×

Method and system for quadrature error compensation

  • US 9,897,460 B2
  • Filed: 06/08/2015
  • Issued: 02/20/2018
  • Est. Priority Date: 05/26/2011
  • Status: Active Grant
First Claim
Patent Images

1. A method for compensating a quadrature error on a MEMS sensor, the method comprising:

  • detecting a movement of a drive mass within the MEMS sensor, the movement of the drive mass being relative to drive electrodes and having a deviation from a prescribed movement due to a quadrature error;

    identifying a capacitance change as a function of drive movement of the drive mass using a compensation electrode;

    generating a compensation charge on the compensation electrode, the compensation charge being dependent on the quadrature error; and

    compensating the quadrature error using the compensation charge.

View all claims
  • 0 Assignments
Timeline View
Assignment View
    ×
    ×