Efficient transfer of materials in manufacturing

• US 9,901,210 B2
• Filed: 01/13/2012
• Issued: 02/27/2018
• Est. Priority Date: 01/04/2012
• Status: Expired due to Fees

• Current Assignee: Globalfoundries Singapore Pte Limited (GlobalFoundries, Inc.)
• Original Assignee: Globalfoundries Singapore Pte Limited (GlobalFoundries, Inc.)
• Inventors: Chan, Chew Foo
• Primary Examiner(s): Fennema, Robert
• Assistant Examiner(s): PATEL, JIGNESHKUMAR C
• Application Number:
  US13/349,601
• Publication Number:
  US 20130184849A1
• Time in Patent Office: 2,237 Days
• Field of Search: 700113, 700112, 901 15
• CPC Class Codes: A47J 37/0713 with gas burners
• CPC Class Codes: G05B 19/41815 characterised by the cooperation between machine tools, manipulators and conveyor or other workpiece supply system, workcell
• CPC Class Codes: G05B 2219/31014 Synchronization between AGV movement and workpiece treatment chambers
• CPC Class Codes: G05D 1/0246 using a video camera in combination with image processing means
• CPC Class Codes: G05D 1/0274 using mapping information stored in a memory device navigation using map-matching G01C21/30
• CPC Class Codes: G06Q 10/08 Logistics, e.g. warehousing, loading or distribution; Inventory or stock management
• CPC Class Codes: H01L 21/67724 by means of a cart or a vehicule
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
• CPC Class Codes: Y02P 90/60 Electric or hybrid propulsion means for production processes

Abstract

Methods for automated handling for forming a device and automated handling systems for forming a device are presented. One of the methods includes providing a production area with a plurality of destinations and a transport system which includes transport and load/unload (U/L) units in the production area. The transport units include automated guided vehicles (AGVs) with a storage compartment for holding at least one carrier containing production material for forming the device and U/L units include AGVs with a robotic system for handling carriers. A transfer of a selected carrier from a first destination to a second destination is determined. A request to the transport system is issued to effect the transfer of the selected carrier, which includes using a selected U/L unit, a selected transport unit, or a combination of selected U/L and transport units.

Claims

1. A method for automated handling for forming a device comprising:

providing a production area with a plurality of destinations and a transport system comprising distinct transport units and load/unload (U/L) units which can freely and autonomously move in the production area to transfer carriers from one location to another location, the distinct transport units and U/L units comprise autonomously operated automated guided vehicles (AGVs), wherein

an AGV includes a navigation system with an object detection module for autonomous operation in the production area,

an AGV transport unit includes a storage compartment for holding at least one carrier containing production material for forming the device, wherein the AGV transport unit is dedicated to transport carriers from one location to another location, and

an AGV U/L unit comprises a robotic system for automatically handling carriers and transporting carriers from one location to another location, wherein

handling the carriers comprise loading a carrier into a machine from the AGV transport unit, and unloading a carrier from a machine onto the AGV transport unit, and

the AGV U/L unit transports a carrier from one location to another location if the locations are less than a threshold distance;

determining a transfer of a selected carrier from a first destination to a second destination using one or more of the distinct AGV transport units and U/L units based at least in part on the identified first and second destinations and the threshold distance; and

issuing a request to the transport system to effect the transfer of the selected carrier, wherein effecting the transfer comprises

employing a first selected U/L unit at the first destination for automatically loading the selected carrier onto a first selected transport unit,

employing the first selected transport unit to transfer the selected carrier to the second destination, and

employing a second selected U/L unit to unload the selected carrier from the first selected transport unit, or

employing the first selected U/L unit at the first destination for handling the selected carrier and transporting the selected carrier to the second destination,

wherein the transfer of the selected carrier is performed based on a lot list ranked by priority provided by a real-time dispatcher module of a production control system and based on an updated map of the production area.

2. The method of claim 1 wherein the carrier is a wafer carrier capable of containing a plurality of wafers used in forming semiconductor devices, the plurality of wafers form a lot of wafers.

3. The method of claim 1 wherein the device comprises a flat panel display device.

4. The method of claim 1 wherein the first and second destinations comprise machines which include tools, stockers, racks or a combination thereof.

5. The method of claim 4 wherein the tools are associated with indexers for reading information on a carrier tag of the selected carrier.

6. The method of claim 4 wherein:

a tool comprises a machine supervisory program (MSP) for controlling the operation of the tool; and

further comprises

a production control system for tracking and controlling the flow of carriers in the production area; and

a smart communication system between the MSPs of the tools, the production control system, the AGV U/L units and AGV transport units of the transport system.

7. The method of claim 6 wherein the communication system provides direct or indirect communication between the MSPs of the tools, the production control system, the AGV U/L units and AGV transport units of the transport system.

8. The method of claim 1 wherein the AGVs contain a map of the production area, wherein the map includes routes and locations of destinations.

9. The method of claim 1 wherein effecting the transfer comprises:

unloading the selected carrier at the first destination by the first selected U/L unit; and

loading the selected carrier at the second destination by the first selected U/L unit.

10. The method of claim 1 wherein effecting the transfer comprises:

unloading the selected carrier at the first destination by the first selected U/L unit; and

loading the selected carrier at the second destination by the second selected U/L unit.

11. The method of claim 10 further comprises:

loading the selected carrier onto the selected transport unit at the first destination;

transferring the selected carrier to the second destination by the selected transport unit; and

unloading the selected carrier from the selected transport unit by the second selected U/L unit.

12. The method of claim 1 wherein the AGVs comprise the object detection module for detecting and avoiding objects for safe operation in a human environment.

13. A method for automated handling for forming a device comprising:

providing a production facility with a plurality of destinations;

providing distinct transport units and load/unload (U/L) units which can freely and autonomously move in the production facility to transfer carriers from one location to another location, the distinct transport units and U/L units comprise autonomously operated automated guided vehicles (AGVs), wherein

an AGV includes a navigation system with an object detection module for autonomous operation in a production area,

an AGV transport unit is dedicated to transport one or more carriers in a storage compartment of the AGV transport unit, a carrier contains production material for forming the device,

an AGV U/L unit includes a robotic system for automatically handling carriers and transporting carriers from one location to another location, wherein

handling the carriers comprise loading a carrier into a machine from the AGV transport unit, and unloading a carrier from a machine onto the AGV transport unit, and

the AGV U/L unit transports a carrier from one location to another location if the locations are less than a threshold distance; and

transporting a selected carrier containing material for forming the device from a first machine at a first location to a second machine at a second location, wherein the transporting of the selected carrier comprises

employing a first AGV U/L unit to unload the selected carrier from the first machine and loading the selected carrier onto a first AGV transport unit, the first AGV transport unit moving from the first location to the second location to transport the selected carrier to the second location, and

employing a second AGV U/L unit to unload the selected carrier from the first AGV transport unit and loading the selected carrier in the second machine;

wherein the transporting of the selected carrier is performed based on a lot list ranked by priority provided by a real-time dispatcher module of a production control system and based on an updated map of the production area.

14. An automated handling system for forming a device comprising:

a production facility having a plurality of locations with machines;

a carrier containing material forming the device; and

distinct load/unload (U/L) units and transport units which can freely and autonomously move for effecting transfer of the carrier from a first location to a second location in the facility, the distinct U/L units and transport units comprise autonomously operated automated guided vehicles (AGVs), wherein

an AGV includes a navigation system with an object detection module for autonomous operation in a production area,

an AGV transport unit includes a storage compartment for holding at least one carrier containing production material for forming the device, wherein the AGV transport unit is dedicated to transporting at least one carrier,

an AGV U/L unit comprises a robotic system for automatically handling carriers and transporting carriers from one location to another location, wherein

handling the carriers comprise loading a carrier into a machine from the AGV transport unit, and unloading a carrier from a machine onto the AGV transport unit, and

the AGV U/L unit transports a carrier from one location to another location if the locations are less than a threshold distance, and

a transfer from the first location to the second location comprises

employing a first AGV U/L unit at the first location, wherein the first AGV U/L unit unloads a selected carrier from a first machine at the first location and loads the selected carrier onto a first AGV transport unit which proceeds to the second location, and

employing a second AGV U/L unit at the second location, wherein the second AGV U/L unit unloads the selected carrier from the first AGV transport unit and loads the selected carrier into a second machine at the second location;

wherein the transporting of the selected carrier from one location to another location is performed based on a lot list ranked by priority provided by a real-time dispatcher module of a production control system and based on an updated map of the production area.

15. An automated handling system for forming a device comprising:

automated guided vehicle (AGV) transport units;

AGV load/unload (U/L) units;

the distinct AGV transport units and AGV U/L units can freely and autonomously move to transfer carriers from one location to another location, and comprise autonomously operated AGVs, wherein

an AGV includes a navigation system with an object detection module for autonomous operation in a production area,

an AGV transport unit includes a storage compartment for holding at least one carrier containing production material for forming the device, wherein the AGV transport unit is dedicated to transporting at least one carrier, and

an AGV U/L unit comprises a robotic system for automatically handling carriers and transporting carriers from one location to another location, wherein

handling carriers comprise loading a carrier into a machine from the AGV transport unit, and unloading a carrier from a machine onto the AGV transport unit, and

the AGV U/L unit transports a carrier from one location to another location if the location are less than a threshold distance; and

a production control system for issuing commands to the distinct AGV transport units and AGV U/L units, thereby controlling the flow of production for forming the device;

wherein the transporting of the carriers from one location to another location is performed based on a lot list ranked by priority provided by a real-time dispatcher module of a production control system and based on an updated map of the production area.

16. The system of claim 15 wherein the distinct AGV transport units and AGV U/L units contain a map of the production area, wherein the map includes routes and locations of destinations.

17. The system of claim 15 wherein the object detection module of the distinct AGV transport units and AGV U/L units detects and avoids objects for safe operation in a human environment.

18. The system of claim 15 wherein the robotic system of the AGV U/L units comprises at least one robotic arm for loading and unloading a carrier.

19. The system of claim 15 wherein the robotic system of the AGV U/L units comprises a robotic vision unit for precise positioning of a carrier for loading and unloading.