Energy beam size verification
First Claim
1. A computer program product comprising at least one non-transitory computer readable medium having stored thereon computer-readable program code portions, the computer-readable program code portions comprising one or more executable portions configured for:
- (a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory,(d) repeating steps a-c for different predetermined beam powers, and(e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each settings of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens.
3 Assignments
0 Petitions
Accused Products
Abstract
A method for verifying a size of an energy beam spot, said method comprising the steps of providing a first beam spot having a predetermined size and power at a first position on a work piece, varying a focus and/or astigmatism lens setting for said first beam spot until max intensity for the beam spot is detected, comparing the detected settings of said focus lens and/or astigmatism lens for said maximum intensity of the beam spot with stored settings of said focus lens and/or astigmatism lens for the beam spot with said predetermined size and power, repeating step a-c for different predetermined beam powers, repeating step a-d for different positions on said work piece, wherein said beam spot size is verified if each detected settings of said focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.
189 Citations
20 Claims
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1. A computer program product comprising at least one non-transitory computer readable medium having stored thereon computer-readable program code portions, the computer-readable program code portions comprising one or more executable portions configured for:
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(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece, (b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected, (c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory, (d) repeating steps a-c for different predetermined beam powers, and (e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each settings of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A non-transitory computer readable medium having stored thereon a program element configured and arranged when executed on a computer to implement a method for automatically verifying a size of at least one energy beam spot, said method comprising the steps of:
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(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece, (b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected, (c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot, the stored settings being stored within a memory, (d) repeating steps a-c for different predetermined beam powers, and (e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each settings of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from the corresponding stored settings of said focus lens and/or astigmatism lens. - View Dependent Claims (17, 18, 19, 20)
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Specification