Strain sensing element, pressure sensor, microphone, blood pressure sensor, and touch panel

• US 9,897,494 B2
• Filed: 07/17/2014
• Issued: 02/20/2018
• Est. Priority Date: 09/20/2013
• Status: Active Grant

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Kaji, Shiori, Fukuzawa, Hideaki, Fuji, Yoshihiko
• Primary Examiner(s): CAPUTO, LISA M
• Assistant Examiner(s): Hollington, Octavia
• Application Number:
  US14/333,906
• Publication Number:
  US 20150082899A1
• Time in Patent Office: 1,314 Days
• Field of Search: 73779
• CPC Class Codes: G01L 1/12 by measuring variations in the magnetic properties of materials resulting from the application of stress
• CPC Class Codes: G01L 1/125 by using magnetostrictive means magnetostrictive sensors H10N35/101
• CPC Class Codes: G01L 9/16 by making use of variations in the magnetic properties of material resulting from the application of stress

Abstract

According to one embodiment, a strain sensing element provided on a deformable substrate, includes: a first magnetic layer; a second magnetic layer; and an intermediate layer. The second magnetic layer includes Fe_1-yB_y (0<y≦0.3). Magnetization of the second magnetic layer changes according to deformation of the substrate. The intermediate layer is provided between the first magnetic layer and the second magnetic layer.

Claims

1. A strain sensing element provided on a deformable substrate, comprising:

a first magnetic layer;

a second magnetic layer including Fe_1-yB_y (0<

y≦

0.3), in which magnetization changes according to deformation of the substrate; and

an intermediate layer provided between the first magnetic layer and the second magnetic layer,

wherein a first part of the Fe_1-yB_y (0<

y≦

0.3) is amorphous and a second part of the Fe_1-yB_y (0<

y≦

0.3) is not amorphous.

2. The element according to claim 1, wherein

the Fe_1-yB_y (0<

y≦

0.3) is provided in a region that includes an interface between the second magnetic layer and the intermediate layer, the region being in the second magnetic layer.

3. The element according to claim 1, wherein

a thickness of the Fe_1-yB_y (0<

y≦

0.3) is 2 nm or more and 12 nm or less.

4. The element according to claim 1, further comprising

a functional layer including MgO, the second magnetic layer being provided between the intermediate layer and the functional layer.

5. The element according to claim 1, wherein

the second magnetic layer further includes Co₄₀Fe₄₀B₂₀, and the Co₄₀Fe₄₀B₂₀ is provided in a region that includes an interface between the second magnetic layer and the intermediate layer, the region being in the second magnetic layer.

6. The element according to claim 1, wherein

the first magnetic layer includes Fe_1-yB_y (0<

y≦

0.3), and

magnetization of the first magnetic layer changes according to deformation of the substrate.

7. The element according to claim 6, wherein

the Fe_1-yB_y (0<

y≦

0.3) of the first magnetic layer is provided in a region that includes an interface between the first magnetic layer and the intermediate layer, the region being in the first magnetic layer.

8. The element according to claim 6, wherein

a thickness of the Fe_1-yB_y (0<

y≦

0.3) of the first magnetic layer is 2 nm or more and 12 nm or less.

9. The element according to claim 6, wherein

the first magnetic layer further includes (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3), and

the (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3) is provided in a region that includes an interface between the first magnetic layer and the intermediate layer, the region being in the first magnetic layer.

10. The element according to claim 1, wherein

the first magnetic layer includes (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3), and

magnetization of the first magnetic layer changes according to deformation of the substrate.

11. The element according to claim 10, wherein

the (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3) of the first magnetic layer is provided in a region that includes an interface between the first magnetic layer and the intermediate layer, the region being in the first magnetic layer.

12. The element according to claim 10, wherein

the first magnetic layer further includes Fe_1-yB_y (0<

y≦

0.3).

13. The element according to claim 1, wherein the second part of the Fe_1-yB_y (0<

y≦

0.3) is crystalline and is disposed in a first region of the second magnetic layer that includes an interface between the second magnetic layer and the intermediate layer, and wherein the first part of the Fe_1-yB_y (0<

y≦

0.3) that is amorphous is disposed in a second region of the magnetic layer that does not include the interface.

14. A strain sensing element provided on a deformable substrate, comprising:

a first magnetic layer;

a second magnetic layer including (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3), in which magnetization changes according to deformation of the substrate; and

an intermediate layer provided between the first magnetic layer and the second magnetic layer,

wherein a first part of the (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3) is amorphous and a second part of the (Fe_aX_1-a)_1-yB_y is not amorphous.

15. The element according to claim 14, wherein

the (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3) is provided in a region that includes an interface between the second magnetic layer and the intermediate layer, the region being in the second magnetic layer.

16. The element according to claim 14, wherein

a thickness of the (Fe_aX_1-a)_1-yB_y (X being Co or Ni, 0.8≦

a<

1, and 0<

y≦

0.3) is 2 nm or more and 12 nm or less.

17. The element according to claim 14, wherein

the second magnetic layer further includes Fe_1-yB_y (0<

y≦

0.3).

18. The element according to claim 14, wherein

the X is Ni,

the second magnetic layer further includes Co₄₀Fe₄₀B₂₀, and

the Co₄₀Fe₄₀B₂₀ is provided in a region that includes an interface between the second magnetic layer and the intermediate layer, the region being in the second magnetic layer.

19. A pressure sensor comprising:

a support unit;

a substrate supported by the support unit, the substrate being deformable; and

a strain sensing element provided on the substrate,

the strain sensing element including

a first magnetic layer,

a second magnetic layer including Fe_1-yB_y (0<

y≦

0.3), in which magnetization changes according to deformation of the substrate, and

an intermediate layer provided between the first magnetic layer and the second magnetic layer,

wherein a first part of the Fe_1-yB_y (0<

y≦

0.3) is amorphous and a second part of the Fe_1-yB_y (0<

y≦

0.3) is not amorphous.

20. A strain sensing element provided on a deformable substrate, comprising:

a first magnetic layer;

a second magnetic layer including (Fe_aNi_1-a)_1-yB_y (0.8≦

a<

1, and 0<

y≦

0.3), in which magnetization changes according to deformation of the substrate; and

an intermediate layer provided between the first magnetic layer and the second magnetic layer,

wherein a first part of the (Fe_aNi_1-a)_1-yB_y (0.8≦

a<

1,and 0<

y≦

0.3) is amorphous and a second part of the (Fe_aNi_1-a)_1-yB_y is not amorphous.