Method and system for quadrature error compensation
First Claim
1. A method for compensating a quadrature error on a MEMS sensor, the method comprising:
- detecting a movement of a drive mass within the MEMS sensor, the movement of the drive mass being relative to drive electrodes and having a deviation from a prescribed movement due to a quadrature error;
identifying a capacitance change as a function of drive movement of the drive mass using a compensation electrode;
generating a compensation charge on the compensation electrode, the compensation charge being dependent on the quadrature error; and
compensating the quadrature error using the compensation charge.
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Abstract
The present invention concerns an MEMS sensor and a method for compensation of a quadrature error on an MEMS sensor, which is intended for detection of movements of a substrate, especially accelerations and/or rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by means of drive electrodes. The mass/es execute a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass/es occurring due to Coriolis force and quadrature error is detected with detection electrodes. It is proposed according to the invention that a capacitance change be detected as a function of drive movement of the mass/es by means of compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.
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Citations
18 Claims
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1. A method for compensating a quadrature error on a MEMS sensor, the method comprising:
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detecting a movement of a drive mass within the MEMS sensor, the movement of the drive mass being relative to drive electrodes and having a deviation from a prescribed movement due to a quadrature error; identifying a capacitance change as a function of drive movement of the drive mass using a compensation electrode; generating a compensation charge on the compensation electrode, the compensation charge being dependent on the quadrature error; and compensating the quadrature error using the compensation charge. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A MEMS sensor for detecting movement, the sensor comprising:
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a substrate; detection circuitry positioned on the substrate, the detection circuitry detects a deflection of a mass caused at least in part to a quadrature error; capacitive sensor circuitry coupled to detect a capacitance change caused by the deflection of the mass; and compensation circuitry coupled to the capacitive sensor circuitry, the compensation circuitry generates a compensation signal that cancels at least a portion of error caused by the quadrature error. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification