Gas intake device of magnetron sputtering vacuum chamber and magnetron sputtering apparatus
First Claim
1. A gas intake device of magnetron sputtering vacuum chamber, comprising:
- a gas mixing box configured to receive and mix a gas or gases,a gas intake box configured to introduce the gas or gases into a vacuum chamber, anda connecting pipe configured to connect with the gas mixing box and the gas intake box,whereinthe gas intake box at least comprises an inner box and an outer box, the inner box is nested in the outer box, a space is provided between the inner box and the outer box, and gas flow holes are distributed on walls of the inner box and the outer box, an opening of the connecting pipe is disposed in the inner box, to enable the gas or the gases to flow from the inner box to the outer box.
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Accused Products
Abstract
A gas intake device of magnetron sputtering vacuum chamber and a magnetron sputtering apparatus with the gas intake device, the gas intake device of magnetron sputtering vacuum chamber comprises a gas mixing box configured to receive and mix the gas, a gas intake box configured to introduce the gas into a vacuum chamber, and a connecting pipe configured to connect with the two boxes, the gas mixing box has one or more gas intake pipes. The gas intake device can increase the distribution uniformity after the gas enters inside the vacuum chamber, effectively decrease the impact force to the precision equipment(s) in the vacuum chamber, and extend the service life of the apparatus.
9 Citations
19 Claims
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1. A gas intake device of magnetron sputtering vacuum chamber, comprising:
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a gas mixing box configured to receive and mix a gas or gases, a gas intake box configured to introduce the gas or gases into a vacuum chamber, and a connecting pipe configured to connect with the gas mixing box and the gas intake box, wherein the gas intake box at least comprises an inner box and an outer box, the inner box is nested in the outer box, a space is provided between the inner box and the outer box, and gas flow holes are distributed on walls of the inner box and the outer box, an opening of the connecting pipe is disposed in the inner box, to enable the gas or the gases to flow from the inner box to the outer box. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification