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Chip-scale optomechanical magnetometer

  • US 9,897,666 B2
  • Filed: 12/15/2014
  • Issued: 02/20/2018
  • Est. Priority Date: 12/16/2013
  • Status: Active Grant
First Claim
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1. An optomechanical oscillator for measuring a magnetic field comprising:

  • a fixed substrate;

    a moveable mass separated from the fixed substrate by a slot;

    a photonic crystal comprising an optomechanical cavity formed at the slot, wherein the photonic crystal is provided on the fixed substrate and the moveable mass on opposite sides of the slot to form the optomechanical cavity; and

    a current source operably coupled to provide current to the photonic crystal,wherein the moveable mass is moveable responsive to placement of the optomechanical oscillator in a magnetic field based on interaction of the magnetic field and the current, andwherein the magnetic field is measureable based on displacement of the moveable mass.

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