Stage positioning system and lithographic apparatus

• US 9,897,926 B2
• Filed: 01/20/2015
• Issued: 02/20/2018
• Est. Priority Date: 01/31/2014
• Status: Active Grant

• Current Assignee: ASML Netherlands BV (ASML Holding NV)
• Original Assignee: ASML Netherlands BV (ASML Holding NV)
• Inventors: Aangenent, Wilhelmus Henricus Theodorus Maria, Koorneef, Lucas Franciscus, Ruijl, Theo Anjes Maria, Van Den Berg, Stanley Constant Johannes Martinus, Van Der Meulen, Stan Henricus, Van Eijk, Jan, Wullms, Pieter Hubertus Godefrida, Van Lieshout, Richard Henricus Adrianus
• Primary Examiner(s): Kreutzer, Colin
• Application Number:
  US15/115,876
• Publication Number:
  US 20170010543A1
• Time in Patent Office: 1,127 Days
• Field of Search: 248636, 248638, 310 1205, 310 1206, 318649, 355 72, 355 75
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: H01L 21/68 for positioning, orientation or alignment

Abstract

A stage positioning system, includes a first body, a second body and a coupling arranged to couple the first body and the second body to each other. The coupling includes a visco-elastic element arranged to couple the first body and the second body to each other. The stage positioning system may further include a sensor to provide a signal representative of a position of the first body. The stage positioning system may further include an actuator to move the first body. The second body may be arranged to couple the actuator and the coupling to each other.

Claims

1. A stage positioning system, comprising:

a first body;

a second body;

an actuator configured to move the first body; and

a coupling arranged to couple the first body and the second body to each other,

wherein the coupling comprises a visco-elastic element arranged to couple the first body and the second body to each other and to transmit to the first body a force of the actuator to move the first body, and the second body is arranged to couple the actuator and the coupling to each other, and

wherein the coupling comprises an elastic element arranged to couple the first body and the second body to each other in parallel to the visco-elastic element.

2. The stage positioning system of claim 1, comprising a sensor to provide a signal representative of a position of the first body.

3. The stage positioning system of claim 1, wherein the second body comprises the actuator.

4. The stage positioning system of claim 1, wherein the actuator comprises a reluctance actuator.

5. The stage positioning system of claim 1, comprising a long-stroke module, wherein the long-stroke module is arranged to move the actuator, and the actuator is arranged to move the first body relative to the long-stroke module.

6. The stage positioning system of claim 1, wherein the visco-elastic element has a frequency-dependent stiffness, the frequency-dependent stiffness is characterized by a glass transition region, the first body forms a dynamical system characterized by a dominant natural frequency, and the dominant natural frequency lies in the glass transition region at an operating temperature of the stage positioning system.

7. The stage positioning system of claim 6, wherein:

the elastic element has a stiffness having a first value,

the frequency-dependent stiffness is characterized by a glass region,

the frequency-dependent stiffness is characterized by a rubber region,

the frequency-dependent stiffness has a second value at a second frequency,

the second frequency lies in the rubber region at the operating temperature of the stage positioning system,

the frequency-dependent stiffness has a third value at a third frequency,

the third frequency lies in the glass region at the operating temperature of the stage positioning system,

the second frequency is lower than the dominant natural frequency,

the third frequency is higher than the dominant natural frequency,

the first value is larger than the second value, and

the first value is smaller than the third value.

8. The stage positioning system of claim 7, wherein the frequency-dependent stiffness has a fourth value at the dominant natural frequency, and wherein the fourth value is larger than the first value.

9. The stage positioning system of claim 6,

wherein the first body, the second body and the coupling together form a further dynamical system having a further natural frequency,

wherein the further natural frequency corresponds to a resonance mode that is substantially determined by a deformation of the coupling, and

wherein the dominant natural frequency is equal to the further natural frequency.

10. A lithographic apparatus comprising:

a support structure configured to support a patterning device having a pattern,

a projection system configured to project the pattern on a substrate,

a substrate table configured to hold the substrate,

the stage positioning system of claim 1,

wherein the first body comprises the support structure or the substrate table.

11. The lithographic apparatus of claim 10, wherein the second body comprises the actuator.

12. The lithographic apparatus of claim 10, wherein the actuator comprises a reluctance actuator.

13. The lithographic apparatus of claim 10, comprising a long-stroke module, wherein the long-stroke module is arranged to move the actuator, and the actuator is arranged to move the first body relative to the long-stroke module.

14. The lithographic apparatus of claim 10, wherein the visco-elastic element has a frequency-dependent stiffness, the frequency-dependent stiffness is characterized by a glass transition region, the first body forms a dynamical system characterized by a dominant natural frequency, and the dominant natural frequency lies in the glass transition region at an operating temperature of the stage positioning system.

15. The stage positioning system of claim 2, wherein the first body comprises a mount configured to mount the sensor or a reference arranged to cooperate with the sensor.

16. The stage positioning system of claim 1, wherein the elastic element is arranged to at least partly surround the visco-elastic element.

17. The stage positioning system of claim 1, wherein the visco-elastic element is arranged to at least partly surround the elastic element.

18. A method comprising:

using an actuator of a stage positioning system to move a first body of the stage positioning system, wherein a coupling of the stage positioning system couples the first body to a second body of the stage positioning system and wherein the coupling comprises a visco-elastic element coupling the first body and the second body to each other and arranged to transmit to the first body a force of the actuator to move the first body, and the second body couples the actuator and the coupling to each other and wherein the coupling comprises an elastic element arranged to couple the first body and the second body to each other in parallel to the visco-elastic element.

19. A stage positioning system, comprising:

a first body;

a second body;

an actuator configured to move the first body; and

a coupling arranged to couple the first body and the second body to each other,

wherein the coupling comprises a visco-elastic element arranged to couple the first body and the second body to each other, and the second body is arranged to couple the actuator and the coupling to each other,

wherein the visco-elastic element has a frequency-dependent stiffness, the frequency-dependent stiffness is characterized by a glass transition region, the first body forms a dynamical system characterized by a dominant natural frequency, and the dominant natural frequency lies in the glass transition region at an operating temperature of the stage positioning system, and

wherein the first body, the second body and the coupling together form a further dynamical system having a further natural frequency, the further natural frequency corresponds to a resonance mode that is substantially determined by a deformation of the coupling and the dominant natural frequency is essentially equal to the further natural frequency.

20. The stage positioning system of claim 19, wherein the visco-elastic element is arranged to transmit to the first body a force of the actuator to move the first body.