Growing graphene on substrates

• US 9,905,418 B2
• Filed: 02/08/2017
• Issued: 02/27/2018
• Est. Priority Date: 10/25/2012
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Beasley, Cara, Hofmann, Ralf, Foad, Majeed A.
• Primary Examiner(s): Talbot, Brian K
• Application Number:
  US15/427,367
• Publication Number:
  US 20170148631A1
• Time in Patent Office: 384 Days
• Field of Search: 427122, 4272491
• CPC Class Codes: B05D 3/061 using U.V.
• CPC Class Codes: B05D 3/065 After-treatment
• CPC Class Codes: B05D 3/141 Plasma treatment
• CPC Class Codes: B05D 5/12 to obtain a coating with specific electrical properties
• CPC Class Codes: C01B 32/184 Preparation
• CPC Class Codes: C01B 32/186 by chemical vapour deposition [CVD]
• CPC Class Codes: H01L 21/02318 post-treatment
• CPC Class Codes: H01L 21/0234 treatment by exposure to a plasma
• CPC Class Codes: H01L 21/02345 treatment by exposure to radiation, e.g. visible light
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/02376 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02527 Carbon, e.g. diamond-like carbon
• CPC Class Codes: H01L 21/02628 using solutions
• CPC Class Codes: H01L 21/02664 Aftertreatments planarisation in general H01L21/304
• CPC Class Codes: H01L 21/288 from a liquid, e.g. electrolytic deposition

Abstract

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Claims

1. An uncatalyzed method of growing graphitic carbon on a substrate, comprising:

depositing a hydrocarbon layer directly on a silicon containing substrate from a precursor comprising a linear conjugated hydrocarbon and a solvent;

evaporating the solvent before applying energy to the hydrocarbon layer; and

forming a graphitic layer from the hydrocarbon layer by applying energy to the hydrocarbon layer.

2. The method of claim 1, wherein the solvent is an aprotic solvent.

3. The method of claim 1, wherein the aprotic solvent is benzene.

4. The method of claim 1, wherein evaporating the solvent is performed under an inert atmosphere comprising nitrogen, argon, hydrogen, or a combination thereof.

5. The method of claim 1, further comprises removing evaporated solvent with a drying agent or filter from a deposition chamber.

6. The method of claim 1, wherein the precursor further comprises a polynuclear aromatic compound.

7. The method of claim 6, wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

8. The method of claim 1, wherein depositing the hydrocarbon layer on the substrate comprises adhering molecules from the precursor to a surface of the substrate.

9. The method of claim 1, wherein the energy is selected from the group consisting of UV energy, plasma energy, thermal energy, and combinations thereof.

10. The method of claim 1, wherein the precursor has a viscosity less than about 3.0 cP at room temperature.

11. The method of claim 1, wherein the precursor further comprises an oxygen-containing solvent.

12. The method of claim 1, wherein the linear conjugated hydrocarbon is butadiene.

13. The method of claim 12, wherein the precursor further comprises a polynuclear aromatic compound.

14. The method of claim 1, wherein the graphitic carbon layer is at least about 80% graphene.

15. The method of claim 1, wherein depositing comprises spin coating the precursor onto the substrate.

16. An uncatalyzed method of forming graphene on a substrate, comprising:

providing a precursor comprising a linear unsaturated hydrocarbon, an aromatic hydrocarbon, and benzene;

directly depositing molecules from the precursor on the silicon containing substrate; and

reacting the molecules to form graphene by applying energy to the molecules.

17. The method of claim 16, wherein the precursor further comprises an oxygen-containing solvent.

18. An uncatalyzed method of forming graphene on a substrate, comprising:

depositing a hydrocarbon layer on a silicon containing substrate from a precursor comprising a linear conjugated hydrocarbon and a solvent;

evaporating the solvent before applying energy to the hydrocarbon layer; and

forming a graphene layer from the hydrocarbon layer by applying energy to the hydrocarbon layer using a staged UV exposure, wherein the staged UV exposure comprises;

exposing the hydrocarbon layer to UV energy in a first exposure operation; and

exposing the hydrocarbon layer to the UV energy in a second exposure operation after the first exposure operation.

19. The method of claim 18, wherein the staged UV exposure further comprises:

a rest period between the first exposure operation and the second exposure operation.

20. The method of claim 18, wherein the first exposure operation utilizes UV energy having a first power density selected to convert the hydrocarbon layer to graphene and the second exposure operation utilizes UV energy having a second power density selected to increase a grain size of the graphene formed during the first exposure operation.