further comprising an insulator layer over the first waveguide, wherein an optical index of the insulator layer is less than that of the single-crystal silicon region and the polysilicon region.

20. The capacitive modulator of claim 14, wherein the interface layer further comprises a silicon-germanium layer between the single-crystal silicon region and the polysilicon region.

21. The capacitive modulator of claim 14, wherein the insulating layer comprises silicon oxide having a thickness less than 10 nm.

22. The capacitive modulator of claim 14, further comprising:

a second waveguide coupled to the first waveguide and to a third waveguide at a first region of the second waveguide; and

a fourth waveguide coupled to the first waveguide and to the third waveguide at a second region of the fourth waveguide, wherein the capacitive modulator is configured to function as an electro-optic amplitude modulator.

23. A waveguide comprising:

an insulating substrate;

a single-crystal silicon strip disposed above the insulating substrate, the single-crystal silicon strip being doped with a first conductivity type;

a polysilicon strip disposed above the insulating substrate, the polysilicon strip being doped with a second conductivity type opposite the first conductivity type;

a semiconductor layer having a semiconductor material different than both the silicon in the single-crystal silicon strip and the polysilicon in the polysilicon strip, the semiconductor layer disposed between a sidewall of the single-crystal silicon strip and a sidewall of the polysilicon strip; and

an insulating layer disposed between the semiconductor layer and the sidewall of the polysilicon strip, wherein the semiconductor layer and the polysilicon strip are capacitively coupled through the insulating layer.

24. The waveguide of claim 23, wherein the semiconductor layer comprises a silicon-germanium layer.

25. The waveguide of claim 23, wherein adjacent surfaces of the single-crystal silicon strip and polysilicon strip are corrugated.

26. The waveguide of claim 23, wherein

the single-crystal silicon strip extends to a first height above the insulating substrate,

the polysilicon strip extends to a second height above the insulating substrate,

the semiconductor layer extends to a third height above the insulating substrate, and

the first height, second height, and third height are equal.

27. The waveguide of claim 23, wherein

the insulating layer comprises a first width less than 10 nm, and

the semiconducting layer comprises a second width within a range from 5 nm to 20 nm inclusive.