Electro-optical device, method of manufacturing electro-optical device, and electronic apparatus

• US 9,897,798 B2
• Filed: 03/03/2016
• Issued: 02/20/2018
• Est. Priority Date: 04/01/2015
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: Ito, Satoshi
• Primary Examiner(s): THOMAS, BRANDI N
• Application Number:
  US15/059,707
• Publication Number:
  US 20160291317A1
• Time in Patent Office: 719 Days
• Field of Search: 359237, 359242, 359265-267, 359290-292, 359295, 359298
• CPC Class Codes: G02B 26/008 in the form of devices for effecting sequential colour changes, e.g. colour wheels
• CPC Class Codes: G02B 26/0833 the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD G02B26/0825 takes precedence; micromechanical devices in general B81B

Abstract

An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.

Claims

1. An electro-optical device comprising:

a substrate;

a first conductive layer that is provided above the substrate and includes a torsion hinge and at least a pair of first support posts protruded toward the substrate from the torsion hinge;

a second conductive layer that is provided above the first conductive layer and includes a flat plate and a second support post having a concave portion protruded toward the first conductive layer from the flat plate, an inner side of the concave portion being filled by a resin; and

a reflective layer provided above the resin and the flat plate, the reflective layer completely covering the concave portion having the resin therein and being in contact with the resin.

2. The electro-optical device according to claim 1, wherein a height difference between a height from the torsion hinge to a surface of the resin at a side opposite to the substrate, and a height from the torsion hinge to a surface of the flat plate at the side opposite to the substrate is equal to or less than 0.2 μ

m.

3. The electro-optical device according to claim 1, wherein a surface of the resin at a side opposite to the substrate and a surface of the flat plate at a side opposite to the substrate form a continuous plane.

4. The electro-optical device according to claim 1, wherein the second conductive layer is thicker than the reflective layer.

5. The electro-optical device according to claim 1, wherein the sum of the thicknesses of the second conductive layer and the reflective layer is from 0.2 μ

m to 0.5 μ

m.

6. The electro-optical device according to claim 1, wherein the resin has conductivity.

7. The electro-optical device according to claim 1, wherein the resin is formed of a photosensitive resin.

8. An electronic apparatus comprising:

the electro-optical device according to claim 1; and

a light source unit which emits light source light to the reflective layer.

9. An electronic apparatus comprising:

the electro-optical device according to claim 2; and

a light source unit which emits light source light to the reflective layer.

10. An electronic apparatus comprising:

the electro-optical device according to claim 3; and

a light source unit which emits light source light to the reflective layer.

11. An electronic apparatus comprising:

the electro-optical device according to claim 4; and

a light source unit which emits light source light to the reflective layer.

12. An electronic apparatus comprising:

the electro -optical device according to claim 5; and

a light source unit which emits light source light to the reflective layer.

13. An electronic apparatus comprising:

the electro -optical device according to claim 6; and

a light source unit which emits light source light to the reflective layer.

14. An electronic apparatus comprising:

the electro-optical device according to claim 7; and

a light source unit which emits light source light to the reflective layer.

15. The electro-optical device according to claim 1, wherein the reflective layer overlaps at least a part of the second conductive layer.

16. The electro-optical device according to claim 1, wherein a portion of the second conductive layer is positioned between the resin and the first conductive layer.