Method of forming a wire bond sensor package
First Claim
1. A method of forming a packaged chip assembly, comprising:
- providing a semiconductor chip that includes;
a first substrate of semiconductor material having first top and first bottom surfaces,a semiconductor device integrally formed on or in the first top surface, andfirst bond pads at the first top surface electrically coupled to the semiconductor device;
providing a second substrate that includes;
second top and second bottom surfaces,a first aperture extending between the second top and second bottom surfaces,one or more second apertures extending between the second top and second bottom surfaces,second bond pads at the second top surface,third bond pads at the second bottom surface, andconductors electrically coupled to the second bond pads and the third bond pads;
securing the first top surface to the second bottom surface such that the semiconductor device is aligned with the first aperture, and each of the first bond pads is aligned with one of the one or more second apertures; and
electrically connecting each of a plurality of wires between one of the first bond pads and one of the second bond pads, wherein each of the plurality of wires passes through one of the one or more second apertures.
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Accused Products
Abstract
A packaged chip assembly with a semiconductor substrate, a semiconductor device integrally formed on or in the substrate'"'"'s top surface, and first bond pads at the substrate'"'"'s top surface electrically coupled to the semiconductor device. A second substrate includes a first aperture and one or more second apertures extending therethrough, second and third bond pads at the second substrate'"'"'s top and bottom surfaces, respectively, and conductors electrically coupled to the second and third bond pads. The semiconductor substrate'"'"'s top surface is secured to the second substrate'"'"'s bottom surface such that the semiconductor device is aligned with the first aperture, and each of the first bond pads is aligned with one of the second apertures. A plurality of wires are each electrically connected between one of the first bond pads and one of the second bond pads and each passing through one of the one or more second apertures.
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Citations
8 Claims
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1. A method of forming a packaged chip assembly, comprising:
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providing a semiconductor chip that includes; a first substrate of semiconductor material having first top and first bottom surfaces, a semiconductor device integrally formed on or in the first top surface, and first bond pads at the first top surface electrically coupled to the semiconductor device; providing a second substrate that includes; second top and second bottom surfaces, a first aperture extending between the second top and second bottom surfaces, one or more second apertures extending between the second top and second bottom surfaces, second bond pads at the second top surface, third bond pads at the second bottom surface, and conductors electrically coupled to the second bond pads and the third bond pads; securing the first top surface to the second bottom surface such that the semiconductor device is aligned with the first aperture, and each of the first bond pads is aligned with one of the one or more second apertures; and electrically connecting each of a plurality of wires between one of the first bond pads and one of the second bond pads, wherein each of the plurality of wires passes through one of the one or more second apertures. - View Dependent Claims (2, 3, 4)
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5. A method of forming a packaged chip assembly, comprising:
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providing a semiconductor chip that includes; a first substrate of semiconductor material having first top and first bottom surfaces, a semiconductor device integrally formed on or in the first top surface, and first bond pads at the first top surface electrically coupled to the semiconductor device; forming one or more trenches into the first top surface; forming a plurality of conductive traces each having a first portion electrically connected to one of the first bond pads, a second portion extending over and insulated from the first top surface, and a third portion extending down into one of the one or more trenches; providing a second substrate that includes; second top and second bottom surfaces, second bond pads at the second top surface, third bond pads at the second bottom surface, and conductors electrically coupled to the second bond pads and to the third bond pads; securing the first bottom surface to the second top surface; electrically connecting each of a plurality of wires between one of the third portions of one of the plurality of conductive traces and one of the second bond pads; providing a third substrate that includes; third top and third bottom surfaces, and fourth bond pads at the third top surface; and securing the third top surface to the second bottom surface using electrical interconnects that are each electrically coupling one of the third bond pads to one of the fourth bond pads. - View Dependent Claims (6, 7, 8)
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Specification